JPS58210169A - エツチング加工品の製造方法 - Google Patents

エツチング加工品の製造方法

Info

Publication number
JPS58210169A
JPS58210169A JP57094458A JP9445882A JPS58210169A JP S58210169 A JPS58210169 A JP S58210169A JP 57094458 A JP57094458 A JP 57094458A JP 9445882 A JP9445882 A JP 9445882A JP S58210169 A JPS58210169 A JP S58210169A
Authority
JP
Japan
Prior art keywords
etching
lines
parts
resistant film
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57094458A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0159358B2 (OSRAM
Inventor
Takeshi Nishio
剛 西尾
Chuichi Ono
大野　忠一
Hiroyuki Shimogaki
下垣　弘行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyodo Printing Co Ltd
Original Assignee
Kyodo Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyodo Printing Co Ltd filed Critical Kyodo Printing Co Ltd
Priority to JP57094458A priority Critical patent/JPS58210169A/ja
Publication of JPS58210169A publication Critical patent/JPS58210169A/ja
Publication of JPH0159358B2 publication Critical patent/JPH0159358B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • ing And Chemical Polishing (AREA)
  • Lead Frames For Integrated Circuits (AREA)
JP57094458A 1982-06-02 1982-06-02 エツチング加工品の製造方法 Granted JPS58210169A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57094458A JPS58210169A (ja) 1982-06-02 1982-06-02 エツチング加工品の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57094458A JPS58210169A (ja) 1982-06-02 1982-06-02 エツチング加工品の製造方法

Publications (2)

Publication Number Publication Date
JPS58210169A true JPS58210169A (ja) 1983-12-07
JPH0159358B2 JPH0159358B2 (OSRAM) 1989-12-15

Family

ID=14110819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57094458A Granted JPS58210169A (ja) 1982-06-02 1982-06-02 エツチング加工品の製造方法

Country Status (1)

Country Link
JP (1) JPS58210169A (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6297256A (ja) * 1985-09-30 1987-05-06 エマ−ソン・エレクトリツク・カンパニ− 密閉容器用のカバ−の安全ガス抜きの製造方法及び密閉容器用のカバ−
JPS62151548U (OSRAM) * 1986-03-18 1987-09-25
JPS62151547U (OSRAM) * 1986-03-18 1987-09-25
JPH02106744A (ja) * 1988-10-17 1990-04-18 Hitachi Cable Ltd フォトエッチングマスク

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6297256A (ja) * 1985-09-30 1987-05-06 エマ−ソン・エレクトリツク・カンパニ− 密閉容器用のカバ−の安全ガス抜きの製造方法及び密閉容器用のカバ−
JPS62151548U (OSRAM) * 1986-03-18 1987-09-25
JPS62151547U (OSRAM) * 1986-03-18 1987-09-25
JPH02106744A (ja) * 1988-10-17 1990-04-18 Hitachi Cable Ltd フォトエッチングマスク

Also Published As

Publication number Publication date
JPH0159358B2 (OSRAM) 1989-12-15

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