JPS58179348A - Ａｌの陽極酸化薄膜を用いた湿度センサ素子 - Google Patents
Ａｌの陽極酸化薄膜を用いた湿度センサ素子Info
- Publication number
- JPS58179348A JPS58179348A JP57061132A JP6113282A JPS58179348A JP S58179348 A JPS58179348 A JP S58179348A JP 57061132 A JP57061132 A JP 57061132A JP 6113282 A JP6113282 A JP 6113282A JP S58179348 A JPS58179348 A JP S58179348A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sensor element
- humidity sensor
- electrode
- anodic oxidation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 43
- 238000007254 oxidation reaction Methods 0.000 title claims abstract description 7
- 230000003647 oxidation Effects 0.000 title claims abstract description 6
- 239000004094 surface-active agent Substances 0.000 claims abstract description 7
- 239000002736 nonionic surfactant Substances 0.000 claims abstract description 6
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 8
- 238000007743 anodising Methods 0.000 claims description 5
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 3
- 125000005037 alkyl phenyl group Chemical group 0.000 claims description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 3
- -1 polyoxyethylene Polymers 0.000 claims description 3
- 239000010407 anodic oxide Substances 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000010408 film Substances 0.000 abstract description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 8
- 238000007740 vapor deposition Methods 0.000 abstract description 5
- 239000000919 ceramic Substances 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 238000003486 chemical etching Methods 0.000 abstract description 2
- 229910052737 gold Inorganic materials 0.000 abstract description 2
- 229910052573 porcelain Inorganic materials 0.000 abstract description 2
- 238000005406 washing Methods 0.000 abstract description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 abstract 2
- USIUVYZYUHIAEV-UHFFFAOYSA-N diphenyl ether Chemical compound C=1C=CC=CC=1OC1=CC=CC=C1 USIUVYZYUHIAEV-UHFFFAOYSA-N 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 10
- 230000035945 sensitivity Effects 0.000 description 10
- 230000007423 decrease Effects 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- 239000012190 activator Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 235000006693 Cassia laevigata Nutrition 0.000 description 2
- 241000522641 Senna Species 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910001593 boehmite Inorganic materials 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 235000006408 oxalic acid Nutrition 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229940124513 senna glycoside Drugs 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 241000282472 Canis lupus familiaris Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000013543 active substance Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002052 molecular layer Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57061132A JPS58179348A (ja) | 1982-04-14 | 1982-04-14 | Ａｌの陽極酸化薄膜を用いた湿度センサ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57061132A JPS58179348A (ja) | 1982-04-14 | 1982-04-14 | Ａｌの陽極酸化薄膜を用いた湿度センサ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58179348A true JPS58179348A (ja) | 1983-10-20 |
| JPH0244022B2 JPH0244022B2 (enrdf_load_html_response) | 1990-10-02 |
Family
ID=13162240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57061132A Granted JPS58179348A (ja) | 1982-04-14 | 1982-04-14 | Ａｌの陽極酸化薄膜を用いた湿度センサ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58179348A (enrdf_load_html_response) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6283641A (ja) * | 1985-10-08 | 1987-04-17 | Sharp Corp | 電界効果型半導体センサ |
| JP2002243689A (ja) * | 2001-02-15 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
| JP2003096966A (ja) * | 2001-09-20 | 2003-04-03 | Misawa Homes Co Ltd | 天井施工方法および天井パネル |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE310950T1 (de) * | 1999-12-08 | 2005-12-15 | Sensirion Ag | Kapazitiver sensor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57124401A (en) * | 1981-01-24 | 1982-08-03 | Hokuriku Elect Ind | Moisture sensor element using al anode oxide thin film |
-
1982
- 1982-04-14 JP JP57061132A patent/JPS58179348A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57124401A (en) * | 1981-01-24 | 1982-08-03 | Hokuriku Elect Ind | Moisture sensor element using al anode oxide thin film |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6283641A (ja) * | 1985-10-08 | 1987-04-17 | Sharp Corp | 電界効果型半導体センサ |
| JP2002243689A (ja) * | 2001-02-15 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
| JP2003096966A (ja) * | 2001-09-20 | 2003-04-03 | Misawa Homes Co Ltd | 天井施工方法および天井パネル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0244022B2 (enrdf_load_html_response) | 1990-10-02 |
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