CN103465199A - Adjustable vacuum clamp - Google Patents

Adjustable vacuum clamp Download PDF

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Publication number
CN103465199A
CN103465199A CN201310451489XA CN201310451489A CN103465199A CN 103465199 A CN103465199 A CN 103465199A CN 201310451489X A CN201310451489X A CN 201310451489XA CN 201310451489 A CN201310451489 A CN 201310451489A CN 103465199 A CN103465199 A CN 103465199A
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China
Prior art keywords
vacuum
adjustable
adjustable vacuum
pipeline section
seal
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CN201310451489XA
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Chinese (zh)
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CN103465199B (en
Inventor
石建东
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Guangdong Rui Xinyuan Technology Co. Ltd.
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SUNBLENCE TECHNOLOGIES Co Ltd
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Abstract

The invention discloses an adjustable vacuum clamp which relates to the field of clamping devices. The adjustable vacuum clamp comprises a testboard for placing a tested piece, a plurality of air hole units which are arranged on the testboard, a vacuum pipeline which is communicated with the air hole units, and a vacuum generator which is connected with the vacuum pipeline. According to the adjustable vacuum clamp, due to the fact that the air hole units are arranged on the testboard and the vacuum pipeline is communicated with the air hole units so as to tightly suck the tested piece, so that the vacuum clamp can flexibly adapt to tested pieces with various sizes and stably suck the tested pieces onto the testboard for testing.

Description

The adjustable vacuum fixture
Technical field
The present invention relates to clamping device, more particularly, relate to a kind of adjustable vacuum fixture.
Background technology
In communication, electronics, machine-building, automobile and packaging industry, often have the clamping requirement to flat work pieces (particularly small-sized plane workpiece).Take optical communication field as example, and China's broadband access in recent years and fiber-to-the-home development are surged the demand of planar optical waveguide chip product.Planar optical waveguide is that fiber waveguide is fabricated into to the technology on planar substrates, is to realize the large capacity of optic communication and the integrated effective means of optical device.Slab guide can be made array waveguide grating, optical branching device, the optical devices such as multichannel adjustable optical attenuator, photoswitch.In the middle of optical communication network, the array waveguide grating that optical signal dependence planar optical waveguide is made is widely used for realizing that wavelength-division multiplex is to improve efficiency of transmission.At the least significant end of optic communication, Fiber to the home the stage, and planar optical waveguide light splitter provides the most effective EPON Broadband Access Scheme at present.
And, in production planar optical waveguide chip processes, one of important step is tested chip.In test process, guarantee that the position of chip does not change, carry out test job after needing chip is clamped.On market, the clamping force of common clamping device normally derives from the fastening force of screw thread, but easily the planar optical waveguide light splitter chip is damaged.Vacuum fixture, as the connector between measured piece and testing equipment, has been widely used in various ATEs at present.
In correlation technique, when the application vacuum fixture is tested, at first measured piece is positioned on plummer, to open vacuum switch and take the air in vacuum fixture away, fixture gets final product adhesive, clamps measured piece and carries out test job.After test completes, close vacuum switch, air enters vacuum fixture, and measured piece separates with vacuum fixture.
This vacuum fixture is strict to the dimensional requirement of chip under test, and a kind of fixture is only suitable for the chip of a certain size, and vacuum fixture is used dumb.But, in practical work process, chip size is scarcely identical.In test size, during larger chip, because chip is excessive, less fixture can't hold this chip, and chip is unstable in fixture, affects the test effect of chip.And chip size hour, chip can not cover all pores on plummer, causes losing vacuum, thereby effect is tested in the unstable impact of chip.
Summary of the invention
The technical problem to be solved in the present invention is, a kind of fixture of adjustable vacuum flexibly is provided.
The technical solution adopted for the present invention to solve the technical problems is: construct a kind of adjustable vacuum fixture, comprise testboard for placing measured piece, be arranged at a plurality of pores unit on described testboard, the vacuum pipe communicated with described a plurality of pores unit and the vacuum generator be connected with described vacuum pipe.
Preferably, in above-mentioned adjustable vacuum fixture, described vacuum pipe also is provided with removable seal near the end of described pore unit, with the pore unit that cuts off described vacuum pipe and communicate with it.
Preferably, in above-mentioned adjustable vacuum fixture, described vacuum pipe comprises a plurality of arms that are connected with described a plurality of pores unit respectively and the house steward that described a plurality of arms are communicated with, and described house steward is connected in described vacuum generator.
Preferably, in above-mentioned adjustable vacuum fixture, described arm comprises the first pipeline section and the second pipeline section, and the internal diameter of described the first pipeline section is greater than the internal diameter of described the second pipeline section.
Preferably, in above-mentioned adjustable vacuum fixture, described seal comprises sealed screw, and described sealed screw comprises head and threaded portion.
Preferably, in above-mentioned adjustable vacuum fixture, described seal is arranged in described arm, and described head is positioned at the first pipeline section, and described threaded portion is positioned at the second pipeline section.
Preferably, in above-mentioned adjustable vacuum fixture, described the second pipeline section internal face also is provided with the thread segment relative with described threaded portion.
Preferably, in above-mentioned adjustable vacuum fixture, described seal also comprises gasket seal, and described gasket seal is arranged between described sealed screw and arm.
Preferably, in above-mentioned adjustable vacuum fixture, the size of described pore unit is more than or equal to the size of described seal.
Preferably, in above-mentioned adjustable vacuum fixture, described adjustable vacuum fixture is chip adjustable vacuum fixture, and described measured piece is chip.
In sum, owing to having taked technique scheme, the invention has the beneficial effects as follows:
Owing to being provided with a plurality of pores unit in adjustable vacuum fixture of the present invention on testboard, and communicate to suck measured piece by vacuum pipe with a plurality of pores unit, make vacuum clip prodigiosin of the present invention adapt to neatly the measured piece of sizes, measured piece is firmly inhaled on testboard and tested.
The accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described, in accompanying drawing:
Fig. 1 is the schematic cross-section of one embodiment of the invention;
Fig. 2 is the structural representation of testboard in the embodiment of the present invention;
Fig. 3 is the structural representation of seal in the embodiment of the present invention.
The specific embodiment
Understand for technical characterictic of the present invention, purpose and effect being had more clearly, now contrast accompanying drawing and describe the specific embodiment of the present invention in detail.
Fig. 1, Fig. 2 show the adjustable vacuum fixture in a preferred embodiment of the invention, can be applicable to the test process of optical communication technique midplane chip of light waveguide.This adjustable vacuum fixture comprises testboard 1 for placing measured piece, is arranged at a plurality of pores unit 11 on testboard 1, the vacuum pipe 2 communicated with a plurality of pores unit 11 and the vacuum generator be connected with vacuum pipe 2.Understandably, this adjustable vacuum fixture can also be applied to, in the fields such as communication, electronics, machine-building, automobile and packaging industry, generally can be used for the location of flat work pieces.
When measured piece carries out test job, measured piece is positioned on testboard 1, with the pore unit 11 that will be arranged on testboard 1, covers; Then open vacuum generator, the air in vacuum pipe 2 is found time, measured piece is adsorbed on testboard 1, then carries out test job.Because the pore unit 11 on testboard 1 has a plurality ofly, when measured piece is larger, vacuum pipe 2 also can be firmly inhaled measured piece on testboard 1.
In certain embodiments, as shown in Figure 1, vacuum pipe 2 also is provided with removable seal 3 near the end of pore unit 11, with the pore that cuts off vacuum pipe 2 and communicate with it.
Measured piece is positioned on testboard 1 the pore unit 11 that will be arranged on testboard 1 and covers, then the vacuum pipe 2 of the unlapped pore of measured piece unit 11 correspondences is sealed by seal 3, thereby increases the stability of measured piece in test process.And then the seal 3 of the vacuum pipe 2 of the pore unit 11 below correspondences that measured piece has been covered opens, vacuum pipe 2 is communicated with pore unit 11; Finally open vacuum generator, the air in vacuum pipe 2 is found time, measured piece is adsorbed on testboard 1, carry out test job.
In certain embodiments, as shown in Figure 1, vacuum pipe 2 comprises a plurality of arms 21 that are connected with a plurality of pores unit 11 respectively and the house steward 22 that a plurality of arms 21 are communicated with, and house steward 22 is connected in vacuum generator.At measured piece hour, the corresponding arm 21 in not capped pore unit 11, by seal 3 sealings, can not affect normal test process; Measured piece is larger while need using many groups pore unit 11, the seal 3 of the corresponding arm 21 in pore unit 11 that only needs need be used be unscrewed, and measured piece firmly can be adsorbed on testboard 1, strengthens the stability of measured piece in test process.
Understandably, in certain embodiments, the number of the radical of arm 21 and pore unit 11 is corresponding, a corresponding arm 21 in pore unit 11.
Understandably, in certain embodiments, as shown in Figure 1, the axis of arm 21 is parallel to each other.The arm 21 be arranged in parallel can facilitate house steward 22 that it is communicated with vacuum generator.
In certain embodiments, as shown in Figure 1, arm comprises the first pipeline section 210 and the second pipeline section 211, and the internal diameter of the first pipeline section 210 is greater than the internal diameter of the second pipeline section 211.The range size of the pore unit 11 that the internal diameter size of the first pipeline section 210 is corresponding with it is suitable.
In certain embodiments, as shown in Figure 3, seal 3 comprises sealed screw 31, and sealed screw 31 comprises head 310 and threaded portion 311.Threaded portion 311 is for being tightly connected with vacuum pipe.
In certain embodiments, as shown in Figure 1, Figure 3, seal 3 is arranged in arm 21, and head 310 is positioned at the first pipeline section 210, and threaded portion 311 is positioned at the second pipeline section 211.
Understandably, in certain embodiments, the second pipeline section 211 internal faces also are provided with the thread segment corresponding with threaded portion 311 212.
Understandably, in certain embodiments, as shown in Figure 1, Figure 3, seal 3 also comprises gasket seal 32, and sealing pad 32 is arranged between sealed screw 31 and arm 21.Sealed screw 31 and gasket seal 32 can increase the sealing of arm 21.
Understandably, in certain embodiments, gasket seal 32 is rubber sheet gasket.Understandably, in certain embodiments, sealing pad 32 also can be asbestos washer or synthetic resin gasket etc.
In certain embodiments, the size of pore unit 11 is more than or equal to the size of seal 3.So that the user can utilize instrument to extend into by pore unit 11 action that 210 pairs of seals 3 of the first pipeline section are tightened or unscrewed.When the vacuum pipe 2 to not needing to use is sealed, by 11 places, pore unit, seal 3 is tightened to seal this vacuum pipe 2.
In certain embodiments, the adjustable vacuum fixture is chip adjustable vacuum fixture, and measured piece is chip.This chip is optic communication planar optical waveguide chip.
The foregoing is only the preferred embodiments of the present invention, not in order to limit the present invention, all any modifications of doing in the spirit and principles in the present invention, be equal to and replace or improvement etc., all should be included in protection scope of the present invention.

Claims (10)

1. an adjustable vacuum fixture, it is characterized in that, comprise the testboard (1) for placing measured piece, the vacuum generator that is arranged at a plurality of pores unit (11) on described testboard (1), the vacuum pipe (2) communicated with described a plurality of pores unit (11) and is connected with described vacuum pipe (2).
2. adjustable vacuum fixture according to claim 1, it is characterized in that, described vacuum pipe (2) also is provided with removable seal (3) near the end of described pore unit (11), with the pore unit (11) that cuts off described vacuum pipe (2) and communicate with it.
3. adjustable vacuum fixture according to claim 2, it is characterized in that, described vacuum pipe (2) comprises a plurality of arms (21) that are connected with described a plurality of pores unit (11) respectively and the house steward (22) that described a plurality of arms (21) are communicated with, and described house steward (22) is connected in described vacuum generator.
4. adjustable vacuum fixture according to claim 3, is characterized in that, described arm (21) comprises the first pipeline section (210) and the second pipeline section (211), and the internal diameter of described the first pipeline section (210) is greater than the internal diameter of described the second pipeline section (211).
5. adjustable vacuum fixture according to claim 4, is characterized in that, described seal (3) comprises sealed screw (31), and described sealed screw (31) comprises head (310) and threaded portion (311).
6. adjustable vacuum fixture according to claim 5, it is characterized in that, described seal (3) is arranged in described arm (21), and described head (310) is positioned at the first pipeline section (210), and described threaded portion (311) are positioned at the second pipeline section (211).
7. adjustable vacuum fixture according to claim 6, is characterized in that, described the second pipeline section (211) internal face also is provided with the thread segment (212) relative with described threaded portion (311).
8. adjustable vacuum fixture according to claim 5, is characterized in that, described seal (3) also comprises gasket seal (32), and described gasket seal (32) is arranged between described sealed screw (31) and arm (21).
9. adjustable vacuum fixture according to claim 2, is characterized in that, the size of described pore unit (11) is more than or equal to the size of described seal.
10. according to the described adjustable vacuum fixture of any one in claim 1 to 9, it is characterized in that, this adjustable vacuum fixture is chip adjustable vacuum fixture, and described measured piece is chip.
CN201310451489.XA 2013-09-27 2013-09-27 Adjustable vacuum clamp Active CN103465199B (en)

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CN103465199B CN103465199B (en) 2016-06-08

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103737521A (en) * 2014-01-20 2014-04-23 清华大学深圳研究生院 Optical waveguide parameter testing clamp
CN105067223A (en) * 2015-07-22 2015-11-18 清华大学深圳研究生院 Optical waveguide chip coupling testing clamp
CN107039317A (en) * 2017-05-27 2017-08-11 中国电子科技集团公司第十三研究所 Automatic wedge bonding bonder fixture
CN107608024A (en) * 2017-10-18 2018-01-19 江苏亨通光网科技有限公司 A kind of automatic absorbing device and method of attaching for array waveguide grating AWG

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181532A (en) * 1982-04-19 1983-10-24 Canon Inc Vacuum chucking device
CN101733651A (en) * 2008-11-11 2010-06-16 苏州春兴精工股份有限公司 Vacuum clamp for machining porous sheet and using method thereof
US20100283194A1 (en) * 2009-05-11 2010-11-11 Han Zhen-Zhong Energy-saving vacuum adsorption apparatus
CN101919040A (en) * 2008-01-18 2010-12-15 林权炫 Vacuum chuck
CN202053091U (en) * 2011-03-14 2011-11-30 南昌航空大学 Reconfigurable vacuum adsorption fixture
CN203185174U (en) * 2013-03-30 2013-09-11 歌尔声学股份有限公司 Vacuum absorption fixing platform
CN203579447U (en) * 2013-09-27 2014-05-07 广东尚能光电技术有限公司 Adjustable vacuum fixture

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58181532A (en) * 1982-04-19 1983-10-24 Canon Inc Vacuum chucking device
CN101919040A (en) * 2008-01-18 2010-12-15 林权炫 Vacuum chuck
CN101733651A (en) * 2008-11-11 2010-06-16 苏州春兴精工股份有限公司 Vacuum clamp for machining porous sheet and using method thereof
US20100283194A1 (en) * 2009-05-11 2010-11-11 Han Zhen-Zhong Energy-saving vacuum adsorption apparatus
CN202053091U (en) * 2011-03-14 2011-11-30 南昌航空大学 Reconfigurable vacuum adsorption fixture
CN203185174U (en) * 2013-03-30 2013-09-11 歌尔声学股份有限公司 Vacuum absorption fixing platform
CN203579447U (en) * 2013-09-27 2014-05-07 广东尚能光电技术有限公司 Adjustable vacuum fixture

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103737521A (en) * 2014-01-20 2014-04-23 清华大学深圳研究生院 Optical waveguide parameter testing clamp
CN103737521B (en) * 2014-01-20 2015-09-09 清华大学深圳研究生院 Fiber waveguide parameter testing jig
CN105067223A (en) * 2015-07-22 2015-11-18 清华大学深圳研究生院 Optical waveguide chip coupling testing clamp
CN105067223B (en) * 2015-07-22 2018-02-09 清华大学深圳研究生院 Chip of light waveguide coupling measurement fixture
CN107039317A (en) * 2017-05-27 2017-08-11 中国电子科技集团公司第十三研究所 Automatic wedge bonding bonder fixture
CN107039317B (en) * 2017-05-27 2023-06-30 中国电子科技集团公司第十三研究所 Clamp for automatic wedge welding bonding machine
CN107608024A (en) * 2017-10-18 2018-01-19 江苏亨通光网科技有限公司 A kind of automatic absorbing device and method of attaching for array waveguide grating AWG

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Effective date of registration: 20170505

Address after: The cultural building No. 11 garden Zhao letter square Nanhai District Guicheng road 528200 South Street of Guangdong city in Foshan Province, one of the 3 layer 301

Patentee after: Guangdong Rui Xinyuan Technology Co. Ltd.

Address before: 528251 Guangdong Province, Foshan City Nanhai Pingzhou community building A block 4 photoelectric Valley

Patentee before: Sunblence Technologies Co., Ltd.

TR01 Transfer of patent right