JPS58200184A - 透過型電子顕微鏡 - Google Patents

透過型電子顕微鏡

Info

Publication number
JPS58200184A
JPS58200184A JP57084188A JP8418882A JPS58200184A JP S58200184 A JPS58200184 A JP S58200184A JP 57084188 A JP57084188 A JP 57084188A JP 8418882 A JP8418882 A JP 8418882A JP S58200184 A JPS58200184 A JP S58200184A
Authority
JP
Japan
Prior art keywords
sample
plate
electron
hole
backscattered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57084188A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449669B2 (enrdf_load_stackoverflow
Inventor
Nobuyoshi Hashimoto
橋本　信義
Masahiro Tomita
正弘 富田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57084188A priority Critical patent/JPS58200184A/ja
Publication of JPS58200184A publication Critical patent/JPS58200184A/ja
Publication of JPH0449669B2 publication Critical patent/JPH0449669B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
JP57084188A 1982-05-18 1982-05-18 透過型電子顕微鏡 Granted JPS58200184A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57084188A JPS58200184A (ja) 1982-05-18 1982-05-18 透過型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57084188A JPS58200184A (ja) 1982-05-18 1982-05-18 透過型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS58200184A true JPS58200184A (ja) 1983-11-21
JPH0449669B2 JPH0449669B2 (enrdf_load_stackoverflow) 1992-08-12

Family

ID=13823496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57084188A Granted JPS58200184A (ja) 1982-05-18 1982-05-18 透過型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS58200184A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107976458A (zh) * 2017-10-10 2018-05-01 中国科学院自动化研究所 低能量背散射电子探测器
CN115380357A (zh) * 2020-04-15 2022-11-22 科磊股份有限公司 用于固态电子检测器的保护的薄护膜材料

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5049819U (enrdf_load_stackoverflow) * 1973-09-04 1975-05-15
JPS5386722U (enrdf_load_stackoverflow) * 1976-12-16 1978-07-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5049819U (enrdf_load_stackoverflow) * 1973-09-04 1975-05-15
JPS5386722U (enrdf_load_stackoverflow) * 1976-12-16 1978-07-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107976458A (zh) * 2017-10-10 2018-05-01 中国科学院自动化研究所 低能量背散射电子探测器
CN115380357A (zh) * 2020-04-15 2022-11-22 科磊股份有限公司 用于固态电子检测器的保护的薄护膜材料
CN115380357B (zh) * 2020-04-15 2024-06-04 科磊股份有限公司 用于固态电子检测器的保护的薄护膜材料

Also Published As

Publication number Publication date
JPH0449669B2 (enrdf_load_stackoverflow) 1992-08-12

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