JPS58190079A - 微動機構 - Google Patents

微動機構

Info

Publication number
JPS58190079A
JPS58190079A JP57072422A JP7242282A JPS58190079A JP S58190079 A JPS58190079 A JP S58190079A JP 57072422 A JP57072422 A JP 57072422A JP 7242282 A JP7242282 A JP 7242282A JP S58190079 A JPS58190079 A JP S58190079A
Authority
JP
Japan
Prior art keywords
members
fine movement
movement mechanism
drive
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57072422A
Other languages
English (en)
Japanese (ja)
Other versions
JPH041512B2 (cs
Inventor
Kazuyoshi Sugihara
和佳 杉原
Toru Tojo
東条　徹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57072422A priority Critical patent/JPS58190079A/ja
Priority to US06/429,230 priority patent/US4455501A/en
Publication of JPS58190079A publication Critical patent/JPS58190079A/ja
Publication of JPH041512B2 publication Critical patent/JPH041512B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Turning (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP57072422A 1982-02-09 1982-04-28 微動機構 Granted JPS58190079A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57072422A JPS58190079A (ja) 1982-04-28 1982-04-28 微動機構
US06/429,230 US4455501A (en) 1982-02-09 1982-09-30 Precision rotation mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57072422A JPS58190079A (ja) 1982-04-28 1982-04-28 微動機構

Publications (2)

Publication Number Publication Date
JPS58190079A true JPS58190079A (ja) 1983-11-05
JPH041512B2 JPH041512B2 (cs) 1992-01-13

Family

ID=13488829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57072422A Granted JPS58190079A (ja) 1982-02-09 1982-04-28 微動機構

Country Status (1)

Country Link
JP (1) JPS58190079A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60144936A (ja) * 1983-12-30 1985-07-31 Shimadzu Corp 微動回転駆動装置
JPS6182433A (ja) * 1984-09-29 1986-04-26 Toshiba Corp 微動機構

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60144936A (ja) * 1983-12-30 1985-07-31 Shimadzu Corp 微動回転駆動装置
JPS6182433A (ja) * 1984-09-29 1986-04-26 Toshiba Corp 微動機構

Also Published As

Publication number Publication date
JPH041512B2 (cs) 1992-01-13

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