JPS5829839U - Disc alignment device - Google Patents
Disc alignment deviceInfo
- Publication number
- JPS5829839U JPS5829839U JP12414281U JP12414281U JPS5829839U JP S5829839 U JPS5829839 U JP S5829839U JP 12414281 U JP12414281 U JP 12414281U JP 12414281 U JP12414281 U JP 12414281U JP S5829839 U JPS5829839 U JP S5829839U
- Authority
- JP
- Japan
- Prior art keywords
- disc
- disk
- alignment device
- transfer means
- disks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す平面図、第２図は側面
図、第３図は正面図、第４図及び第５図はシリコンウェ
ハの整列過程を示す正面図である。
５．６・・・・・・回転軸、８．９・・・・・・ゴムバ
ンド、１０・・・・・・シリコンウェハ、１０ａ・・・
・・・オリフラ、１８．１９・・・・・・ガイド、２６
．２９・・・・・・ストップピン、２７・・・・・・ゲ
ージ板、２７ａ・・・・・・傾斜部、３０？・・・・・
プーリ、３２・・・・・・ゴムバンド、３４・・・・・
・測定部。 、６
、 第３図
５ｔFIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a side view, FIG. 3 is a front view, and FIGS. 4 and 5 are front views showing the process of aligning silicon wafers. 5.6...Rotating shaft, 8.9...Rubber band, 10...Silicon wafer, 10a...
... Orifla, 18.19 ... Guide, 26
．． 29... Stop pin, 27... Gauge plate, 27a... Inclined part, 30?・・・・・・
Pulley, 32...Rubber band, 34...
・Measurement part. , 6, Figure 3 5t
Claims (1)
せる整列装置において、 前記円板を支持するように平行に配されており、この上
に乗った円板を移送する少なくとも２個のエンドレス状
移送手段、 前記エンドレス状移送手段と平行に配されており、円板
の周縁部に接してこれを案内する案内手段、 オリフラに垂直な中心線の長さとほぼ等しい距離を保っ
て前記案内手段と平行に配されており、円板の周縁部の
一部を徐々に持ち上げて円板を傾斜させるゲージ手段、 前記案内手段側に位置し、前記移送手段よりも高さが高
くなるように上方に突出したストップピン、 前記ゲージ手段とオリフラが対面することによりゲージ
手段から抜は落ちた円板を受は止め、前記ストップピン
を通過するように円板を傾けながら移送する第３の移送
手段とからなることを特徴とする円板の整列装置。 （２）前記エンドレス状移送手段はゴムバンドであるこ
とを特徴とする実用新案登録請求の範囲第１項記載の円
板の整列装置。[Claims for Utility Model Registration] 1.(1) An alignment device for aligning disks so that the orientation flat is at a certain position, which is arranged in parallel to support the disk, and a circle resting on the disk. at least two endless transfer means for transferring the plate; a guide means disposed parallel to the endless transfer means for contacting and guiding the peripheral edge of the disk; a length of a center line perpendicular to the orientation flat; Gauge means is arranged parallel to the guide means at a substantially equal distance and tilts the disc by gradually lifting a part of the peripheral edge of the disc; A stop pin protrudes upward so that the height is increased, and the gauge means and the orientation flat face each other to catch the disc that has been removed from the gauge means, and the disc is held so as to pass through the stop pin. and a third transfer means for transferring the disks while tilting the disks. (2) The disk alignment device according to claim 1, wherein the endless transfer means is a rubber band.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12414281U JPS5829839U (en) | 1981-08-24 | 1981-08-24 | Disc alignment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12414281U JPS5829839U (en) | 1981-08-24 | 1981-08-24 | Disc alignment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5829839U true JPS5829839U (en) | 1983-02-26 |
Family
ID=29918027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12414281U Pending JPS5829839U (en) | 1981-08-24 | 1981-08-24 | Disc alignment device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5829839U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63183375A (en) * | 1987-01-27 | 1988-07-28 | 日鉱金属株式会社 | Self-propelling type skimming device |
-
1981
- 1981-08-24 JP JP12414281U patent/JPS5829839U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63183375A (en) * | 1987-01-27 | 1988-07-28 | 日鉱金属株式会社 | Self-propelling type skimming device |
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