JPS5823172Y2 - ハンシヤデンシケンシユツソウチ - Google Patents

ハンシヤデンシケンシユツソウチ

Info

Publication number
JPS5823172Y2
JPS5823172Y2 JP1974078017U JP7801774U JPS5823172Y2 JP S5823172 Y2 JPS5823172 Y2 JP S5823172Y2 JP 1974078017 U JP1974078017 U JP 1974078017U JP 7801774 U JP7801774 U JP 7801774U JP S5823172 Y2 JPS5823172 Y2 JP S5823172Y2
Authority
JP
Japan
Prior art keywords
sample
electron beam
target
incident
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974078017U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5121552U (https=
Inventor
啓義 副島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1974078017U priority Critical patent/JPS5823172Y2/ja
Publication of JPS5121552U publication Critical patent/JPS5121552U/ja
Application granted granted Critical
Publication of JPS5823172Y2 publication Critical patent/JPS5823172Y2/ja
Expired legal-status Critical Current

Links

JP1974078017U 1974-07-01 1974-07-01 ハンシヤデンシケンシユツソウチ Expired JPS5823172Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974078017U JPS5823172Y2 (ja) 1974-07-01 1974-07-01 ハンシヤデンシケンシユツソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974078017U JPS5823172Y2 (ja) 1974-07-01 1974-07-01 ハンシヤデンシケンシユツソウチ

Publications (2)

Publication Number Publication Date
JPS5121552U JPS5121552U (https=) 1976-02-17
JPS5823172Y2 true JPS5823172Y2 (ja) 1983-05-18

Family

ID=28253415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974078017U Expired JPS5823172Y2 (ja) 1974-07-01 1974-07-01 ハンシヤデンシケンシユツソウチ

Country Status (1)

Country Link
JP (1) JPS5823172Y2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013120650A (ja) * 2011-12-06 2013-06-17 Hitachi High-Technologies Corp 走査電子顕微鏡および二次電子検出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829180A (https=) * 1971-08-17 1973-04-18

Also Published As

Publication number Publication date
JPS5121552U (https=) 1976-02-17

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