JPS5830055A - イオンビ−ム源 - Google Patents
イオンビ−ム源Info
- Publication number
- JPS5830055A JPS5830055A JP56128889A JP12888981A JPS5830055A JP S5830055 A JPS5830055 A JP S5830055A JP 56128889 A JP56128889 A JP 56128889A JP 12888981 A JP12888981 A JP 12888981A JP S5830055 A JPS5830055 A JP S5830055A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- cylinder
- ion beam
- column
- molten metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56128889A JPS5830055A (ja) | 1981-08-18 | 1981-08-18 | イオンビ−ム源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56128889A JPS5830055A (ja) | 1981-08-18 | 1981-08-18 | イオンビ−ム源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5830055A true JPS5830055A (ja) | 1983-02-22 |
| JPS639339B2 JPS639339B2 (enExample) | 1988-02-27 |
Family
ID=14995850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56128889A Granted JPS5830055A (ja) | 1981-08-18 | 1981-08-18 | イオンビ−ム源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5830055A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60216432A (ja) * | 1984-04-11 | 1985-10-29 | Hitachi Ltd | イオンビーム形成方法および液体金属イオン源 |
| US4774433A (en) * | 1986-04-09 | 1988-09-27 | Hitachi, Ltd. | Apparatus for generating metal ions |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475636A (en) * | 1967-11-14 | 1969-10-28 | Hughes Aircraft Co | Liquid-metal arc cathode with maximized electron/atom emission ratio |
| JPS52125998A (en) * | 1976-04-13 | 1977-10-22 | Atomic Energy Authority Uk | Ion source |
-
1981
- 1981-08-18 JP JP56128889A patent/JPS5830055A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3475636A (en) * | 1967-11-14 | 1969-10-28 | Hughes Aircraft Co | Liquid-metal arc cathode with maximized electron/atom emission ratio |
| JPS52125998A (en) * | 1976-04-13 | 1977-10-22 | Atomic Energy Authority Uk | Ion source |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60216432A (ja) * | 1984-04-11 | 1985-10-29 | Hitachi Ltd | イオンビーム形成方法および液体金属イオン源 |
| US4774433A (en) * | 1986-04-09 | 1988-09-27 | Hitachi, Ltd. | Apparatus for generating metal ions |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS639339B2 (enExample) | 1988-02-27 |
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