JPS5819551Y2 - フオトマスク - Google Patents

フオトマスク

Info

Publication number
JPS5819551Y2
JPS5819551Y2 JP1978136539U JP13653978U JPS5819551Y2 JP S5819551 Y2 JPS5819551 Y2 JP S5819551Y2 JP 1978136539 U JP1978136539 U JP 1978136539U JP 13653978 U JP13653978 U JP 13653978U JP S5819551 Y2 JPS5819551 Y2 JP S5819551Y2
Authority
JP
Japan
Prior art keywords
pattern
photomask
inspection device
defects
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1978136539U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5552143U (enrdf_load_stackoverflow
Inventor
吉田卓
三田喜久夫
中久喜唯男
中島雅人
藤原勝美
尾山正幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1978136539U priority Critical patent/JPS5819551Y2/ja
Publication of JPS5552143U publication Critical patent/JPS5552143U/ja
Application granted granted Critical
Publication of JPS5819551Y2 publication Critical patent/JPS5819551Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
JP1978136539U 1978-10-04 1978-10-04 フオトマスク Expired JPS5819551Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978136539U JPS5819551Y2 (ja) 1978-10-04 1978-10-04 フオトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978136539U JPS5819551Y2 (ja) 1978-10-04 1978-10-04 フオトマスク

Publications (2)

Publication Number Publication Date
JPS5552143U JPS5552143U (enrdf_load_stackoverflow) 1980-04-07
JPS5819551Y2 true JPS5819551Y2 (ja) 1983-04-22

Family

ID=29107857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978136539U Expired JPS5819551Y2 (ja) 1978-10-04 1978-10-04 フオトマスク

Country Status (1)

Country Link
JP (1) JPS5819551Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57184768A (en) * 1981-05-02 1982-11-13 Ckd Corp Manually operating valve for safety
JPS59105647A (ja) * 1982-12-09 1984-06-19 Mitsubishi Electric Corp 電子ビーム露光方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1391270A (en) * 1971-12-08 1975-04-16 Rank Organisation Ltd Photolithography
JPS5116878A (en) * 1974-08-01 1976-02-10 Fujitsu Ltd Hoto masukuno seizohoho

Also Published As

Publication number Publication date
JPS5552143U (enrdf_load_stackoverflow) 1980-04-07

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