JPS58179942A - Producing device of magnetic recording medium - Google Patents

Abstract

PURPOSE:To prevent the electrification of a substrate as well as to facilitate the taking-up the substrate in order to improve the productivity of a magnetic recording medium, by irradiating an electron beam to an evaporating source from the width direction of the substrate. CONSTITUTION:A feed roller 2 which feeds a substrate 3 made of a belt-shaped polymer material like a polyester film, etc., a cylindrical can 4 and a take-up roller 5 which takes up the substrate 3 that passed through the can 4 are provided in a cylindrical vacuum tank 1 which is kept at about 10<-4>Torr degree of vacuum for example. An evaporating source 6 containing a ferromagnetic metal 7 is provided under the can 4. At the same time, pierced electron guns 8 and 9 are set at both sides of the axial direction of the can 4 to irradiate electron beams to the metal 7 from the width direction of the substrate 3. This prevents the electrification of the substrate 3 and also facilitates the taking-up of the substrate 3. Thus the productivity is improved for a magnetic recording medium.

Description

[Detailed description of the invention] The present invention relates to an apparatus for manufacturing magnetic recording media.

By attaching ferromagnetic metal obliquely at a predetermined angle to the normal line of the substrate using vacuum evaporation, ionoblating, or sputtering methods, high coercive force and high squareness ratio are achieved by using a polymer molded product as a substrate. It is well known that a magnetic recording medium having the following characteristics can be obtained.

By the way, in the sputtering method, an evaporation source is irradiated with an electron beam to evaporate the ferromagnetic metal contained in the evaporation source and adhere it to the substrate. When the electron beam is irradiated,
The periphery of the irradiated electrons becomes electrically charged, and when the substrate passes through this charged atmosphere, the substrate becomes electrically charged. Furthermore, when the electron beam hits the ferromagnetic metal of the evaporation source, reflected electrons are emitted from the direction of the evaporation source, and these reflected electrons adhere to the substrate and become electrically charged. If the substrate is charged in this way, it becomes difficult to wind it up afterwards, which is not preferable in terms of manufacturing.

In view of two or more points, the present invention aims to provide an apparatus for manufacturing a magnetic recording medium that can prevent charging of a substrate.

In order to achieve the above object, the present invention provides a magnetic recording medium manufacturing apparatus characterized in that an evaporation source is irradiated with an electron beam from the width direction of the substrate.

An embodiment of the present invention will be described below based on the drawings.

Reference numeral 1 denotes a cylindrical vacuum chamber, which is maintained at a degree of vacuum of approximately in Torr. 2 is a supply roller, and a base body 6 made of a strip-shaped polymeric material such as a polyester film is supplied.
It is intended to supply 4 is a cylindrical cap. Reference numeral 5 denotes a take-up roller for taking off the substrate 3 after passing through the cylindrical roller 4. Reference numeral 6 denotes an evaporation source arranged below the cylindrical can 4, in which a ferromagnetic metal 7 is housed. Pierce-type electron guns 8 and 9 are placed on both sides of the cylindrical can 4 in the axial direction, and irradiate the ferromagnetic metal housed in the evaporation source B with an electron beam from the width direction of the base 3. It is supposed to be done.

That is, the locus of the electron beams emitted from the electron guns 8 and 9 is perpendicular to the traveling direction of the base body 30, and it is possible to reduce charging of the base body 6 due to the charged portion along the locus of the electron beams. In addition, the electron beam is a ferromagnetic metal 7
The angle of reflection that occurs when it hits the surface does not stick to the surface of the base.

Note that the number of electron guns may be one or six or more, and is arbitrarily selected depending on the size of the vacuum chamber and the like.

As described above, according to the present invention, it is possible to improve the charging of the substrate due to the locus of the electron beam and the reflected electrons, so that the substrate can be easily cleaned and a highly productive magnetic recording medium manufacturing apparatus can be obtained. .

[Brief explanation of drawings]

The figure shows a front sectional view of an embodiment of the invention. 1... Vacuum chamber, 3... Substrate, 4...
...Cylindrical cap/, 6... Evaporation source, 7...
...Ferromagnetic metal. 8.9...Electron gun. Patent applicant: Nichizu Capacitor Co., Ltd.

Claims (1)

[Claims] (1) While moving the strip-shaped base, an electron beam is irradiated onto the ferromagnetic metal housed in the evaporation source. An apparatus for manufacturing a magnetic recording medium in which the ferromagnetic metal is evaporated and attached to the substrate, characterized in that the evaporation source is irradiated with an electron beam from the width direction of the substrate.