JPS58202384A - 真空装置の起動負荷軽減装置 - Google Patents
真空装置の起動負荷軽減装置Info
- Publication number
- JPS58202384A JPS58202384A JP8499782A JP8499782A JPS58202384A JP S58202384 A JPS58202384 A JP S58202384A JP 8499782 A JP8499782 A JP 8499782A JP 8499782 A JP8499782 A JP 8499782A JP S58202384 A JPS58202384 A JP S58202384A
- Authority
- JP
- Japan
- Prior art keywords
- valve
- bellows
- container
- pump
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims description 23
- 230000007423 decrease Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8499782A JPS58202384A (ja) | 1982-05-21 | 1982-05-21 | 真空装置の起動負荷軽減装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8499782A JPS58202384A (ja) | 1982-05-21 | 1982-05-21 | 真空装置の起動負荷軽減装置 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11519490A Division JPH02298690A (ja) | 1990-05-02 | 1990-05-02 | 流量制御弁と二つのベローズを用いた真空装置の起動負荷軽減装置 |
| JP11519390A Division JPH02298689A (ja) | 1990-05-02 | 1990-05-02 | 流量制御弁を用いた真空装置の起動負荷軽減装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58202384A true JPS58202384A (ja) | 1983-11-25 |
| JPH0259307B2 JPH0259307B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-12 |
Family
ID=13846265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8499782A Granted JPS58202384A (ja) | 1982-05-21 | 1982-05-21 | 真空装置の起動負荷軽減装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58202384A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244408A (en) * | 1975-10-04 | 1977-04-07 | Kyowa Shinku Gijutsu Kk | Method and device for the optional control of vacuum degree |
-
1982
- 1982-05-21 JP JP8499782A patent/JPS58202384A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244408A (en) * | 1975-10-04 | 1977-04-07 | Kyowa Shinku Gijutsu Kk | Method and device for the optional control of vacuum degree |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0259307B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-12-12 |