JPS5827021Y2 - 噴流式メツキ装置 - Google Patents

噴流式メツキ装置

Info

Publication number
JPS5827021Y2
JPS5827021Y2 JP2552779U JP2552779U JPS5827021Y2 JP S5827021 Y2 JPS5827021 Y2 JP S5827021Y2 JP 2552779 U JP2552779 U JP 2552779U JP 2552779 U JP2552779 U JP 2552779U JP S5827021 Y2 JPS5827021 Y2 JP S5827021Y2
Authority
JP
Japan
Prior art keywords
wafer
plating
back surface
electrode
plating solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2552779U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55124473U (OSRAM
Inventor
隆史 水口
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP2552779U priority Critical patent/JPS5827021Y2/ja
Publication of JPS55124473U publication Critical patent/JPS55124473U/ja
Application granted granted Critical
Publication of JPS5827021Y2 publication Critical patent/JPS5827021Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2552779U 1979-02-27 1979-02-27 噴流式メツキ装置 Expired JPS5827021Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2552779U JPS5827021Y2 (ja) 1979-02-27 1979-02-27 噴流式メツキ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2552779U JPS5827021Y2 (ja) 1979-02-27 1979-02-27 噴流式メツキ装置

Publications (2)

Publication Number Publication Date
JPS55124473U JPS55124473U (OSRAM) 1980-09-03
JPS5827021Y2 true JPS5827021Y2 (ja) 1983-06-11

Family

ID=28866065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2552779U Expired JPS5827021Y2 (ja) 1979-02-27 1979-02-27 噴流式メツキ装置

Country Status (1)

Country Link
JP (1) JPS5827021Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH083153B2 (ja) * 1990-02-26 1996-01-17 日本電装株式会社 めっき装置

Also Published As

Publication number Publication date
JPS55124473U (OSRAM) 1980-09-03

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