JPS58217467A - 電気絶縁性炭化ケイ素焼結体の製法 - Google Patents

電気絶縁性炭化ケイ素焼結体の製法

Info

Publication number
JPS58217467A
JPS58217467A JP58033237A JP3323783A JPS58217467A JP S58217467 A JPS58217467 A JP S58217467A JP 58033237 A JP58033237 A JP 58033237A JP 3323783 A JP3323783 A JP 3323783A JP S58217467 A JPS58217467 A JP S58217467A
Authority
JP
Japan
Prior art keywords
substrate
silicon carbide
electrical
sintered body
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58033237A
Other languages
English (en)
Japanese (ja)
Other versions
JPS631270B2 (en:Method
Inventor
浩介 中村
松下　安男
竹田　幸男
大越　時夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58033237A priority Critical patent/JPS58217467A/ja
Publication of JPS58217467A publication Critical patent/JPS58217467A/ja
Publication of JPS631270B2 publication Critical patent/JPS631270B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/884—
    • H10W90/734—
    • H10W90/754—

Landscapes

  • Inorganic Insulating Materials (AREA)
  • Ceramic Products (AREA)
JP58033237A 1983-02-28 1983-02-28 電気絶縁性炭化ケイ素焼結体の製法 Granted JPS58217467A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58033237A JPS58217467A (ja) 1983-02-28 1983-02-28 電気絶縁性炭化ケイ素焼結体の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58033237A JPS58217467A (ja) 1983-02-28 1983-02-28 電気絶縁性炭化ケイ素焼結体の製法

Publications (2)

Publication Number Publication Date
JPS58217467A true JPS58217467A (ja) 1983-12-17
JPS631270B2 JPS631270B2 (en:Method) 1988-01-12

Family

ID=12380848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58033237A Granted JPS58217467A (ja) 1983-02-28 1983-02-28 電気絶縁性炭化ケイ素焼結体の製法

Country Status (1)

Country Link
JP (1) JPS58217467A (en:Method)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121810A (en) * 1977-03-31 1978-10-24 Carborundum Co Sintered heat shockkresistant silicon carbide with high density

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53121810A (en) * 1977-03-31 1978-10-24 Carborundum Co Sintered heat shockkresistant silicon carbide with high density

Also Published As

Publication number Publication date
JPS631270B2 (en:Method) 1988-01-12

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