JPS58177659U - 超高真空ゲ−ト弁 - Google Patents

超高真空ゲ−ト弁

Info

Publication number
JPS58177659U
JPS58177659U JP7345682U JP7345682U JPS58177659U JP S58177659 U JPS58177659 U JP S58177659U JP 7345682 U JP7345682 U JP 7345682U JP 7345682 U JP7345682 U JP 7345682U JP S58177659 U JPS58177659 U JP S58177659U
Authority
JP
Japan
Prior art keywords
valve
side fluid
fluid passage
ultra
front side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7345682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144034Y2 (enrdf_load_stackoverflow
Inventor
巻島　守
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP7345682U priority Critical patent/JPS58177659U/ja
Publication of JPS58177659U publication Critical patent/JPS58177659U/ja
Application granted granted Critical
Publication of JPS6144034Y2 publication Critical patent/JPS6144034Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP7345682U 1982-05-21 1982-05-21 超高真空ゲ−ト弁 Granted JPS58177659U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7345682U JPS58177659U (ja) 1982-05-21 1982-05-21 超高真空ゲ−ト弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7345682U JPS58177659U (ja) 1982-05-21 1982-05-21 超高真空ゲ−ト弁

Publications (2)

Publication Number Publication Date
JPS58177659U true JPS58177659U (ja) 1983-11-28
JPS6144034Y2 JPS6144034Y2 (enrdf_load_stackoverflow) 1986-12-12

Family

ID=30082964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7345682U Granted JPS58177659U (ja) 1982-05-21 1982-05-21 超高真空ゲ−ト弁

Country Status (1)

Country Link
JP (1) JPS58177659U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060043814A (ko) * 2004-04-21 2006-05-15 오노데라 고이치 개폐 밸브 및 진공 챔버의 개구부의 개폐 방법
JP2013245739A (ja) * 2012-05-24 2013-12-09 Ulvac Japan Ltd 仕切弁

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023691A1 (en) * 1992-05-15 1993-11-25 Ebara Corporation Gate valve
CN109707861A (zh) * 2017-10-26 2019-05-03 日扬科技股份有限公司 闸阀结构

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060043814A (ko) * 2004-04-21 2006-05-15 오노데라 고이치 개폐 밸브 및 진공 챔버의 개구부의 개폐 방법
JP2013245739A (ja) * 2012-05-24 2013-12-09 Ulvac Japan Ltd 仕切弁

Also Published As

Publication number Publication date
JPS6144034Y2 (enrdf_load_stackoverflow) 1986-12-12

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