JPS57124401A - Moisture sensor element using al anode oxide thin film - Google Patents
Moisture sensor element using al anode oxide thin filmInfo
- Publication number
- JPS57124401A JPS57124401A JP56008601A JP860181A JPS57124401A JP S57124401 A JPS57124401 A JP S57124401A JP 56008601 A JP56008601 A JP 56008601A JP 860181 A JP860181 A JP 860181A JP S57124401 A JPS57124401 A JP S57124401A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- sensor element
- oxide thin
- moisture sensor
- anode oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56008601A JPS57124401A (en) | 1981-01-24 | 1981-01-24 | Moisture sensor element using al anode oxide thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56008601A JPS57124401A (en) | 1981-01-24 | 1981-01-24 | Moisture sensor element using al anode oxide thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57124401A true JPS57124401A (en) | 1982-08-03 |
JPS646521B2 JPS646521B2 (en) | 1989-02-03 |
Family
ID=11697480
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56008601A Granted JPS57124401A (en) | 1981-01-24 | 1981-01-24 | Moisture sensor element using al anode oxide thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57124401A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58179348A (en) * | 1982-04-14 | 1983-10-20 | Hokuriku Denki Kogyo Kk | Humidity sensor using al anodic oxidation thin film |
JP2002243689A (en) * | 2001-02-15 | 2002-08-28 | Denso Corp | Capacity-type humidity sensor and method for manufacturing the same |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55161247U (en) * | 1979-05-04 | 1980-11-19 |
-
1981
- 1981-01-24 JP JP56008601A patent/JPS57124401A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55161247U (en) * | 1979-05-04 | 1980-11-19 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58179348A (en) * | 1982-04-14 | 1983-10-20 | Hokuriku Denki Kogyo Kk | Humidity sensor using al anodic oxidation thin film |
JPH0244022B2 (en) * | 1982-04-14 | 1990-10-02 | Hokuriku Elect Ind | |
JP2002243689A (en) * | 2001-02-15 | 2002-08-28 | Denso Corp | Capacity-type humidity sensor and method for manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPS646521B2 (en) | 1989-02-03 |
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