JPS5835851A - 電子線装置におけるフイラメント交換機構 - Google Patents

電子線装置におけるフイラメント交換機構

Info

Publication number
JPS5835851A
JPS5835851A JP56135090A JP13509081A JPS5835851A JP S5835851 A JPS5835851 A JP S5835851A JP 56135090 A JP56135090 A JP 56135090A JP 13509081 A JP13509081 A JP 13509081A JP S5835851 A JPS5835851 A JP S5835851A
Authority
JP
Japan
Prior art keywords
lever
chamber
electron gun
filament
nut
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56135090A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yoshinori Takaba
鷹羽　義範
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56135090A priority Critical patent/JPS5835851A/ja
Publication of JPS5835851A publication Critical patent/JPS5835851A/ja
Publication of JPH0352177B2 publication Critical patent/JPH0352177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56135090A 1981-08-28 1981-08-28 電子線装置におけるフイラメント交換機構 Granted JPS5835851A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56135090A JPS5835851A (ja) 1981-08-28 1981-08-28 電子線装置におけるフイラメント交換機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56135090A JPS5835851A (ja) 1981-08-28 1981-08-28 電子線装置におけるフイラメント交換機構

Publications (2)

Publication Number Publication Date
JPS5835851A true JPS5835851A (ja) 1983-03-02
JPH0352177B2 JPH0352177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-09

Family

ID=15143595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56135090A Granted JPS5835851A (ja) 1981-08-28 1981-08-28 電子線装置におけるフイラメント交換機構

Country Status (1)

Country Link
JP (1) JPS5835851A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721918A (en) * 1984-07-19 1988-01-26 High Voltage Engineering Europa B.V. Process and apparatus for the exchange of emission sources
JP2009245725A (ja) * 2008-03-31 2009-10-22 Jeol Ltd 電子ビーム発生装置
CN103426705A (zh) * 2012-05-22 2013-12-04 日新离子机器株式会社 灯丝更换器和灯丝更换结构

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721918A (en) * 1984-07-19 1988-01-26 High Voltage Engineering Europa B.V. Process and apparatus for the exchange of emission sources
JP2009245725A (ja) * 2008-03-31 2009-10-22 Jeol Ltd 電子ビーム発生装置
CN103426705A (zh) * 2012-05-22 2013-12-04 日新离子机器株式会社 灯丝更换器和灯丝更换结构
JP2013243098A (ja) * 2012-05-22 2013-12-05 Nissin Ion Equipment Co Ltd フィラメント交換器及びフィラメント交換構造

Also Published As

Publication number Publication date
JPH0352177B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-08-09

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