JPS6145449Y2 - - Google Patents

Info

Publication number
JPS6145449Y2
JPS6145449Y2 JP1977132750U JP13275077U JPS6145449Y2 JP S6145449 Y2 JPS6145449 Y2 JP S6145449Y2 JP 1977132750 U JP1977132750 U JP 1977132750U JP 13275077 U JP13275077 U JP 13275077U JP S6145449 Y2 JPS6145449 Y2 JP S6145449Y2
Authority
JP
Japan
Prior art keywords
diaphragm
magnetic
magnet piece
magnet
coils
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977132750U
Other languages
Japanese (ja)
Other versions
JPS5458142U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977132750U priority Critical patent/JPS6145449Y2/ja
Publication of JPS5458142U publication Critical patent/JPS5458142U/ja
Application granted granted Critical
Publication of JPS6145449Y2 publication Critical patent/JPS6145449Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Description

【考案の詳細な説明】 この考案は、水中等に分散配設され、外圧に応
じて変位するダイアフラムの微少変位を高感度で
検出し、外圧を測定する圧力変換器に関する。
[Detailed Description of the Invention] This invention relates to a pressure transducer that is distributed in water or the like and measures external pressure by highly sensitively detecting minute displacements of diaphragms that are displaced in response to external pressure.

従来から圧力変換器には力平衡式、または変位
平衡式が用いられ、これらはダイアフラムからフ
オースビームを経て拡大機構に伝達されるためヒ
ステリシスなども含めて摩擦等の問題があり、そ
の感度に自ずと限界があつた。さらに水中に分散
配設される場合など通常の電力供給が困難な場所
で用いられる場合にはその駆動電源の消費が極力
少ないことが要求されている。
Traditionally, pressure transducers have been of the force-balanced type or displacement-balanced type, and since these are transmitted from the diaphragm to the expansion mechanism via the force beam, they have problems such as friction, including hysteresis, and their sensitivity is naturally limited. It was hot. Furthermore, when used in places where normal power supply is difficult, such as when distributed underwater, it is required that the consumption of the driving power source be as low as possible.

この考案は上記の不都合を解消し、ダイアフラ
ム等変位物体の微少変位量を高感度で検出でき、
しかも電力の消費の小さい圧力変換器を提供せん
とするもので、次にこの考案の1実施例について
説明する。
This invention solves the above-mentioned disadvantages, and can detect minute displacements of displacement objects such as diaphragms with high sensitivity.
Moreover, the present invention aims to provide a pressure transducer that consumes less electric power. Next, one embodiment of this invention will be described.

第1図はこの考案の圧力変換器の構成ならびに
動作説明図で、構成は外圧を受けて変形するダイ
アフラム5の中央にそのダイアフラム面に沿つて
N極・S極が配置されるように検出用磁石片3を
筐体に固着し、前記ダイアフラム5の変位による
前記磁石片3の磁束変化を検出するように2個の
互いに同方向に巻回されている磁気検出コイル
1,2(これらはコアを有するコイル(有芯コイ
ル)であり、コイルのコアが外部の磁界の影響を
受けてその透磁率が変化し、その結果コイルのイ
ンダクタンスが変化する)を並列に配設し、その
他端には前記磁石片3のN・S各極の磁界を打ち
消す図示の極性の補償用磁石片4を筐体6に磁気
検出コイル1,2と共に固設する。またコイル
1,2は交流電源9によつて励磁され、ブリツジ
回路の隣り合う2辺に差動的に接続されている。
Fig. 1 is an explanatory diagram of the configuration and operation of the pressure transducer of this invention. A magnet piece 3 is fixed to a housing, and two magnetic detection coils 1 and 2 are wound in the same direction (these are core (cored coil) in which the core of the coil is affected by an external magnetic field and its magnetic permeability changes, resulting in a change in the inductance of the coil), and the other end has a A compensating magnet piece 4 having the illustrated polarity that cancels out the magnetic fields of the N and S poles of the magnet piece 3 is fixed in the housing 6 together with the magnetic detection coils 1 and 2. The coils 1 and 2 are excited by an AC power source 9 and are differentially connected to two adjacent sides of the bridge circuit.

磁気検出コイル1,2の感度を充分にするため
には、検出磁石片3の着磁量を大きくする必要が
ある。この場合、磁石片3の着磁量を大きくする
と磁気検出コイル1,2に磁気飽和が生じ、磁石
片3の変位、すなわちダイヤフラム5の変位検出
が不能となる。したがつてこの磁束を打消し、磁
気検出コイル1,2をそれの作動領域まで持つて
くるために前記補償用磁石4が設けてある。な
お、6は前記1〜5を収容する筐体である。
In order to make the magnetic detection coils 1 and 2 sufficiently sensitive, it is necessary to increase the amount of magnetization of the detection magnet piece 3. In this case, if the amount of magnetization of the magnet piece 3 is increased, magnetic saturation occurs in the magnetic detection coils 1 and 2, making it impossible to detect the displacement of the magnet piece 3, that is, the displacement of the diaphragm 5. Therefore, the compensating magnet 4 is provided to cancel this magnetic flux and bring the magnetic detection coils 1, 2 to their operating range. In addition, 6 is a housing that accommodates the above-mentioned 1 to 5.

磁気検出コイル1,2と電気抵抗器7,8とを
ブリツジ接続し、交流電源9により磁気検出コイ
ル1,2を励磁する。この際の不平衡電圧を出力
端子10から取りだすように回路接続がなされて
いる。第2図は磁気検出コイルの特性図表で横軸
Hに磁界の強さ、縦軸eoに出力電圧がとつてあ
り、磁界の強さHの両端部M1,M2では出力電圧
eoは飽和している。この考案のものでは、検出用
磁石片3の磁束ψにより飽和状態になるのをそ
れと逆方向に作用する補償用磁石片4の磁束ψ
によつて検出用磁石片3の磁束ψを打消すこと
によつて直線動作領域Lにもつてきている。この
状態で外圧によりダイアフラム5が図の上下方向
A,Bの方向に変形すると、それに固定された検
出用磁石片3が変位し、磁気検出コイル1,2に
鎖交する磁束数が変り、磁気検出コイル1,2の
インダクタンスがそれぞれ逆方向に変化し、それ
ぞれの出力電圧がたがいに反対方向に変化する。
その結果両コイル1,2は差動的にブリツジ接続
されていることから両コイル1,2のインダクタ
ンス変化の差が出力電圧となつて出力端子10よ
りとりだされる。一方外部からの磁界の変化(磁
気ノイズ)は検出用磁石片3の磁界とは異なり、
両検出コイル1,2には同方向の同じ大きさの磁
界として作用することから両コイル1,2のイン
ダクタンスは同方向に変化するので、磁気ノイズ
は打消されブリツジ回路の出力として生じない。
その結果検出用磁石片3の微少変位、すなわちダ
イアフラムの微少変位が磁気ノイズに災いされる
ことなく高感度で検出することが可能となる。
The magnetic detection coils 1 and 2 and the electric resistors 7 and 8 are bridge-connected, and the magnetic detection coils 1 and 2 are excited by an AC power source 9. A circuit connection is made so that the unbalanced voltage at this time is taken out from the output terminal 10. Figure 2 is a characteristic chart of the magnetic detection coil, where the horizontal axis H shows the magnetic field strength, and the vertical axis eo shows the output voltage.At both ends of the magnetic field strength H, the output voltage
eo is saturated. In this device, the magnetic flux ψ 0 of the detection magnet piece 3 saturates by the magnetic flux ψ 0 of the compensating magnet piece 4 acting in the opposite direction.
By canceling the magnetic flux ψ 0 of the detection magnet piece 3, the linear operation region L is also reached. In this state, when the diaphragm 5 is deformed in the vertical directions A and B in the figure due to external pressure, the detection magnet piece 3 fixed to it is displaced, and the number of magnetic fluxes interlinking with the magnetic detection coils 1 and 2 changes, causing the magnetic The inductances of the detection coils 1 and 2 change in opposite directions, and the respective output voltages change in opposite directions.
As a result, since both coils 1 and 2 are differentially bridge-connected, the difference in inductance change between both coils 1 and 2 becomes an output voltage and is taken out from output terminal 10. On the other hand, changes in the magnetic field from the outside (magnetic noise) are different from the magnetic field of the detection magnet piece 3,
Since a magnetic field of the same magnitude in the same direction acts on both detection coils 1 and 2, the inductance of both coils 1 and 2 changes in the same direction, so that magnetic noise is canceled and is not generated as an output of the bridge circuit.
As a result, minute displacements of the detection magnet piece 3, that is, minute displacements of the diaphragm, can be detected with high sensitivity without being affected by magnetic noise.

実験によれば、0.001mmの検出磁石片(ダイア
フラム)の変位に対し、3mV程度の出力電圧変
化がえられ、その際の消費電流は80μAと極めて
少ないものであつた。
According to experiments, an output voltage change of about 3 mV was obtained for a displacement of the detection magnet piece (diaphragm) of 0.001 mm, and the current consumption at that time was extremely small at 80 μA.

第3図はこの考案の他の実施例の圧力変換器の
説明用斜視図で第1図と共通の部分には同一符号
が付してあり、かつ説明のために1部を破断して
示してある。
FIG. 3 is an explanatory perspective view of a pressure transducer according to another embodiment of this invention, in which parts common to those in FIG. There is.

この場合、検出用磁石片3は磁気検出コイル
1,2の磁束軸に対して直角方向に変位するよう
になつており、この構造によつて変換器の全体の
厚さを前記実施例のものに比し薄く構成できる。
なお上記実施例の場合、磁気良導材の小ねじによ
る補正磁極11を磁気検出コイル1,2の端部に
それぞれ設けてあり、ねじを進退させて補償磁界
の強さを自由に調整することも可能である。
In this case, the detection magnet piece 3 is displaceable in a direction perpendicular to the magnetic flux axes of the magnetic detection coils 1 and 2, and this structure reduces the overall thickness of the transducer to that of the previous embodiment. It can be made thinner than the .
In the case of the above embodiment, correction magnetic poles 11 made of small screws made of magnetically conductive material are provided at the ends of the magnetic detection coils 1 and 2, respectively, and the strength of the compensation magnetic field can be freely adjusted by moving the screws forward and backward. is also possible.

この考案の効果は外圧によつて変位するダイア
フラムに取付けられた小形磁石片と磁気検出コイ
ルと補償用磁石で構成し、補償用磁石でもつて磁
石片による磁界を打ち消し、磁気検出器の作動領
域に持つてくるようにしたので簡単な構造により
組立が容易で且つ無接触でダイアフラムの微少変
位を高感度で検出できるものである。
The effect of this device is that it consists of a small magnet piece attached to a diaphragm that is displaced by external pressure, a magnetic detection coil, and a compensation magnet. Since the device is held in place, the device has a simple structure and is easy to assemble, and can detect minute displacements of the diaphragm with high sensitivity without contact.

なお、この考案の圧力変換器はブリツジ接続に
よる差動検出回路を利用することにより外部から
の磁気ノイズの影響を除去し、かつ高感度の検出
能力がえられる。
The pressure transducer of this invention uses a bridge-connected differential detection circuit to eliminate the influence of external magnetic noise and to provide highly sensitive detection capability.

また、電源入力が小さく、それぞれ独立して水
中等に分散配設される圧力変換器と組み合わせて
用いる等、通常の電力供給が困難な場所で用いら
れる場合に上記の効果と共にさらに秀れた機能を
発揮しうる。
In addition, the power input is small, and when used in places where normal power supply is difficult, such as when used in combination with pressure transducers that are distributed independently in water etc., in addition to the above effects, it has even more excellent functions. can be demonstrated.

さらに実施例では2個の検出コイルが同方向に
励磁されるように差動的に接続し、検出回路をブ
リツジ回路としたので外部ノイズの影響を除去し
信号のみを大きく取り出すようにすることができ
る。
Furthermore, in the embodiment, the two detection coils are differentially connected so that they are excited in the same direction, and the detection circuit is a bridge circuit, so it is possible to remove the influence of external noise and extract only a large signal. can.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの考案の1実施例の圧力変換器の構
成ならびに動作説明図、第2図は磁気検出コイル
の特性説明図表、第3図はこの考案の他の実施例
の説明斜視図である。 1,2:磁気検出コイル、3:検出用磁石片、
4:補償用磁石片、5:ダイアフラム、6:筐
体、9:交流電源。
Fig. 1 is an explanatory diagram of the configuration and operation of a pressure transducer according to one embodiment of this invention, Fig. 2 is a diagram explaining characteristics of a magnetic detection coil, and Fig. 3 is an explanatory perspective view of another embodiment of this invention. . 1, 2: Magnetic detection coil, 3: Detection magnet piece,
4: Compensating magnet piece, 5: Diaphragm, 6: Housing, 9: AC power supply.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ダイアフラムの変位量を検出して、このダイヤ
フラムに作用する圧力を測定するものにおいてダ
イヤフラム面に沿つてN極・S極が配置されるよ
うにダイヤフラムの中央に固定された磁石片と、
この磁石片のN・S各極に磁気的に対向し、この
磁石片の磁界を打消すように筐体に固定配置され
た補償用磁石と、これら両磁石の対向した各磁極
間に配置され、かつ互いに同方向に巻回されてい
る2個の有芯の磁気検出コイルと、この各コイル
を隣り合う2辺に組込んだブリツジ回路と、この
ブリツジ回路の交流電源とを有し、ブリツジ回路
より変位に比例した出力電圧を得るとともに上記
補償用磁石で直線動作領域を設定し得るようにし
たことを特徴とする圧力変換器。
A magnet piece fixed to the center of the diaphragm so that the north and south poles are arranged along the diaphragm surface in a device that detects the amount of displacement of the diaphragm and measures the pressure acting on the diaphragm;
A compensating magnet is magnetically opposed to each of the N and S poles of this magnet piece, and is fixedly arranged on the housing so as to cancel the magnetic field of this magnet piece, and a compensating magnet is arranged between each of the opposing magnetic poles of these two magnets. , and has two cored magnetic detection coils wound in the same direction, a bridge circuit in which each of the coils is installed on two adjacent sides, and an AC power source for the bridge circuit. A pressure transducer characterized in that an output voltage proportional to displacement is obtained from a circuit, and a linear operation region can be set using the compensation magnet.
JP1977132750U 1977-09-30 1977-09-30 Expired JPS6145449Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977132750U JPS6145449Y2 (en) 1977-09-30 1977-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977132750U JPS6145449Y2 (en) 1977-09-30 1977-09-30

Publications (2)

Publication Number Publication Date
JPS5458142U JPS5458142U (en) 1979-04-21
JPS6145449Y2 true JPS6145449Y2 (en) 1986-12-20

Family

ID=29100584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977132750U Expired JPS6145449Y2 (en) 1977-09-30 1977-09-30

Country Status (1)

Country Link
JP (1) JPS6145449Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49107557A (en) * 1973-02-15 1974-10-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49107557A (en) * 1973-02-15 1974-10-12

Also Published As

Publication number Publication date
JPS5458142U (en) 1979-04-21

Similar Documents

Publication Publication Date Title
US5493216A (en) Magnetic position detector
GB1535197A (en) Magnetic field sensing apparatus
JP2002243766A (en) Electric current sensor
JPH01187424A (en) Torque sensor
JPH0246901B2 (en)
JP3487452B2 (en) Magnetic detector
EP0435232B1 (en) Inductance-type displacement sensor having resistance to external magnetic fields
JPS6145449Y2 (en)
JP2001116773A (en) Current sensor and current detector
JPH07105809A (en) Linear displacement sensor
JPH0530716A (en) Detector for axial displacement of rotor in induction motor
KR0153451B1 (en) Magnetic bearing device
JPH1151968A (en) Vibration sensor
JP2514338B2 (en) Current detector
JPS5926286Y2 (en) Accelerometer
JP2596841B2 (en) Inductance displacement sensor
RU2017101C1 (en) Pressure transducer
SU783689A1 (en) Apparatus for recording magnetic field
JPS60260822A (en) Torque sensor
JP2831206B2 (en) Magnetostrictive torque sensor
JPS594247Y2 (en) Fixed position detection device
JPH0377001A (en) Spool position detecting sensor
JP2709606B2 (en) Linear motor
JPS5831613B2 (en) Servo mechanism
JP2002040043A (en) Acceleration sensor