JPS5822077Y2 - 高温高純度ガス雰囲気炉 - Google Patents

高温高純度ガス雰囲気炉

Info

Publication number
JPS5822077Y2
JPS5822077Y2 JP7909279U JP7909279U JPS5822077Y2 JP S5822077 Y2 JPS5822077 Y2 JP S5822077Y2 JP 7909279 U JP7909279 U JP 7909279U JP 7909279 U JP7909279 U JP 7909279U JP S5822077 Y2 JPS5822077 Y2 JP S5822077Y2
Authority
JP
Japan
Prior art keywords
furnace
gas atmosphere
heating chamber
purity gas
atmosphere furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7909279U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55178700U (enExample
Inventor
田中直
渡部一夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Konetsu Kogyo Co Ltd
Original Assignee
Tokai Konetsu Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Konetsu Kogyo Co Ltd filed Critical Tokai Konetsu Kogyo Co Ltd
Priority to JP7909279U priority Critical patent/JPS5822077Y2/ja
Publication of JPS55178700U publication Critical patent/JPS55178700U/ja
Application granted granted Critical
Publication of JPS5822077Y2 publication Critical patent/JPS5822077Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Powder Metallurgy (AREA)
  • Tunnel Furnaces (AREA)
  • Furnace Details (AREA)
JP7909279U 1979-06-12 1979-06-12 高温高純度ガス雰囲気炉 Expired JPS5822077Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7909279U JPS5822077Y2 (ja) 1979-06-12 1979-06-12 高温高純度ガス雰囲気炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7909279U JPS5822077Y2 (ja) 1979-06-12 1979-06-12 高温高純度ガス雰囲気炉

Publications (2)

Publication Number Publication Date
JPS55178700U JPS55178700U (enExample) 1980-12-22
JPS5822077Y2 true JPS5822077Y2 (ja) 1983-05-11

Family

ID=29312519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7909279U Expired JPS5822077Y2 (ja) 1979-06-12 1979-06-12 高温高純度ガス雰囲気炉

Country Status (1)

Country Link
JP (1) JPS5822077Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839702A (ja) * 1981-09-01 1983-03-08 Sumitomo Electric Ind Ltd 連続減圧雰囲気焼結炉
JPS5845304A (ja) * 1981-09-11 1983-03-16 Sumitomo Electric Ind Ltd 連続真空焼結炉
JPS58167702A (ja) * 1982-03-29 1983-10-04 Sumitomo Electric Ind Ltd 光エネルギ−焼結法
JPS5947303A (ja) * 1982-09-08 1984-03-17 Sumitomo Electric Ind Ltd 焼結炉

Also Published As

Publication number Publication date
JPS55178700U (enExample) 1980-12-22

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