JPS58221803A - 塩化カリウム用反射防止膜 - Google Patents
塩化カリウム用反射防止膜Info
- Publication number
- JPS58221803A JPS58221803A JP57104693A JP10469382A JPS58221803A JP S58221803 A JPS58221803 A JP S58221803A JP 57104693 A JP57104693 A JP 57104693A JP 10469382 A JP10469382 A JP 10469382A JP S58221803 A JPS58221803 A JP S58221803A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- refractive index
- as2s3
- potassium chloride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 title claims abstract description 32
- 235000011164 potassium chloride Nutrition 0.000 title claims abstract description 14
- 239000001103 potassium chloride Substances 0.000 title claims abstract description 14
- UKUVVAMSXXBMRX-UHFFFAOYSA-N 2,4,5-trithia-1,3-diarsabicyclo[1.1.1]pentane Chemical compound S1[As]2S[As]1S2 UKUVVAMSXXBMRX-UHFFFAOYSA-N 0.000 claims abstract description 21
- 229940052288 arsenic trisulfide Drugs 0.000 claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims abstract description 14
- FPHIOHCCQGUGKU-UHFFFAOYSA-L difluorolead Chemical compound F[Pb]F FPHIOHCCQGUGKU-UHFFFAOYSA-L 0.000 claims abstract description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 14
- 238000010521 absorption reaction Methods 0.000 abstract description 5
- 238000005498 polishing Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 39
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 10
- 238000000576 coating method Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 description 5
- 239000001569 carbon dioxide Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- MZQZQKZKTGRQCG-UHFFFAOYSA-J thorium tetrafluoride Chemical compound F[Th](F)(F)F MZQZQKZKTGRQCG-UHFFFAOYSA-J 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000012788 optical film Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 241000270281 Coluber constrictor Species 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000004770 chalcogenides Chemical group 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- OQZCSNDVOWYALR-UHFFFAOYSA-N flurochloridone Chemical compound FC(F)(F)C1=CC=CC(N2C(C(Cl)C(CCl)C2)=O)=C1 OQZCSNDVOWYALR-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000941 radioactive substance Substances 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000000411 transmission spectrum Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57104693A JPS58221803A (ja) | 1982-06-19 | 1982-06-19 | 塩化カリウム用反射防止膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57104693A JPS58221803A (ja) | 1982-06-19 | 1982-06-19 | 塩化カリウム用反射防止膜 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58221803A true JPS58221803A (ja) | 1983-12-23 |
JPS6235641B2 JPS6235641B2 (enrdf_load_stackoverflow) | 1987-08-03 |
Family
ID=14387550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57104693A Granted JPS58221803A (ja) | 1982-06-19 | 1982-06-19 | 塩化カリウム用反射防止膜 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58221803A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60263901A (ja) * | 1984-06-13 | 1985-12-27 | Agency Of Ind Science & Technol | 塩化カリウム用反射防止膜 |
JPS6125103A (ja) * | 1984-07-14 | 1986-02-04 | Horiba Ltd | Co2レ−ザ−用光学部品 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4075885A (en) * | 1977-02-23 | 1978-02-28 | Iowa State University Research Foundation, Inc. | Rock borehole shear tester |
-
1982
- 1982-06-19 JP JP57104693A patent/JPS58221803A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4075885A (en) * | 1977-02-23 | 1978-02-28 | Iowa State University Research Foundation, Inc. | Rock borehole shear tester |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60263901A (ja) * | 1984-06-13 | 1985-12-27 | Agency Of Ind Science & Technol | 塩化カリウム用反射防止膜 |
JPS6125103A (ja) * | 1984-07-14 | 1986-02-04 | Horiba Ltd | Co2レ−ザ−用光学部品 |
Also Published As
Publication number | Publication date |
---|---|
JPS6235641B2 (enrdf_load_stackoverflow) | 1987-08-03 |
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