JPS58184246A - 電子線装置の対物レンズ - Google Patents

電子線装置の対物レンズ

Info

Publication number
JPS58184246A
JPS58184246A JP57065403A JP6540382A JPS58184246A JP S58184246 A JPS58184246 A JP S58184246A JP 57065403 A JP57065403 A JP 57065403A JP 6540382 A JP6540382 A JP 6540382A JP S58184246 A JPS58184246 A JP S58184246A
Authority
JP
Japan
Prior art keywords
pole piece
magnetic pole
objective lens
objective
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57065403A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6335065B2 (enExample
Inventor
Takashi Yanaka
谷中　隆志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
INTERNATL PRECISION Inc
Original Assignee
INTERNATL PRECISION Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by INTERNATL PRECISION Inc filed Critical INTERNATL PRECISION Inc
Priority to JP57065403A priority Critical patent/JPS58184246A/ja
Publication of JPS58184246A publication Critical patent/JPS58184246A/ja
Publication of JPS6335065B2 publication Critical patent/JPS6335065B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57065403A 1982-04-21 1982-04-21 電子線装置の対物レンズ Granted JPS58184246A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57065403A JPS58184246A (ja) 1982-04-21 1982-04-21 電子線装置の対物レンズ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57065403A JPS58184246A (ja) 1982-04-21 1982-04-21 電子線装置の対物レンズ

Publications (2)

Publication Number Publication Date
JPS58184246A true JPS58184246A (ja) 1983-10-27
JPS6335065B2 JPS6335065B2 (enExample) 1988-07-13

Family

ID=13286011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57065403A Granted JPS58184246A (ja) 1982-04-21 1982-04-21 電子線装置の対物レンズ

Country Status (1)

Country Link
JP (1) JPS58184246A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4391007A1 (en) * 2022-12-20 2024-06-26 FEI Company Pole piece incorporating optical cavity for improved phase-contrast in electron microscope imaging

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540921U (enExample) * 1978-09-08 1980-03-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5540921U (enExample) * 1978-09-08 1980-03-15

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4391007A1 (en) * 2022-12-20 2024-06-26 FEI Company Pole piece incorporating optical cavity for improved phase-contrast in electron microscope imaging

Also Published As

Publication number Publication date
JPS6335065B2 (enExample) 1988-07-13

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