JPS58177659U - Ultra-high vacuum gate valve - Google Patents

Ultra-high vacuum gate valve

Info

Publication number
JPS58177659U
JPS58177659U JP7345682U JP7345682U JPS58177659U JP S58177659 U JPS58177659 U JP S58177659U JP 7345682 U JP7345682 U JP 7345682U JP 7345682 U JP7345682 U JP 7345682U JP S58177659 U JPS58177659 U JP S58177659U
Authority
JP
Japan
Prior art keywords
valve
side fluid
fluid passage
ultra
front side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7345682U
Other languages
Japanese (ja)
Other versions
JPS6144034Y2 (en
Inventor
巻島　守
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to JP7345682U priority Critical patent/JPS58177659U/en
Publication of JPS58177659U publication Critical patent/JPS58177659U/en
Application granted granted Critical
Publication of JPS6144034Y2 publication Critical patent/JPS6144034Y2/ja
Granted legal-status Critical Current

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  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図Ａは従来の超高真空ゲート弁の縦断面図、第１図
Ｂは第１図ＡのＩ−Ｉ断面図、第２図Ａは本案の一実施
例を示す縦断面図、第２図Ｂは第２図Ａのｎ−ｎ断面図
、第２図Ｃは第２図Ａの■−■断面図、第３図Ａは第２
図Ａの弁開状態図、第３図Ｂは同弁閉の途中図、第３図
Ｃは同弁閉の一例図、第３図りは同弁閉の他側図である
。 １：弁箱、１１，１゜：開口、２：弁支持体、３：弁棒
、４１：表側ベローズ、４゜：裏側ベローズ、５□：表
置体、　　−５□：表置体、６１：表側流体通孔、６□
：裏側流体通孔、７１：接続口（表側流体給排機構への
）、７□：接続口（裏側流体給排機構への）、８ニジリ
ンダ、９：ピストンロンド、１０ニスプリング、１１：
溝穴、１２□、１２□：シール面。FIG. 1A is a vertical cross-sectional view of a conventional ultra-high vacuum gate valve, FIG. 1B is a cross-sectional view taken along line II in FIG. 1A, and FIG. Figure 2B is a sectional view taken along nn of Figure 2A, Figure 2C is a sectional view taken along ■-■ of Figure 2A, and Figure 3A is a cross-sectional view of
FIG. 3A is a diagram showing the valve in an open state, FIG. 3B is a diagram showing the valve in the middle of closing, FIG. 1: Valve box, 11,1°: Opening, 2: Valve support, 3: Valve stem, 41: Front bellows, 4°: Back bellows, 5□: Surface mounting body, -5□: Surface mounting body, 61 :Front side fluid hole, 6□
: Rear side fluid passage hole, 71: Connection port (to the front side fluid supply/discharge mechanism), 7□: Connection port (to the rear side fluid supply/discharge mechanism), 8 Niji cylinder, 9: Piston rond, 10 Nispring, 11:
Slot, 12□, 12□: Seal surface.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一対の開口を有する弁箱と、該弁箱内において前記開口
間に進退される弁棒に連設された弁支持板と、該弁支持
板の両面に表、裏側ベローズを介して取付けられた前記
開口に相対される表、裏弁板と、前記弁棒に設けられ前
記表側ベローズ内に連通した表側流体通孔と、前記弁棒
に設けられ前記裏側ベローズ内に連通した裏側流体通孔
と、前記表側流体通孔に連設された表側流体給排機構と
、前記裏側流体通孔に連設された裏側流体給排機構とを
具備したことに特徴を有する超高真空ゲート弁。A valve box having a pair of openings, a valve support plate connected to a valve rod that moves back and forth between the openings within the valve box, and attached to both sides of the valve support plate via front and back bellows. Front and back valve plates facing the opening, a front side fluid passage provided in the valve stem and communicating with the front side bellows, and a back side fluid passage provided in the valve stem and communicating with the back side bellows. An ultra-high vacuum gate valve comprising: a front side fluid supply/discharge mechanism connected to the front side fluid passage; and a back side fluid supply/discharge mechanism connected to the rear side fluid passage.
JP7345682U 1982-05-21 1982-05-21 Ultra-high vacuum gate valve Granted JPS58177659U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7345682U JPS58177659U (en) 1982-05-21 1982-05-21 Ultra-high vacuum gate valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7345682U JPS58177659U (en) 1982-05-21 1982-05-21 Ultra-high vacuum gate valve

Publications (2)

Publication Number Publication Date
JPS58177659U true JPS58177659U (en) 1983-11-28
JPS6144034Y2 JPS6144034Y2 (en) 1986-12-12

Family

ID=30082964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7345682U Granted JPS58177659U (en) 1982-05-21 1982-05-21 Ultra-high vacuum gate valve

Country Status (1)

Country Link
JP (1) JPS58177659U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060043814A (en) * 2004-04-21 2006-05-15 오노데라 고이치 Shut-off valve disposed between openings formed to vacuum chamber and method of shutting off openings of vacuum chamber
JP2013245739A (en) * 2012-05-24 2013-12-09 Ulvac Japan Ltd Gate valve

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023691A1 (en) * 1992-05-15 1993-11-25 Ebara Corporation Gate valve
CN109707861A (en) * 2017-10-26 2019-05-03 日扬科技股份有限公司 Gate valve structure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20060043814A (en) * 2004-04-21 2006-05-15 오노데라 고이치 Shut-off valve disposed between openings formed to vacuum chamber and method of shutting off openings of vacuum chamber
JP2013245739A (en) * 2012-05-24 2013-12-09 Ulvac Japan Ltd Gate valve

Also Published As

Publication number Publication date
JPS6144034Y2 (en) 1986-12-12

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