JPS58191487A - 炭化珪素質基板およびその製造方法 - Google Patents

炭化珪素質基板およびその製造方法

Info

Publication number
JPS58191487A
JPS58191487A JP7341782A JP7341782A JPS58191487A JP S58191487 A JPS58191487 A JP S58191487A JP 7341782 A JP7341782 A JP 7341782A JP 7341782 A JP7341782 A JP 7341782A JP S58191487 A JPS58191487 A JP S58191487A
Authority
JP
Japan
Prior art keywords
coating layer
silicon
silicon carbide
substrate
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7341782A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219988B2 (enrdf_load_stackoverflow
Inventor
亮 榎本
山内　英俊
庄司 谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibigawa Electric Industry Co Ltd
Original Assignee
Ibigawa Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibigawa Electric Industry Co Ltd filed Critical Ibigawa Electric Industry Co Ltd
Priority to JP7341782A priority Critical patent/JPS58191487A/ja
Publication of JPS58191487A publication Critical patent/JPS58191487A/ja
Publication of JPH0219988B2 publication Critical patent/JPH0219988B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structure Of Printed Boards (AREA)
JP7341782A 1982-05-04 1982-05-04 炭化珪素質基板およびその製造方法 Granted JPS58191487A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7341782A JPS58191487A (ja) 1982-05-04 1982-05-04 炭化珪素質基板およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7341782A JPS58191487A (ja) 1982-05-04 1982-05-04 炭化珪素質基板およびその製造方法

Publications (2)

Publication Number Publication Date
JPS58191487A true JPS58191487A (ja) 1983-11-08
JPH0219988B2 JPH0219988B2 (enrdf_load_stackoverflow) 1990-05-07

Family

ID=13517606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7341782A Granted JPS58191487A (ja) 1982-05-04 1982-05-04 炭化珪素質基板およびその製造方法

Country Status (1)

Country Link
JP (1) JPS58191487A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012117601A1 (ja) * 2011-03-01 2012-09-07 大日本スクリーン製造株式会社 炭素含有率取得装置および炭素含有率取得方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012117601A1 (ja) * 2011-03-01 2012-09-07 大日本スクリーン製造株式会社 炭素含有率取得装置および炭素含有率取得方法

Also Published As

Publication number Publication date
JPH0219988B2 (enrdf_load_stackoverflow) 1990-05-07

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