JPS5822381A - プラズマエツチング方法およびそのための装置 - Google Patents

プラズマエツチング方法およびそのための装置

Info

Publication number
JPS5822381A
JPS5822381A JP56119177A JP11917781A JPS5822381A JP S5822381 A JPS5822381 A JP S5822381A JP 56119177 A JP56119177 A JP 56119177A JP 11917781 A JP11917781 A JP 11917781A JP S5822381 A JPS5822381 A JP S5822381A
Authority
JP
Japan
Prior art keywords
electrodes
parallel
container
magnetic field
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56119177A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0245715B2 (enrdf_load_stackoverflow
Inventor
Takashi Hirao
孝 平尾
Koshiro Mori
森　幸四郎
Masatoshi Kitagawa
雅俊 北川
Shinichiro Ishihara
伸一郎 石原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56119177A priority Critical patent/JPS5822381A/ja
Publication of JPS5822381A publication Critical patent/JPS5822381A/ja
Publication of JPH0245715B2 publication Critical patent/JPH0245715B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP56119177A 1981-07-31 1981-07-31 プラズマエツチング方法およびそのための装置 Granted JPS5822381A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56119177A JPS5822381A (ja) 1981-07-31 1981-07-31 プラズマエツチング方法およびそのための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56119177A JPS5822381A (ja) 1981-07-31 1981-07-31 プラズマエツチング方法およびそのための装置

Publications (2)

Publication Number Publication Date
JPS5822381A true JPS5822381A (ja) 1983-02-09
JPH0245715B2 JPH0245715B2 (enrdf_load_stackoverflow) 1990-10-11

Family

ID=14754811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56119177A Granted JPS5822381A (ja) 1981-07-31 1981-07-31 プラズマエツチング方法およびそのための装置

Country Status (1)

Country Link
JP (1) JPS5822381A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3500328A1 (de) 1985-01-07 1986-07-10 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Zerstaeubungsaetzvorrichtung
JPS63140089A (ja) * 1986-12-01 1988-06-11 Anelva Corp アルミニウム合金膜のエツチング方法とその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435172A (en) * 1977-08-24 1979-03-15 Anelva Corp Chemical reactor using electric discharge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435172A (en) * 1977-08-24 1979-03-15 Anelva Corp Chemical reactor using electric discharge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3500328A1 (de) 1985-01-07 1986-07-10 Nihon Shinku Gijutsu K.K., Chigasaki, Kanagawa Zerstaeubungsaetzvorrichtung
JPS63140089A (ja) * 1986-12-01 1988-06-11 Anelva Corp アルミニウム合金膜のエツチング方法とその装置

Also Published As

Publication number Publication date
JPH0245715B2 (enrdf_load_stackoverflow) 1990-10-11

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