JPS58184604A - 生産制御方式 - Google Patents
生産制御方式Info
- Publication number
- JPS58184604A JPS58184604A JP6780382A JP6780382A JPS58184604A JP S58184604 A JPS58184604 A JP S58184604A JP 6780382 A JP6780382 A JP 6780382A JP 6780382 A JP6780382 A JP 6780382A JP S58184604 A JPS58184604 A JP S58184604A
- Authority
- JP
- Japan
- Prior art keywords
- lot
- equipment
- facilities
- workpiece
- aimed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 claims abstract description 29
- 238000003860 storage Methods 0.000 claims abstract description 10
- 238000000195 production control method Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 26
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 238000004140 cleaning Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 241000257465 Echinoidea Species 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 230000001537 neural effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B15/00—Systems controlled by a computer
- G05B15/02—Systems controlled by a computer electric
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Multi-Process Working Machines And Systems (AREA)
- General Factory Administration (AREA)
- Control By Computers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6780382A JPS58184604A (ja) | 1982-04-22 | 1982-04-22 | 生産制御方式 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6780382A JPS58184604A (ja) | 1982-04-22 | 1982-04-22 | 生産制御方式 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58184604A true JPS58184604A (ja) | 1983-10-28 |
JPH0430043B2 JPH0430043B2 (enrdf_load_stackoverflow) | 1992-05-20 |
Family
ID=13355468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6780382A Granted JPS58184604A (ja) | 1982-04-22 | 1982-04-22 | 生産制御方式 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58184604A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109059A (ja) * | 1987-10-23 | 1989-04-26 | Hitachi Ltd | 生産制御装置 |
JPH0238193A (ja) * | 1988-07-29 | 1990-02-07 | Mazda Motor Corp | 自動車組立装置および自動車組立方法 |
JPH0744004U (ja) * | 1991-10-02 | 1995-10-24 | 京兵衛 澤田 | ゴム風船の口栓体 |
JP2007233579A (ja) * | 2006-02-28 | 2007-09-13 | Elpida Memory Inc | 生産管理方法及び生産管理システム |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56114650A (en) * | 1980-02-15 | 1981-09-09 | Hitachi Ltd | Production system for variety of products |
-
1982
- 1982-04-22 JP JP6780382A patent/JPS58184604A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56114650A (en) * | 1980-02-15 | 1981-09-09 | Hitachi Ltd | Production system for variety of products |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01109059A (ja) * | 1987-10-23 | 1989-04-26 | Hitachi Ltd | 生産制御装置 |
JPH0238193A (ja) * | 1988-07-29 | 1990-02-07 | Mazda Motor Corp | 自動車組立装置および自動車組立方法 |
JPH0744004U (ja) * | 1991-10-02 | 1995-10-24 | 京兵衛 澤田 | ゴム風船の口栓体 |
JP2007233579A (ja) * | 2006-02-28 | 2007-09-13 | Elpida Memory Inc | 生産管理方法及び生産管理システム |
Also Published As
Publication number | Publication date |
---|---|
JPH0430043B2 (enrdf_load_stackoverflow) | 1992-05-20 |
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