JPS58203300A - Feed system for liquid helium - Google Patents

Feed system for liquid helium

Info

Publication number
JPS58203300A
JPS58203300A JP57084820A JP8482082A JPS58203300A JP S58203300 A JPS58203300 A JP S58203300A JP 57084820 A JP57084820 A JP 57084820A JP 8482082 A JP8482082 A JP 8482082A JP S58203300 A JPS58203300 A JP S58203300A
Authority
JP
Japan
Prior art keywords
liquid
gas
helium
supply
separator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57084820A
Other languages
Japanese (ja)
Inventor
Yoichi Ono
小野　要一
Yasuo Kamiide
上出　泰生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57084820A priority Critical patent/JPS58203300A/en
Publication of JPS58203300A publication Critical patent/JPS58203300A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C6/00—Methods and apparatus for filling vessels not under pressure with liquefied or solidified gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/03—Thermal insulations
    • F17C2203/0304—Thermal insulations by solid means
    • F17C2203/0358—Thermal insulations by solid means in form of panels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F17C2221/017—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F17C2223/0161—Liquefied gas, e.g. LPG, GPL cryogenic, e.g. LNG, GNL, PLNG
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0636—Flow or movement of content
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F17C2265/015—Purifying the fluid by separating

Abstract

PURPOSE:To improve cooling efficiency through supply of liquid helium having less gas phase to a cryopanel, by returning a gas phase, separated by a second gas liquid separator mounted to the entrance side of a feed valve, to a supply source through a pressure regulating valve. CONSTITUTION:A second gas liquid separator 6 is installed to the entrance side of a feed valve 2 to supply liquid helium throgh an inlet valve 7 which is controlled in response to the liquid level detected by a liquid level regulator of the gas liquid separator 6. The gas phase separated by the gas liquid separator 6 is returned to a supply source through a pressure regulating valve 10 controlled in response to the detected value of a pressure regulator 10. Only liquid helium is fed to a cyropanel 4 for cooling, while the helium which has completed its cooling mission is returned to the supply source after the liquid phase thereof is separated by a first gas liquid separator 1, and simultaneously, the flow rate is controlled through control of the feed valve 2 in response to the liquid level of helium in which gas and liquid are separated from each other.

Description

【発明の詳細な説明】 本発明は液体ヘリウムの供給方式に係り、特に、中性粒
子入射装置用クライオパネルに供給するに最適な液体ヘ
リウムの供給方式に関する７、第１図は従来の液体ヘリ
ウム供給システムを示す系シ図である。気液分離器１へ
の液体ヘリウムの供給は、供給弁２および冷却管７を介
Ｉ７クライオパネル４に送らｊ、該パネルを冷却したの
ち気液分離器１に送られて気液分離が行なわれる。クラ
イオパネル４に送られる液体ヘリウムの量は、気液分離
器１に敗付けらねた液面調節計５（１，ＴＣ）で調節さ
れる。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a liquid helium supply system, and particularly relates to a liquid helium supply system most suitable for supplying to a cryopanel for a neutral particle injection device. It is a family diagram showing a supply system. Liquid helium is supplied to the gas-liquid separator 1 by sending it to the I7 cryopanel 4 via the supply valve 2 and cooling pipe 7, and after cooling the panel, it is sent to the gas-liquid separator 1 for gas-liquid separation. It will be done. The amount of liquid helium sent to the cryopanel 4 is regulated by a liquid level controller 5 (1, TC) that is not connected to the gas-liquid separator 1.

ところで、以上の構成において、ヘリウム冷凍機（図示
せず）から長距離を有するトランスファーラインを介し
て液体ヘリウムの供給を行なった場合、トランスファー
ラインに侵入した熱により液体ヘリウムの温度がトかり
、気相分の多い液体ヘリウムに変化する。このため、気
相分の多い液体ヘリウムがシステムに供給さねて、クラ
イオパネル４に温度変化が生じ、クライオパネル４の冷
却が十分に行なわれないという欠点があった、特に、吸
着した水素ガスの杏放出が起きることによって、クライ
オポンプの性能が損われるという欠点があった。By the way, in the above configuration, when liquid helium is supplied from a helium refrigerator (not shown) via a long transfer line, the temperature of the liquid helium rises due to the heat that has entered the transfer line, causing gas to rise. Changes to liquid helium with a large phase content. For this reason, liquid helium with a large gas phase content cannot be supplied to the system, causing a temperature change in the cryopanel 4, and the cryopanel 4 cannot be cooled sufficiently. The drawback was that the performance of the cryopump was impaired due to the release of apricots.

本発明の目的は、供給対象の装置に気相分の少ない液体
ヘリウムが供給されるようにシ、７念液体ヘリウムの供
給方式全提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a complete system for supplying liquid helium so that liquid helium containing less gas phase can be supplied to a device to be supplied.

すなわち本発明は、供給対象装置の入口に気液分離器を
設けて気相分を排除し、気相分の少ない液体ヘリウムを
供給するようにしたものである。That is, in the present invention, a gas-liquid separator is provided at the inlet of the apparatus to be supplied to remove a gas phase component, and liquid helium with a small gas phase component is supplied.

第２図は本発明の実施例を示す系統図である８第２図に
おいては第１図に示したと同一部材であるものには同一
符号を付すと共に、説明は重複するので省略する。FIG. 2 is a system diagram showing an embodiment of the present invention.8 In FIG. 2, the same members as shown in FIG.

供給弁２の入側に第２の気液分離器６が設けらｔｌ、入
口弁７を介して液体−＼リウムが供給される。A second gas-liquid separator 6 is provided on the inlet side of the supply valve 2, and liquid -\lium is supplied via an inlet valve 7.

大口弁７は気液分離器６に取付けらねた液ｉｆｉ調節計
８より出力される液面レベルに応じて制御される。また
、気液分離器６によって分離された気相分は、圧力調節
弁９を介してヘリウム冷凍機に戻される。圧力調節弁９
の調節は、気液分離器６に取付けられた圧力調節計１０
の圧力検出イｉｌ＋に基一ついて制御される。該圧力調
節計１０は液体ヘリウムをクライオパネル４に圧送する
機能紮も廟１−１いる。The large mouth valve 7 is controlled according to the liquid level output from a liquid IFI controller 8 attached to the gas-liquid separator 6. Further, the gas phase separated by the gas-liquid separator 6 is returned to the helium refrigerator via the pressure control valve 9. Pressure control valve 9
is controlled by a pressure regulator 10 attached to the gas-liquid separator 6.
It is controlled based on the pressure detection Il+. The pressure regulator 10 also has a function 1-1 for pumping liquid helium to the cryopanel 4.

このような構成により、気液混合の状態で供給されたヘ
リウムは気液分離５６で気液分離さｔｌ、液体ヘリウノ
、のみがクライオパネル４に供給さね、液体ヘリウムの
蒸発潜熱によって冷却がなさｔするっ従って、冷却体に
温度変化が生ずること斤〈効率的冷却が可能となる。With this configuration, the helium supplied in a gas-liquid mixed state is separated into gas and liquid by the gas-liquid separator 56, and only the liquid helium is supplied to the cryopanel 4, and cooling is not performed by the latent heat of vaporization of the liquid helium. Therefore, no temperature change occurs in the cooling body, making efficient cooling possible.

Ｐノ十より明らかな如く本発明によれば、液相外の多い
液体ヘリウノ、を供給対象の装置に供給することかでき
る。　　　　　　　　　　　　　　　　　　　　　　　
　、、、、。As is clear from P No. 10, according to the present invention, it is possible to supply liquid helium containing a large amount of liquid out of the liquid phase to a device to be supplied.
,,,,.

し）面の簡単な説明　　　　　　　　　　　　　　　　
　　　　　、ニー。) Brief explanation of the surface
,knee.

側１図は従来の液体ヘリウム供給７ステムを小　　　　
　　　、、、：。Side 1 diagram shows a small conventional liquid helium supply 7 stem.
,,,:.

す系統図、第２図は本発明の実施例を示す系統図である
。　　　　　　　　　　　　　　　　　　　　　　　　
　　ｉ・１．６・・・気液分離器、２・・・供給弁、４
・・・クライオパネル、５．８・・・液面？ＪＭ　ｔｉ
＋”＋　ｉｔ、７・・入口弁、９・・・圧力ＩＡ１節弁
１ｌ０・・・圧力調節側。FIG. 2 is a system diagram showing an embodiment of the present invention.
i・1.6... Gas-liquid separator, 2... Supply valve, 4
...Cryopanel, 5.8...liquid level? JM ti
+”+ it, 7...Inlet valve, 9...Pressure IA1 mode valve 1l0...Pressure adjustment side.

イ、イカ　　□よ　　、１−え　’、　Ｊｉ　ｊ　　　
　　　　　　　□１□゛イ、＋−［ｐｉｆ ’、、、’、、’、ｔ、’、１I, squid □yo, 1-e', Ji j
□１□゛i, +-[pif ',,,',,',t,',1

Claims (1)

【特許請求の範囲】[Claims] １、　クライオパネルに液体ヘリウムを供給し所要の冷
却を行ない、冷却後のヘリウムを気液分離器により気液
分離して液相分を供給源に戻すと共に、前自己クライオ
パネルに供給する液体ヘリウムを前記気液分離したヘリ
ウムの液面位に基づいて供給弁を制御して流量制御を行
なう構成のクライオポンプにおいて、前記供給弁の入側
に第２の気液分離器を配し、該気液分離器の液面位に応
じて該分離器へのヘリウム供給量を制御すると共に、前
記気液分離器で分離した気相分を該分離器内の圧力値に
基づいて制御される圧力調節弁を介して前記供給源に返
送することを特徴とする液体ヘリウムの供給方式。1. Supply liquid helium to the cryopanel, perform the required cooling, separate the cooled helium into gas and liquid using a gas-liquid separator, return the liquid phase to the supply source, and supply the liquid helium to the cryopanel. In a cryopump configured to control the flow rate by controlling a supply valve based on the liquid level of the helium separated from the gas and liquid, a second gas-liquid separator is disposed on the inlet side of the supply valve, The amount of helium supplied to the separator is controlled according to the liquid level of the liquid separator, and the pressure of the gas phase separated by the gas-liquid separator is controlled based on the pressure value in the separator. A liquid helium supply system characterized in that liquid helium is returned to the supply source via a valve.
JP57084820A 1982-05-21 1982-05-21 Feed system for liquid helium Pending JPS58203300A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57084820A JPS58203300A (en) 1982-05-21 1982-05-21 Feed system for liquid helium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57084820A JPS58203300A (en) 1982-05-21 1982-05-21 Feed system for liquid helium

Publications (1)

Publication Number Publication Date
JPS58203300A true JPS58203300A (en) 1983-11-26

Family

ID=13841380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57084820A Pending JPS58203300A (en) 1982-05-21 1982-05-21 Feed system for liquid helium

Country Status (1)

Country Link
JP (1) JPS58203300A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293750A (en) * 1991-11-27 1994-03-15 Osaka Gas Company Limited Control system for liquefied gas container
FR2736423A1 (en) * 1995-06-08 1997-01-10 Air Liquide Refrigeration of cryogenic panels for test chambers - regulating flow rate of cryogenic fluid, separating vapour and replenishing cryogenic fluid to maintain refrigeration

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5293750A (en) * 1991-11-27 1994-03-15 Osaka Gas Company Limited Control system for liquefied gas container
FR2736423A1 (en) * 1995-06-08 1997-01-10 Air Liquide Refrigeration of cryogenic panels for test chambers - regulating flow rate of cryogenic fluid, separating vapour and replenishing cryogenic fluid to maintain refrigeration

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