JPS5825243A - 半導体ウェーハ処理方法 - Google Patents

半導体ウェーハ処理方法

Info

Publication number
JPS5825243A
JPS5825243A JP12299381A JP12299381A JPS5825243A JP S5825243 A JPS5825243 A JP S5825243A JP 12299381 A JP12299381 A JP 12299381A JP 12299381 A JP12299381 A JP 12299381A JP S5825243 A JPS5825243 A JP S5825243A
Authority
JP
Japan
Prior art keywords
inspection
film thickness
foreign matter
thin film
magazine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12299381A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241173B2 (enrdf_load_stackoverflow
Inventor
Masakuni Akiba
秋葉　政邦
Hiroto Nagatomo
長友　宏人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12299381A priority Critical patent/JPS5825243A/ja
Publication of JPS5825243A publication Critical patent/JPS5825243A/ja
Publication of JPH0241173B2 publication Critical patent/JPH0241173B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12299381A 1981-08-07 1981-08-07 半導体ウェーハ処理方法 Granted JPS5825243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12299381A JPS5825243A (ja) 1981-08-07 1981-08-07 半導体ウェーハ処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12299381A JPS5825243A (ja) 1981-08-07 1981-08-07 半導体ウェーハ処理方法

Publications (2)

Publication Number Publication Date
JPS5825243A true JPS5825243A (ja) 1983-02-15
JPH0241173B2 JPH0241173B2 (enrdf_load_stackoverflow) 1990-09-14

Family

ID=14849622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12299381A Granted JPS5825243A (ja) 1981-08-07 1981-08-07 半導体ウェーハ処理方法

Country Status (1)

Country Link
JP (1) JPS5825243A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479986B1 (ko) * 1996-09-06 2005-07-28 동경 엘렉트론 주식회사 막두께측정장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839172A (enrdf_load_stackoverflow) * 1971-09-22 1973-06-08
JPS5317471A (en) * 1976-07-30 1978-02-17 Zenji Ishikawa Chair with reclining mechanism
JPS5488271U (enrdf_load_stackoverflow) * 1977-12-02 1979-06-22
JPS5540184A (en) * 1978-09-18 1980-03-21 Nippon Steel Corp Rope trolley type travelling equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4839172A (enrdf_load_stackoverflow) * 1971-09-22 1973-06-08
JPS5317471A (en) * 1976-07-30 1978-02-17 Zenji Ishikawa Chair with reclining mechanism
JPS5488271U (enrdf_load_stackoverflow) * 1977-12-02 1979-06-22
JPS5540184A (en) * 1978-09-18 1980-03-21 Nippon Steel Corp Rope trolley type travelling equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100479986B1 (ko) * 1996-09-06 2005-07-28 동경 엘렉트론 주식회사 막두께측정장치

Also Published As

Publication number Publication date
JPH0241173B2 (enrdf_load_stackoverflow) 1990-09-14

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