JPS5833299A - Ultrasonic microscope - Google Patents

Ultrasonic microscope

Info

Publication number
JPS5833299A
JPS5833299A JP56130105A JP13010581A JPS5833299A JP S5833299 A JPS5833299 A JP S5833299A JP 56130105 A JP56130105 A JP 56130105A JP 13010581 A JP13010581 A JP 13010581A JP S5833299 A JPS5833299 A JP S5833299A
Authority
JP
Japan
Prior art keywords
sample
microscope
sonic
ultrasonic microscope
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56130105A
Other languages
Japanese (ja)
Inventor
潔 石川
浩 神田
景義 片倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56130105A priority Critical patent/JPS5833299A/en
Publication of JPS5833299A publication Critical patent/JPS5833299A/en
Pending legal-status Critical Current

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  • Transducers For Ultrasonic Waves (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 本発明は、高周波音波エネルギーを利用する顕微鏡に用
いて良好な音響レンズに関する。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an acoustic lens suitable for use in a microscope that utilizes high frequency sound wave energy.

近年、IGH2に及ぶ高周波の発生、検出が可能となっ
たために、水中での音波波長として約1ミクロンが得ら
れ、したがって音波エネルギーを利用した顕微鏡が検討
されるようになった。
In recent years, it has become possible to generate and detect high frequencies up to IGH2, resulting in a sound wave wavelength of approximately 1 micron underwater, and therefore, a microscope that utilizes sound wave energy has been considered.

このような超音波顕微鏡の構成を第1図に示す。The configuration of such an ultrasonic microscope is shown in FIG.

パルス発振器1から発生され九高圧パルス2は球面し゛
ンズ3の上面に蒸着等で形成された圧電物質4に印加さ
れる。この圧電物質4は高圧パルス2によって励振され
超音波を発生する。この超音波は球面レンズ3の中を伝
播し、他端面に設けられた凹面部により細く集束される
。この超音波ビームを媒質5を介して、2次元に機械走
査されている試料6(試料台10上に設置される)の面
上に照射する。試料6より反射されてくる音波を同じ球
面し/ズ3によシ受信し、受信器7で電気信号に変換し
てCFLT8の画面上に試料台10の走査装置9の走査
と同期させて表示することができる。
Nine high-voltage pulses 2 generated from a pulse oscillator 1 are applied to a piezoelectric material 4 formed on the upper surface of a spherical lens 3 by vapor deposition or the like. This piezoelectric material 4 is excited by the high voltage pulse 2 and generates ultrasonic waves. This ultrasonic wave propagates through the spherical lens 3 and is narrowly focused by a concave portion provided on the other end surface. This ultrasonic beam is irradiated via the medium 5 onto the surface of a sample 6 (placed on a sample stage 10) which is being mechanically scanned in two dimensions. The sound waves reflected from the sample 6 are received by the same spherical lens 3, converted into electrical signals by the receiver 7, and displayed on the screen of the CFLT 8 in synchronization with the scanning of the scanning device 9 of the sample stage 10. can do.

このような方式の超音波顕微鏡を使用すると、光学的に
不透明な物体でも音波は伝播するので、その内部構造を
知ることができる。その上物体の弾性、密度、粘性など
の物理的性質を反映した微細構造を描画できるので、他
の顕微鏡では不可能な情報を得ることができるなど、新
しい観察装置として注目をありめている。
When using this type of ultrasound microscope, sound waves propagate even in optically opaque objects, allowing us to understand their internal structures. Furthermore, it is attracting attention as a new observation device because it can depict the fine structure of an object that reflects its physical properties such as elasticity, density, and viscosity, allowing it to obtain information that is not possible with other microscopes.

上述のように構成された超音波顕微鏡を使用して試料を
観察する場合、試料が媒質5(例えば水)に対して、反
応、膨潤あるいは、溶解してしまうような物質の場合に
は観察が不可能である。
When observing a sample using the ultrasonic microscope configured as described above, observation may be difficult if the sample is a substance that reacts, swells, or dissolves in the medium 5 (for example, water). It's impossible.

本発明はこの点を鑑みてなされたもので、試料表面を薄
、膜で被覆し、媒質5が直接観察物質に接触しないよう
にしたことを特徴とするものである。
The present invention has been developed in view of this point, and is characterized in that the surface of the sample is coated with a thin film so that the medium 5 does not come into direct contact with the observation substance.

以下、本発明のlpmを図にもとづいて説明する。Hereinafter, the lpm of the present invention will be explained based on the drawings.

第2図は試料台10の上面に取りつけられた試料6を示
したものである。この試料6の面上に被覆材11を塗附
することによシ上述の問題を解決することができる。こ
こで使用する被覆材11には例えばネオプレ/をトルエ
、ン液内に2%楊度混合した溶液を使用する。この溶液
を試料面上に滴下すると、溶液は試料面上ですばやく拡
散し、数100〜数1000人程度の薄膜を作る。この
薄膜は試料表面の形状をそこなうことなく、一様に被覆
することができる。
FIG. 2 shows the sample 6 attached to the top surface of the sample stage 10. By applying the coating material 11 on the surface of the sample 6, the above-mentioned problem can be solved. The coating material 11 used here is, for example, a solution prepared by mixing 2% neoprene in a toluene solution. When this solution is dropped onto the sample surface, it quickly diffuses on the sample surface, forming a thin film of several hundred to several thousand layers. This thin film can be uniformly coated without damaging the shape of the sample surface.

このように被覆材を使用して試料に直接媒質の接触する
のを防止することによシ溶解されやすい物質や、膨潤さ
れやすい物質などの観察も容易に行うことができる。
By using the covering material to prevent the medium from coming into direct contact with the sample, it is possible to easily observe substances that are easily dissolved or swelled.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は超音波顕微鏡の概略構成を示す図、第第1図 ¥J 2 図 1 Figure 1 is a diagram showing the schematic configuration of an ultrasound microscope. ¥J 2 Figure 1

Claims (1)

【特許請求の範囲】[Claims] 1、音波ビームを発生する手段と、上記音波ビームを所
定焦点に集束する音響レンズと、上呂己焦点近傍に配置
される対象物でしよう乱された音波エネルギーを検出す
る音波顕微鏡において、上記対象物表面に耐水性薄膜を
塗附したことを4!j徴とする超音波顕微鏡。
1. A sonic microscope that detects sonic energy disturbed by a means for generating a sonic beam, an acoustic lens that focuses the sonic beam at a predetermined focus, and an object placed near the focal point. 4. Applying a water-resistant thin film to the surface of the object! Ultrasonic microscope with J characteristics.
JP56130105A 1981-08-21 1981-08-21 Ultrasonic microscope Pending JPS5833299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56130105A JPS5833299A (en) 1981-08-21 1981-08-21 Ultrasonic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56130105A JPS5833299A (en) 1981-08-21 1981-08-21 Ultrasonic microscope

Publications (1)

Publication Number Publication Date
JPS5833299A true JPS5833299A (en) 1983-02-26

Family

ID=15026064

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130105A Pending JPS5833299A (en) 1981-08-21 1981-08-21 Ultrasonic microscope

Country Status (1)

Country Link
JP (1) JPS5833299A (en)

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