JPS58196056U - Angle polishing jig - Google Patents

Angle polishing jig

Info

Publication number
JPS58196056U
JPS58196056U JP1982094568U JP9456882U JPS58196056U JP S58196056 U JPS58196056 U JP S58196056U JP 1982094568 U JP1982094568 U JP 1982094568U JP 9456882 U JP9456882 U JP 9456882U JP S58196056 U JPS58196056 U JP S58196056U
Authority
JP
Japan
Prior art keywords
fixing
polishing jig
angle polishing
cylinder
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1982094568U
Other languages
Japanese (ja)
Other versions
JPS6237633Y2 (en
Inventor
研二 丸山
濱嶋　茂樹
知史 上田
伊藤　道春
吉河　満男
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP1982094568U priority Critical patent/JPS58196056U/en
Publication of JPS58196056U publication Critical patent/JPS58196056U/en
Application granted granted Critical
Publication of JPS6237633Y2 publication Critical patent/JPS6237633Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の角度研磨治具を説明するための概略断面
図、第２図および第３図は本考案に係る角度研磨治具の
一実施例を示す要部縦断面図およびそのｎ−ｎ’切断線
に沿った横断面図である。 図面において、２１は基準外筒、２２は基準端面、２３
はねじ孔、２４は固着台、２５はウェハ固着面、２６は
調整保持筒１，２７は筒体、２８は貫通ねじ穴、２９ａ
、２９ｂ、２９Ｃは角度調整ねじ、３０ａ、３０ｂ、ａ
ｏｃは係止ねじ、３１は支柱ねじ、３２は固定ねじ、３
３はラップ盤、３４は結晶ウェハを示す。・FIG. 1 is a schematic cross-sectional view for explaining a conventional angle polishing jig, and FIGS. 2 and 3 are longitudinal cross-sectional views of essential parts showing one embodiment of the angle polishing jig according to the present invention, and its n- FIG. 3 is a cross-sectional view taken along the n' cutting line. In the drawing, 21 is a reference outer cylinder, 22 is a reference end face, 23
24 is a screw hole, 24 is a fixing base, 25 is a wafer fixing surface, 26 is an adjustment holding cylinder 1, 27 is a cylinder body, 28 is a through screw hole, 29a
, 29b, 29C are angle adjustment screws, 30a, 30b, a
oc is a locking screw, 31 is a support screw, 32 is a fixing screw, 3
3 is a lapping machine, and 34 is a crystal wafer.・

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 平坦な基準端面を有する基準外筒と、平坦な被研磨物固
着面を持った固着台と、該固着台を傾動自在に内設し、
かつ上部より前記固着台の背面に当接するように複数の
角度調整用ねじを螺入自在に配設し、さらに外周壁に、
該外周壁を貫通して内部の固着台を固定する複数の係止
ねじを挿設した調整保持筒とを有し、前記基準外筒の内
部に該調整保持筒を挿脱自在に滑合せしめてなることを
特徴とする角度研磨治具。A reference outer cylinder having a flat reference end surface, a fixing table having a flat surface for fixing the object to be polished, and the fixing table provided inside so as to be tiltable,
A plurality of angle adjustment screws are screwably disposed so as to come into contact with the back surface of the fixing base from the upper part, and further, on the outer peripheral wall,
and an adjustment holding cylinder in which a plurality of locking screws are inserted to penetrate the outer circumferential wall and fix the internal fixing base, and the adjustment holding cylinder is slidably inserted into and removed from the inside of the reference outer cylinder. An angle polishing jig characterized by:
JP1982094568U 1982-06-23 1982-06-23 Angle polishing jig Granted JPS58196056U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982094568U JPS58196056U (en) 1982-06-23 1982-06-23 Angle polishing jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982094568U JPS58196056U (en) 1982-06-23 1982-06-23 Angle polishing jig

Publications (2)

Publication Number Publication Date
JPS58196056U true JPS58196056U (en) 1983-12-27
JPS6237633Y2 JPS6237633Y2 (en) 1987-09-25

Family

ID=30226309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982094568U Granted JPS58196056U (en) 1982-06-23 1982-06-23 Angle polishing jig

Country Status (1)

Country Link
JP (1) JPS58196056U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6411760A (en) * 1987-07-01 1989-01-17 Olympus Optical Co Polishing-holding device
JPH02128940U (en) * 1989-03-30 1990-10-24
JP2008039667A (en) * 2006-08-09 2008-02-21 Hitachi High-Tech Science Systems Corp Ion milling device and ion milling method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125189U (en) * 1977-03-14 1978-10-04

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53125189U (en) * 1977-03-14 1978-10-04

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6411760A (en) * 1987-07-01 1989-01-17 Olympus Optical Co Polishing-holding device
JPH02128940U (en) * 1989-03-30 1990-10-24
JP2008039667A (en) * 2006-08-09 2008-02-21 Hitachi High-Tech Science Systems Corp Ion milling device and ion milling method
JP4675860B2 (en) * 2006-08-09 2011-04-27 株式会社日立ハイテクノロジーズ Ion milling apparatus and method

Also Published As

Publication number Publication date
JPS6237633Y2 (en) 1987-09-25

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