JPS5828708B2 - mass spectrometer - Google Patents

mass spectrometer

Info

Publication number
JPS5828708B2
JPS5828708B2 JP55076186A JP7618680A JPS5828708B2 JP S5828708 B2 JPS5828708 B2 JP S5828708B2 JP 55076186 A JP55076186 A JP 55076186A JP 7618680 A JP7618680 A JP 7618680A JP S5828708 B2 JPS5828708 B2 JP S5828708B2
Authority
JP
Japan
Prior art keywords
magnetic field
circuit
mass spectrometer
analysis
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55076186A
Other languages
Japanese (ja)
Other versions
JPS573360A (en
Inventor
純一郎 庄田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP55076186A priority Critical patent/JPS5828708B2/en
Publication of JPS573360A publication Critical patent/JPS573360A/en
Publication of JPS5828708B2 publication Critical patent/JPS5828708B2/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/20Magnetic deflection

Description

【発明の詳細な説明】 本発明は分析用磁場を発生する電磁石装置を備えた質量
分析装置に関し、特に外部から到来する外来磁力線によ
り生じる分析用磁場の変動に基づく悪影響を除くことの
できる質量分析装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a mass spectrometer equipped with an electromagnetic device that generates a magnetic field for analysis, and particularly to a mass spectrometer that can eliminate the adverse effects caused by fluctuations in the magnetic field for analysis caused by lines of external magnetic force coming from the outside. It is related to the device.

質量分析装置の分析用磁場は装置が高分解能になる程強
度の変動が小さいことが要求される。
The analysis magnetic field of a mass spectrometer is required to have smaller fluctuations in strength as the resolution of the device becomes higher.

そこで従来から磁場内にボール素子等の磁場強度検出素
子を配置し、該素子からの検出信号を基準信号と比較し
、その差が零になる様に励磁電流を制御し、磁場強度が
常に一定になる様にしている。
Conventionally, therefore, a magnetic field strength detection element such as a ball element is placed in the magnetic field, the detection signal from the element is compared with a reference signal, and the excitation current is controlled so that the difference becomes zero, so that the magnetic field strength is always constant. I'm trying to make it happen.

この様な従来方法では比較的大きなゆっくりした磁場変
動を打消すことはできる。
With such conventional methods, relatively large and slow magnetic field fluctuations can be canceled out.

ところが例えば電源トランス等分析磁場外から分析用磁
場を発生する電磁石のヨーク、励磁コイル等に飛びこむ
外来磁力線による分析磁場の微小な変動を打消すために
は制御系のループ利得を増加させる必要があり、系の発
振を招く恐れがあるため限界がある。
However, it is necessary to increase the loop gain of the control system in order to cancel out minute fluctuations in the analysis magnetic field caused by external magnetic lines of force that enter the yoke of the electromagnet, excitation coil, etc. that generate the analysis magnetic field from outside the analysis magnetic field, such as a power transformer. , there is a limit because it may cause oscillation of the system.

本発明はこの点に鑑みてなされたものであり、分析用磁
場を発生する電磁石の磁気回路中に検出コイルを、又磁
気回路外のイオン通路上に補正用磁場発生手段を夫々配
置し、検出コイルの出力信号を積分して補正用磁場発生
手段に供給することにより、イオンが分析用磁場の変動
により受けた悪影響を除(ことのできる質量分析装置を
提供することを目的としている。
The present invention has been made in view of this point, and detects by disposing a detection coil in the magnetic circuit of an electromagnet that generates a magnetic field for analysis, and a correction magnetic field generating means on the ion path outside the magnetic circuit. It is an object of the present invention to provide a mass spectrometer that can eliminate the adverse effects of ions caused by fluctuations in an analytical magnetic field by integrating the output signal of the coil and supplying the integrated signal to a correction magnetic field generating means.

以下図面を用いて本発明を詳述する。The present invention will be explained in detail below using the drawings.

図面は本発明の一実施例を示す構成図である。The drawing is a configuration diagram showing an embodiment of the present invention.

同図において1,2は分析用磁場を発生するための磁極
、3,4はポールピース、5,6は励磁コイル、1は磁
場制御電源である。
In the figure, 1 and 2 are magnetic poles for generating a magnetic field for analysis, 3 and 4 are pole pieces, 5 and 6 are excitation coils, and 1 is a magnetic field control power source.

ポールピース3゜4間に形成される分析用磁場には図示
しないイオン源からのイオン■が入射し、質量電荷比に
応じて偏向されて磁場外へ出射する。
Ions (2) from an ion source (not shown) enter the analysis magnetic field formed between the pole pieces 3 and 4, are deflected according to the mass-to-charge ratio, and are emitted outside the magnetic field.

又該磁場内にはホール素子等の磁場強度検出素子8が配
置され、該素子8から得られる検出信号は増巾器9を介
して前記磁場制御電源Iへ送られる。
A magnetic field strength detecting element 8 such as a Hall element is disposed within the magnetic field, and a detection signal obtained from the element 8 is sent to the magnetic field control power source I via an amplifier 9.

該制御電源1は検出信号と基準信号との差信号に基づい
てコイル5,6へ供給する励磁電流を制御するため、ポ
ールピース間に形成される分析用磁場は一定強度に保持
されることになる。
Since the control power source 1 controls the excitation current supplied to the coils 5 and 6 based on the difference signal between the detection signal and the reference signal, the analytical magnetic field formed between the pole pieces is maintained at a constant strength. Become.

この様な制御系では外来磁力線等に起因する分析磁場の
微小な変動を打消すことができないことは先に述べた通
りである。
As mentioned above, such a control system cannot cancel minute fluctuations in the analytical magnetic field caused by external lines of magnetic force.

そこで本発明では以下の様な構成を付加している。Therefore, in the present invention, the following configuration is added.

即ち10は分析磁場を発生する電磁石の磁気回路中に配
置され、分析磁場の変動を検出するための検出コイル、
11は上記分析磁場の後方イオン通路上に配置され、該
分析磁場と同−又は反対方向の補正磁場を発生するため
の補助コイルである。
That is, 10 is a detection coil arranged in the magnetic circuit of the electromagnet that generates the analytical magnetic field, and for detecting fluctuations in the analytical magnetic field;
Reference numeral 11 denotes an auxiliary coil disposed on the ion path behind the analysis magnetic field and for generating a correction magnetic field in the same or opposite direction as the analysis magnetic field.

上記検出コイル10から得られた検出信号は増巾器12
を介して積分回路13へ送られる。
The detection signal obtained from the detection coil 10 is transmitted to an amplifier 12.
The signal is sent to the integrating circuit 13 via.

そして該積分回路13の出力は移相回路14を介して上
記補助コイル11へ電流を供給するための駆動回路15
へ送られる。
The output of the integrating circuit 13 is then passed through a phase shift circuit 14 to a drive circuit 15 for supplying current to the auxiliary coil 11.
sent to.

斯かる構成において検出コイル10から得られdφ る検出信号は分析磁場φの変化率−に対応したt ものであり、該信号を積分した積分回路13の出力とし
ては磁場φの変化に対応した信号が得られる。
In such a configuration, the detection signal dφ obtained from the detection coil 10 is t corresponding to the rate of change of the analysis magnetic field φ, and the output of the integrating circuit 13 that integrates this signal is a signal corresponding to the change in the magnetic field φ. is obtained.

該信号は厳密には7積分回路13、増巾器12等により
磁場φの変化とは位相ずれが発生しているため、位相回
路14により位相ずれが零となる様に調整された後駆動
回路15を介して補助コイル11へ供給される。
Strictly speaking, this signal has a phase shift with respect to the change in the magnetic field φ due to the 7-integrator circuit 13, amplifier 12, etc., so the signal is adjusted so that the phase shift is zero by the phase circuit 14, and then the drive circuit 15 to the auxiliary coil 11.

該補助コイル11は該信号に基づいて、分析磁場の変動
によりイオンが受けた誤った偏向を打消す方向の(逆相
)の磁場を発生するため、該補助コイル11を通過した
イオンは上記誤った偏向が打消されたものとなる。
Based on the signal, the auxiliary coil 11 generates a magnetic field in the direction (opposite phase) that cancels out the erroneous deflection received by the ions due to fluctuations in the analysis magnetic field. The resulting deflection is canceled out.

尚コイル11の巻回方向が逆の場合は駆動回路15又は
増巾器12で信号を反転させるか、或いは移相回路の移
相量を更に1800ずらせば良い。
If the winding direction of the coil 11 is reversed, the signal may be inverted by the drive circuit 15 or the amplifier 12, or the phase shift amount of the phase shift circuit may be further shifted by 1800.

父上記実施例では補助コイル11を分析磁場の後方に配
置したが、前方に配置するようにしても良いし、検出コ
イル10の位置も電磁石の磁気回路中であればどこに配
置しても良い。
In the above embodiment, the auxiliary coil 11 is placed behind the analysis magnetic field, but it may be placed in front, and the detection coil 10 may be placed anywhere in the magnetic circuit of the electromagnet.

以上詳述した如く本発明によれば分析用磁場の変動を別
個に設けた補助コイルで打消すため、微小変動を早い応
答速度で打消すことができる。
As described in detail above, according to the present invention, fluctuations in the magnetic field for analysis are canceled by the separately provided auxiliary coil, so minute fluctuations can be canceled with a fast response speed.

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本発明の一実施例を示す構成図である。 1.2:磁極、3,4:ボールピース 5,6:励磁コ
イル、10:検出コイル、11:補助コイル、13:積
分回路、14:移相回路。
The drawing is a configuration diagram showing an embodiment of the present invention. 1.2: magnetic pole, 3, 4: ball piece, 5, 6: excitation coil, 10: detection coil, 11: auxiliary coil, 13: integrating circuit, 14: phase shifting circuit.

Claims (1)

【特許請求の範囲】[Claims] 1 イオンを質量電荷比に応じて分離するための分析用
磁場を発生する電磁石装置を備えそ質量分析装置におい
て、上記電磁石装置の磁気回路中に配置される検出コイ
ルと、該電磁石装置の磁気回路外のイオン通路に配置さ
れる補正磁場発生手段と、上記検出コイルからの検出信
号を積分し、上記補正磁場発生手段へ供給するための積
分回路とを設けたことを特徴とする質量分析装置。
1. A mass spectrometer comprising an electromagnetic device that generates an analytical magnetic field for separating ions according to their mass-to-charge ratio; a detection coil disposed in a magnetic circuit of the electromagnetic device; and a magnetic circuit of the electromagnetic device. A mass spectrometer comprising: a correction magnetic field generating means disposed in an outer ion path; and an integrating circuit for integrating a detection signal from the detection coil and supplying the integrated detection signal to the correction magnetic field generating means.
JP55076186A 1980-06-06 1980-06-06 mass spectrometer Expired JPS5828708B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55076186A JPS5828708B2 (en) 1980-06-06 1980-06-06 mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55076186A JPS5828708B2 (en) 1980-06-06 1980-06-06 mass spectrometer

Publications (2)

Publication Number Publication Date
JPS573360A JPS573360A (en) 1982-01-08
JPS5828708B2 true JPS5828708B2 (en) 1983-06-17

Family

ID=13598085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55076186A Expired JPS5828708B2 (en) 1980-06-06 1980-06-06 mass spectrometer

Country Status (1)

Country Link
JP (1) JPS5828708B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60121253U (en) * 1984-01-23 1985-08-15 日本電子株式会社 mass spectrometer
JPS63127423A (en) * 1986-11-17 1988-05-31 Hosokawa Katsupanshiyo:Kk Magnetic recording medium

Also Published As

Publication number Publication date
JPS573360A (en) 1982-01-08

Similar Documents

Publication Publication Date Title
US4243839A (en) Transducer with flux sensing coils
JPH01187424A (en) Torque sensor
CA2083988A1 (en) Balanced armature transducers with transverse gap
JPS5828708B2 (en) mass spectrometer
JPS6411845B2 (en)
US4417145A (en) Apparatus for controlling magnetic field intensity
US5140209A (en) Method of controlling electromagnets in electromagentic bearings
JPS57131200A (en) Electromagnetic driving system
EP1180783A3 (en) Magnet for generating a magnetic field in an ion source
JP3497336B2 (en) Energy filter
JP3133155B2 (en) Electron beam accelerator and bending magnet used for the accelerator
JPH0342617Y2 (en)
US4426553A (en) Vehicle loudspeaker arrangement with magnetic-field-sensitive device
CA2110646C (en) Light quantity control device
US3584161A (en) Balanced magnetic transducer
JPH0255960A (en) Photoelectric current sensor
JPH0686592A (en) Electromagnetic driving apparatus
JPH11345700A (en) Electromagnet and synchrotron using it
JPS63244546A (en) Malti-pole lens employing permanent magnet
JPH0452676B2 (en)
JPS5591543A (en) Electron beam focusing device
JPH02117060A (en) Microbeam generator
JPS6145449Y2 (en)
JPH01232700A (en) Electromagnet for charged particle device
JPH0613226A (en) Electromagnet device