JPS5818711A - Xy table - Google Patents

Abstract

PURPOSE:To drive X and Y direction moving tables quickly and higly accurately by linear motors. CONSTITUTION:When current is made to flow into a linear motor 4, an X direction moving table 2 on an XY table moves on a table supporting board 1 in the X direction. At the same time, a Y direction moving table 3 on the X direction moving table 2 moves in the X direction. The Y direction moving table is slid along a blacket 9 fixed on a linear motor 5. When current is made to flow into the linear motor 5, the Y direction moving table moves on the X direction moving table 2 in the Y direction. Consequently the XY table can be moved in an optional direction by simultaneously driving these linear motors 4, 5.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an OxY table for moving and positioning an object to an arbitrary position on a 1000-meter scale.

2. Description of the Related Art In machine tools, measuring devices, etc., xY tables are often used to move objects to be measured among workpieces to arbitrary positions over 1,000 degrees.

In the past, this xY table used a rotary meter as a driving source, and the table was moved by a feed screw machine W. In other words, X moving in the X direction by the motor
A Y table and a motor orthogonal to this were placed on the table, and the O motors were operated to move in the X and Y directions. During O, the motor that drives the Y table was fixed externally. This peak motor drives a movable table that is movable in the same direction as the Y-table, and transmits the Y-direction excitation to the Y-table.

However, the former type (MoO) has a Y table mounted on an X table and a camera for driving it, so it is heavy (and heavy), making it difficult to drive at high speed. Further, the feed screw mechanism requires a high-precision feed screw and a highly rigid housing for holding the feed screw, making the structure complicated. Furthermore, in order to maintain the high accuracy of the feed screw mechanism, it is necessary to replenish the oil supply, which requires maintenance and inspection. In addition, although the latter type is considerably lighter in weight than the former type, problems related to the complication of the wand and the feed screw mechanism remain unsolved.

Jin's invention was made in light of the above circumstances, and its purpose is to drive an X-direction moving table and a Y-direction moving table by a linear motor, and to create a structure ott.
XY that allows for flexible movement and positioning as well as ax
It is intended to provide a table.

The present invention will be described below based on an embodiment shown in the drawings. Reference numeral 1 in FIGS. 1 to 3 indicates a flat table support. An X-direction moving table 2 that is movable in the X-direction is placed on the top surface of the table support 1, and further includes:
A Y-direction moving table 1 movable in seven orthogonal directions is placed on the upper surface of the X-direction moving table j. The X-direction movable table 1 and the Y-direction movable table 1 are each provided on a table support I and are connected to round mirrors 4 and 5, so that they can be driven in the X and Y directions, respectively. ing. The above linear map - Evening 4 and 5
have the same structure as shown in Figure 69.84. That is, 6 is a cylindrical loaf member, and a permanent magnet r is attached to the inner peripheral surface of this member.

Furthermore, inside this permanent magnet 10, a buil 1 and a socket member #a are provided, and the above-mentioned permanent magnet! This constitutes a magnetic circuit that forms a magnetic field perpendicular to the moving direction of the X-direction moving table j (Y-direction moving table J). Thus constructed, there are nine linear motors 40 and kerato members 1a.
is fixed to the X-direction moving table 2, and the socket member am of the linear motor 5 is fixed to a platen which is movable relative to the Y-direction moving table 1 in a direction perpendicular to the direction (X direction). A pair of guides sa-')1#, 1- are attached to the bottom surface of this Bufkut #O.
The guide plate 11 is protruded along the Y direction and is in contact with the guide plate 11 so as to sandwich it therebetween. Therefore, when moving in the Y direction, the table J moves in the X direction.
When moving in the Y direction, it is guided along a guide 911.

Therefore, when the current is reduced to the linear motor 4, the X-direction moving table 2 moves in the X direction on the table support 1, so the Y-direction moving table I on the X-direction moving table 2
Also move in the same direction (X direction). At this time, the Y-direction moving table J is fixed to the Y-direction moving table J and slides with respect to the mobutsubutto I. Also, linear 1-ta J
When the Kt flow is applied, the rounding and guide rollers J# move in the Y direction on the Y direction moving table J and the χ direction moving table 1.
J# comes into contact with the guide plate 11 and is guided in the Y direction. Therefore, linear motor 4. It is possible to move the Y-direction moving table 1 in any direction on the train.

This is all for 111! Since the X-direction moving table and the Y-direction moving table are driven by linear motors as shown in @L, it is possible to increase the speed compared to the conventional mechanism driven by the O-feed screw mechanism, and also to reduce the structure. This simplification has the effect of making a difference.

The simple sharpness of 41i11-11 shows the 0-w1 example of this invention.
Plan view of xy table, 211th enlarged view, 3rd rjA
The fourth part of the Hiroside map is a tribute map of the Linea peak, @51i is #1Es map V-VIIKe511i1m.

1...Table support stand, J-X direction moving table, 1
... Y direction moving table, 4. J・-linear motor,
r...Permanent magnet, 1...;il.

Claims (1)

[Claims] The above-mentioned The direction moving table is formed by a magnetic circuit fixed to the table supporting base and forming a magnetic field perpendicular to the direction of movement thereof, and a coil fixed to the X direction moving table and crossing the magnetic circuit, and is driven by a nine-linear motor, The Y-direction moving table forms a magnetic field orthogonal to the moving direction, is fixed to the table support, and is guided by nine magnetic circuits and the table support to be movable in the same direction as the Y-direction moving table. An xyY table, which is mounted so as to be movable relative to the moving table in the X direction, is formed by a coil that crosses the magnetic circuit, and is driven by a nine linear motor.