JPS58193063U - 真空排気装置 - Google Patents

真空排気装置

Info

Publication number
JPS58193063U
JPS58193063U JP9273782U JP9273782U JPS58193063U JP S58193063 U JPS58193063 U JP S58193063U JP 9273782 U JP9273782 U JP 9273782U JP 9273782 U JP9273782 U JP 9273782U JP S58193063 U JPS58193063 U JP S58193063U
Authority
JP
Japan
Prior art keywords
exhaust
gas
valve
main
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9273782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS645093Y2 (enrdf_load_stackoverflow
Inventor
花見　英徳
川上　伸男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP9273782U priority Critical patent/JPS58193063U/ja
Publication of JPS58193063U publication Critical patent/JPS58193063U/ja
Application granted granted Critical
Publication of JPS645093Y2 publication Critical patent/JPS645093Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP9273782U 1982-06-20 1982-06-20 真空排気装置 Granted JPS58193063U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9273782U JPS58193063U (ja) 1982-06-20 1982-06-20 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9273782U JPS58193063U (ja) 1982-06-20 1982-06-20 真空排気装置

Publications (2)

Publication Number Publication Date
JPS58193063U true JPS58193063U (ja) 1983-12-22
JPS645093Y2 JPS645093Y2 (enrdf_load_stackoverflow) 1989-02-08

Family

ID=30100674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9273782U Granted JPS58193063U (ja) 1982-06-20 1982-06-20 真空排気装置

Country Status (1)

Country Link
JP (1) JPS58193063U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345510U (enrdf_load_stackoverflow) * 1976-09-22 1978-04-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5345510U (enrdf_load_stackoverflow) * 1976-09-22 1978-04-18

Also Published As

Publication number Publication date
JPS645093Y2 (enrdf_load_stackoverflow) 1989-02-08

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