JPS58181532A - Vacuum chucking device - Google Patents
Vacuum chucking deviceInfo
- Publication number
- JPS58181532A JPS58181532A JP6616682A JP6616682A JPS58181532A JP S58181532 A JPS58181532 A JP S58181532A JP 6616682 A JP6616682 A JP 6616682A JP 6616682 A JP6616682 A JP 6616682A JP S58181532 A JPS58181532 A JP S58181532A
- Authority
- JP
- Japan
- Prior art keywords
- attractive
- vacuum
- chamber
- work
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Jigs For Machine Tools (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、例えば光学用レンズ等の加工、或いは測定時
にワークに変形を生じさせずに保持し得る真空チャック
装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum chuck device that can hold a workpiece without deforming it during processing or measurement of, for example, an optical lens.
従来、この種の真空チャック装置は第1図に示すように
周縁にリング状のワーク受は面lを有し、内部を空胴部
2とするチャック本体3の周囲に外ガイドリング4が取
付けられ、本体3の空胴部2の空気を吸引孔5を介して
抜くようになっている。そして、例えば研摩すべきワー
クWをワーク受は面1及び外ガイドリング4に載置した
後に、空胴部2を真空に引き、ワークWを固定するわけ
であるが、ワークWの中央部は何らの支承もなされてい
ないために、極端に画けば第2図に示すようにワークW
は変形を生ずることになる。このような状態でワークW
を正しい曲率半径に加工したとしても、ワークWを開放
すればワークWは元の形状に復帰し、加工時の曲率半径
或いは面形状とは異なるものとなる。Conventionally, in this type of vacuum chuck device, as shown in FIG. 1, a ring-shaped workpiece holder has a surface L on the periphery, and an outer guide ring 4 is attached around a chuck body 3 having a cavity 2 inside. The air in the cavity 2 of the main body 3 is drawn out through the suction hole 5. For example, after placing the workpiece W to be polished on the workpiece support surface 1 and the outer guide ring 4, the cavity 2 is evacuated and the workpiece W is fixed. Since there is no support of any kind, if you draw it to an extreme, the work W
will cause deformation. Work W in this condition
Even if the workpiece W is machined to have the correct radius of curvature, when the workpiece W is released, the workpiece W returns to its original shape, which is different from the radius of curvature or surface shape at the time of processing.
一方、ワークを保持する方法として、接着剤を使用しワ
ークを皿や雇いに貼付ける方法もよく行われるが、その
場合でも貼付けによるワークの歪のために、ワークを加
工後に剥離すると加工面にくせが生じたり、異なる曲率
半径となる虞れが多分にある。従って、ワークに高精度
な仕上げ状態が要求されている場合には、従来の真空チ
ャック或いは貼付けによる方法は、共に問題点が多く精
度保証が至難であるという欠点がある。On the other hand, as a method of holding the workpiece, it is often done to use adhesive to stick the workpiece to a plate or a plate, but even in this case, the workpiece is distorted by pasting, so if the workpiece is peeled off after processing, the processed surface will be damaged. There is a high possibility that curls may occur or different radii of curvature may occur. Therefore, when a workpiece is required to have a highly accurate finished state, the conventional vacuum chuck or pasting methods both have many problems and have the disadvantage that it is extremely difficult to guarantee accuracy.
本発明の目的は、上述の従来例の欠点を除去し、ワーク
に歪変形を与えることなく吸着・固定し得る真空チャッ
ク装置を提供することにあり、その要旨は、被吸着部材
を真空吸着により保持する装置であって、チャック本体
の吸着部に2個以上の環状リングを配置し、これらの環
状リングと被吸着部材で形成される密閉空間部を真空引
きする吸引機構を設けたことを特徴とするものである。An object of the present invention is to eliminate the drawbacks of the conventional examples described above and to provide a vacuum chuck device that can suction and fix a workpiece without giving it strain or deformation. A holding device characterized by having two or more annular rings arranged in the suction part of the chuck body, and provided with a suction mechanism that evacuates the sealed space formed by these annular rings and the attracted member. That is.
本発明を第3図以下に図示の実施例に基づいて詳細に説
明する。The present invention will be explained in detail based on the embodiment shown in FIG. 3 and below.
第3図は本発明に係る真空チャック装置の一実施例の平
面図、第4図はワークWを取付けた状態の断面図を示し
ている。チャック本体10は第1、第2の2個の部材1
0a、10bから成り、第1の部材10aにはそのほぼ
中間部に研摩すべきワークWの裏面の曲率に合致した第
1の小径の環状リング11と第2の大径の環状リング1
2が同心円的に狭い間隔で配置されている。そしてワー
クWを載置した場合に、第1、第2の環状リング11.
12とワークWで囲まれた真空室13が真空に吸引でき
るように、第1、第2の環状リング11と12の間には
例えば2個の吸引孔14が穿孔されている。この吸引孔
14は、第1の部材10aの底面に設けられ第2の部材
10bとによって囲まれた吸引室15に連通されており
、更にこの吸引室15は第2の部材10bに貫通された
吸引孔16に連通されている。また、第1の部材10a
の中央部には1.外部と通ずる空気孔17が穿孔されて
おり、第1の環状リング11、第1の部材10a、ワー
クWで囲まれた空気室18は外気と同圧力となるように
されている。なお、19はチャック本体10の周囲に構
設され、本体10の第1、第2の部材10a、10bを
連結すると共に、ワークWの周囲を押える外ガイドリン
グである。FIG. 3 is a plan view of an embodiment of the vacuum chuck device according to the present invention, and FIG. 4 is a sectional view showing a state in which a workpiece W is attached. The chuck body 10 has two members 1, a first and a second member.
0a and 10b, and the first member 10a has a first small-diameter annular ring 11 and a second large-diameter annular ring 1 that match the curvature of the back surface of the workpiece W to be polished, approximately in the middle of the first member 10a.
2 are arranged concentrically at narrow intervals. When the workpiece W is placed, the first and second annular rings 11.
For example, two suction holes 14 are bored between the first and second annular rings 11 and 12 so that a vacuum chamber 13 surrounded by the ring 12 and the workpiece W can be evacuated. This suction hole 14 is connected to a suction chamber 15 provided on the bottom surface of the first member 10a and surrounded by the second member 10b, and further this suction chamber 15 is penetrated by the second member 10b. It communicates with the suction hole 16. In addition, the first member 10a
In the center part is 1. An air hole 17 communicating with the outside is bored, and an air chamber 18 surrounded by the first annular ring 11, the first member 10a, and the work W has the same pressure as the outside air. Note that 19 is an outer guide ring that is constructed around the chuck body 10, connects the first and second members 10a and 10b of the body 10, and presses the periphery of the workpiece W.
本実施例は上述の構成を有するので、第1、第2の環状
リング11.12で囲まれた真空室13は、吸引孔16
、吸引室15、吸引孔14を介して真空に引かれ、ワー
クWはチャック本体10に吸着される。しかし、中央部
の空気室18は空気孔17により外気に通じており、更
に第2の環状リング12の外側空間も大気圧と等しく、
ワークWは先の真空室13に作用する吸引力のみで吸着
されている。従って、ワークWは従来例のよう番とワー
クWの中央が引かれて歪や変形を生ずることはなく、吸
引状態と開放状態とでワークWの曲率半径或いは面形状
の変化が生ずることは殆どない。Since this embodiment has the above-described configuration, the vacuum chamber 13 surrounded by the first and second annular rings 11 and 12 has the suction hole 16.
A vacuum is drawn through the suction chamber 15 and the suction hole 14, and the workpiece W is attracted to the chuck body 10. However, the central air chamber 18 communicates with the outside air through the air hole 17, and the outer space of the second annular ring 12 is also at atmospheric pressure.
The workpiece W is attracted only by the suction force acting on the vacuum chamber 13 above. Therefore, the work W will not be distorted or deformed due to the pull of the center of the work W as in the conventional example, and the radius of curvature or surface shape of the work W will hardly change between the suction state and the open state. do not have.
なお、前記実施例中で第1、第2の環状リング11.1
2のワークWとの接触面は、ワークWの裏面と同一曲率
半径でなくエツジ状としてもよい。また、真空室13を
囲む環状リングは2個以上でも支障はなく、例えば環状
リングを4個とし真空室を2室にするようにしてもよl
/X。更番こ、チャック本体10は実施例では加工の都
合上、2個の部材10a、lObに分離するようにした
が、1体であってもよく或いは3体以上に分割できるよ
うにしてもよい、また、外ガイドリンク19はチャック
本体lOと一体であってもよく、省略しても特に問題は
ない。ワークWはミラー、プリズム等の平面、或いは他
の非球面での場合でも全く同様に固定し得ることは勿論
である。In addition, in the above embodiment, the first and second annular rings 11.1
The contact surface with the work W of No. 2 may have an edge shape instead of having the same radius of curvature as the back surface of the work W. Further, there is no problem even if there are two or more annular rings surrounding the vacuum chamber 13; for example, the number of annular rings may be four, and the number of vacuum chambers may be two.
/X. In the embodiment, the chuck body 10 is separated into two members 10a and 10b for convenience of processing, but it may be made into one piece or may be divided into three or more pieces. Furthermore, the outer guide link 19 may be integrated with the chuck main body lO, and there is no particular problem even if it is omitted. It goes without saying that the workpiece W can be fixed in the same manner even if it is a flat surface such as a mirror, a prism, or another aspherical surface.
以上説明したように本発明に係る真空チャック装置は、
2個以上の環状リングに囲まれた真空室のワークに接す
る部分を小面積としてワークを吸着し、その他の部位を
大気圧にしておくという構造により次のような効果が生
ずる。As explained above, the vacuum chuck device according to the present invention has
The following effects are produced by the structure in which the part of the vacuum chamber surrounded by two or more annular rings that is in contact with the workpiece has a small area to attract the workpiece, and the other parts are kept at atmospheric pressure.
(1)ワークを変形せずに吸着・保持することが可能で
ある。(1) It is possible to attract and hold the workpiece without deforming it.
(2)吸着状態で加工したワークと、開放した後のワー
クの面精度は全く同一であり、高精度な品質が保証され
る。(2) The surface accuracy of the workpiece machined in the suction state and the workpiece after release is exactly the same, ensuring high-precision quality.
(3)ワークを吸着したまま、例えばワークの肉厚測定
が可能で、高精度の測定精度が得られる。(3) For example, it is possible to measure the wall thickness of a workpiece while the workpiece is being sucked, and high measurement accuracy can be obtained.
第1図は従来の真空チャックの断面図、第2図はこの真
空チャックで吸着したときの変形状態を示す断面図、第
3図、第4図は本発明に係る真空チャック装置の一実施
例であり、第3図はその平面図、第4図はその断面図で
ある。
符号10はチャック本体、10a、10bは部材、11
.12は第1、第2の環状リング、13は真空室、14
.16は吸引孔、15は吸引室、17は空気孔、18は
空気室、19は外ガイドリング、Wはワークである。
特許出願人 キャノン株式会社Fig. 1 is a sectional view of a conventional vacuum chuck, Fig. 2 is a sectional view showing the deformed state when the vacuum chuck is used for suction, and Figs. 3 and 4 are an embodiment of the vacuum chuck device according to the present invention. 3 is a plan view thereof, and FIG. 4 is a sectional view thereof. Reference numeral 10 is a chuck body, 10a, 10b are members, 11
.. 12 is a first and second annular ring; 13 is a vacuum chamber; 14
.. 16 is a suction hole, 15 is a suction chamber, 17 is an air hole, 18 is an air chamber, 19 is an outer guide ring, and W is a workpiece. Patent applicant Canon Co., Ltd.
Claims (1)
、チャック本体の吸着部に2個以上の環状リングを配置
し、これらの環状リングと被吸着部材で形成される密閉
空間部を真空引きする吸引機構を設けたことを特徴とす
る真空チャック装置。1. A device that holds a member to be attracted by vacuum suction, in which two or more annular rings are arranged in the adsorption part of the chuck body, and a sealed space formed by these annular rings and the member to be attracted is evacuated. A vacuum chuck device characterized in that it is equipped with a suction mechanism.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6616682A JPS58181532A (en) | 1982-04-19 | 1982-04-19 | Vacuum chucking device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6616682A JPS58181532A (en) | 1982-04-19 | 1982-04-19 | Vacuum chucking device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58181532A true JPS58181532A (en) | 1983-10-24 |
Family
ID=13307987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6616682A Pending JPS58181532A (en) | 1982-04-19 | 1982-04-19 | Vacuum chucking device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58181532A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103465199A (en) * | 2013-09-27 | 2013-12-25 | 广东尚能光电技术有限公司 | Adjustable vacuum clamp |
-
1982
- 1982-04-19 JP JP6616682A patent/JPS58181532A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103465199A (en) * | 2013-09-27 | 2013-12-25 | 广东尚能光电技术有限公司 | Adjustable vacuum clamp |
CN103465199B (en) * | 2013-09-27 | 2016-06-08 | 广东尚能光电技术有限公司 | Adjustable vacuum clamp |
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