JPS58193360A - プラズマｃｖｄの方法およびその装置 - Google Patents

プラズマｃｖｄの方法およびその装置

Info

Publication number
JPS58193360A
JPS58193360A JP7357982A JP7357982A JPS58193360A JP S58193360 A JPS58193360 A JP S58193360A JP 7357982 A JP7357982 A JP 7357982A JP 7357982 A JP7357982 A JP 7357982A JP S58193360 A JPS58193360 A JP S58193360A
Authority
JP
Japan
Prior art keywords
plasma
electrode
reduced pressure
plasma discharge
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7357982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6116349B2 (enrdf_load_stackoverflow
Inventor
Saburo Shimoi
下井　三郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP7357982A priority Critical patent/JPS58193360A/ja
Publication of JPS58193360A publication Critical patent/JPS58193360A/ja
Publication of JPS6116349B2 publication Critical patent/JPS6116349B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP7357982A 1982-04-30 1982-04-30 プラズマｃｖｄの方法およびその装置 Granted JPS58193360A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7357982A JPS58193360A (ja) 1982-04-30 1982-04-30 プラズマｃｖｄの方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7357982A JPS58193360A (ja) 1982-04-30 1982-04-30 プラズマｃｖｄの方法およびその装置

Publications (2)

Publication Number Publication Date
JPS58193360A true JPS58193360A (ja) 1983-11-11
JPS6116349B2 JPS6116349B2 (enrdf_load_stackoverflow) 1986-04-30

Family

ID=13522343

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7357982A Granted JPS58193360A (ja) 1982-04-30 1982-04-30 プラズマｃｖｄの方法およびその装置

Country Status (1)

Country Link
JP (1) JPS58193360A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6116349B2 (enrdf_load_stackoverflow) 1986-04-30

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