JP2013245739A - Gate valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a slide valve that can perform a highly reliable partition operation at high speed, with simple structure.SOLUTION: A sliding portion is provided with a seal part which has an O-ring disposed in a groove. In the seal part, a leak hole Seal6 is provided to connect a closed space portion to a low-pressure side, to prevent formation of a closed space in the groove.

Description

The present invention includes a gate valve suitable for a pendulum type, a direct acting type, a door type, etc. for sliding the valve body, and a sliding operation of the valve body, in addition to the operation of opening and closing the flow path by the valve body (valve plate). The present invention relates to a slide valve suitable for a pendulum type.
Particularly, in the present invention, in a vacuum apparatus or the like, a flow path connecting two spaces performing different pressures and different processes is partitioned (closed), and the partition state is opened (two spaces are connected), The present invention relates to a gate valve and a slide valve that limit a part of the flow path (limit the opening area of the flow path).

  In vacuum devices, etc., two spaces with different degrees of vacuum, such as between the chamber and the piping, between the piping and the piping, or between the piping and the pump, etc. are partitioned and the two partitioned spaces are connected. A partition valve is provided. Such gate valves include various types of valves, and gate valves (see Patent Document 1) and pendulum type gate valves (see Patent Document 2) are known.

  In such a valve or vacuum device, the portion that seals the sliding surface may be sealed by an O-ring provided in the O-ring groove.

JP 2002-181205 A Japanese Patent No. 3655715

However, in such a valve or vacuum device, when a closed space exists in a part exposed to a vacuum, there is a phenomenon that the pressure of the vacuum device is hardly lowered due to a minute leak from the closed space. Various types of corresponding venting structures are known depending on the type of the enclosed space, but the O-ring groove for sealing the sliding surface has not been sufficiently studied so far, and we want to solve this problem. There is a request. This problem was newly generated because the O-ring was sealed even when the degree of vacuum was so high that sealing by the O-ring had not been applied. It is a problem that has not been done.
In particular, in a large-diameter valve, the closed space in the O-ring groove that seals the sliding surface that can withstand reverse pressure has a large volume, and the total amount of leakage to the ultra-high vacuum side is large, so the effect is large. The present inventors have found a new problem that it is necessary to solve such problems as a decrease in vacuum and contamination with impurities.

  The present invention reliably vents a portion where the closed space is large and the influence of the leak is large, such as an O-ring provided at a flow path closing portion of the slide valve, and reliably reduces the pressure in an ultra-high vacuum. It is intended.

The gate valve of the present invention has a hollow portion and a valve box having a first opening and a second opening that are provided to communicate with each other so as to face each other across the hollow portion,
A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening;
Position switching means that operates between a valve closing position for closing the neutral valve body with respect to the first opening and a valve opening position for retracting from the first opening;
Comprising
The neutral valve body has a neutral valve portion connected to the switching means, and a movable valve portion connected to the neutral valve portion so as to be capable of changing the flow direction direction,
The movable valve portion is provided around the movable valve portion and is provided with a seal portion that is in close contact with the inner surface of the valve box around the first opening, and is connected to the neutral valve portion so that the position in the flow direction can be changed. A first movable valve portion,
A first urging portion that urges the first movable valve portion toward the first opening in the flow path direction so that the seal portion can be brought into close contact with the inner surface of the valve box around the first opening;
A second movable valve portion slidable in the flow path direction with respect to the first movable valve portion;
A second biasing portion that drives the first movable valve portion and the second movable valve portion so as to be able to contract the flow direction thickness dimension against the biasing force of the first biasing portion;
The first movable valve portion is connected to the neutral valve portion in such a manner that the position in the flow direction can be changed in response to a change in thickness in the flow direction between the first movable valve portion and the second movable valve portion. A third urging portion that urges the first movable valve portion toward the flow path direction central position side;
And having
The second urging portion is an air cylinder formed between the first movable valve portion and the second movable valve portion in the second peripheral region, and the air cylinder includes a sliding portion. A seal portion having an O-ring provided in the groove is provided;
The seal portion is provided with a leak hole for communicating the closed space portion to the low pressure side so that the closed space is not formed in the groove.
In the gate valve according to the first aspect of the present invention, the leak hole has a portion extending in the urging direction of the first movable valve portion and a portion orthogonal to the portion, and these are communicated with each other. Is preferred.
In the gate valve according to the first aspect of the present invention, a recess may be formed at the low pressure side outlet of the leak hole.

  As a seal part in the sliding part in the gate valve of the present invention, as shown in FIG. 5, the second seal part 51a and the third seal part 52a can be exemplified, but in such a sliding part Seal, As shown in FIG. 1, the O-ring Seal2 is located in the O-ring groove Seal1 provided in one of the sliding portions seal 50d, and the portion Seal2a protruding from the O-ring groove Seal1 contacts the other sliding portion 60d. While being pressed in contact with each other, a sealing state is maintained between the contact portion Seal2a and the portion Seal2b that contacts the bottom surface Seal3 of the O-ring groove Seal1 on the opposite side.

  Since there is a pressure difference from the high-pressure side 80 toward the low-pressure side 11 in the sliding portion Seal, the O-ring Seal2 receives a differential pressure toward the low-pressure side and moves to the low-pressure side in the O-ring groove Seal1. To do. For this reason, as shown in FIG. 2, the low pressure side portion Seal2c of the O-ring Seal2 comes into contact with the side wall Seal4 of the O-ring groove Seal1, and a closed space Seal5 is formed on the bottom surface Seal3 side of the position Seal2c. Since this sealed space Seal5 is closed, there is a possibility that gas exists inside. When the low-pressure side 11 maintains a sufficient degree of vacuum, the gas contained in the sealed space Seal 5 may be released to the low-pressure side 11 due to some source such as the movement of the O-ring Seal 2. The inventors of the present application have found that this contributes to a decrease in the degree of vacuum.

  In order to prevent such gas release from the closed space Sea5, the inventors of the present application, as shown in FIG. 3, have the O-ring groove Seal1 and the O-ring groove Seal1 in the O-ring groove Seal1 that is the formation position of the closed space Seal. The present invention of preventing the formation of a closed space by providing a leak hole Seal 6 communicating with the low pressure side 11 has been completed.

  Specifically, as shown in FIG. 4, in an annular air cylinder 80 provided in a second peripheral region 40b adjacent to the first peripheral region 40a which is the outermost periphery of the valve body 40, the outer peripheral surface 50f and In the second seal portion 51a and the third seal portion 52a provided on the inner peripheral surface 50g, the first opening portion 12a and the second opening portion 12b on the low pressure side of the O-ring groove Seal1 in which the respective O-rings Sale2 are stored. A leak hole Seal6 is provided on the side closer to the surface.

The second seal portion 51a on the outer peripheral side is provided with a leak hole Seal6e extending in the sliding direction so as to penetrate near the bottom surface Seal3 of the O-ring groove Seal1.
The third seal portion 52a on the inner peripheral side is provided with a leak hole Seal6a that extends in the sliding direction so as to penetrate near the bottom surface Seal3 of the O-ring groove Seal1, and is substantially orthogonal to the leak hole Seal6a. The leak hole Seal6b is provided, the one end on the low pressure side of the leak hole Seal6a is closed by the closing member Seal6c, and the one end on the low pressure side of the leak hole Seal6b is closed by the closing member Seal6d.

  By providing the leak hole Seal6 at the position where the closed space may be formed in this way, this portion communicates with the low pressure side, and the internal pressure decreases in conjunction with vacuuming on the low pressure side, Gas can be prevented from being ejected, and the degree of vacuum on the low pressure side is not deteriorated.

  According to the gate valve of the present invention, a leak hole communicating with the low-pressure side is provided at a position where a closed space in the O-ring groove may be formed, thereby preventing deterioration of the vacuum degree on the low-pressure side. Is possible.

It is a cross-sectional view for demonstrating operation | movement of the seal part in 1st Embodiment which concerns on the slide valve of this invention. It is a cross-sectional view for demonstrating operation | movement of the seal part in 1st Embodiment which concerns on the slide valve of this invention. It is a cross-sectional view for demonstrating operation | movement of the seal part in 1st Embodiment which concerns on the slide valve of this invention. It is an expanded cross-sectional view which shows the air cylinder in 1st Embodiment which concerns on the slide valve of this invention. It is a model side view which shows the position of the air cylinder and leak hole in 1st Embodiment which concerns on the slide valve of this invention. It is an enlarged view which shows the obstruction | occlusion member in 1st Embodiment which concerns on the slide valve of this invention. It is a graph which shows the experimental example in 1st Embodiment which concerns on the slide valve of this invention. It is a cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention, and is a figure which shows the case where the valve body is made into the retractable position. FIG. 10 is an enlarged view of a main part near a cylinder in FIG. 9. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention, and is a figure which shows the case where a valve body is made into the valve closed position. It is a principal part enlarged view of the main spring vicinity in FIG. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 1st Embodiment of this invention, and is a figure which shows the case where a valve body is made into a retracted position. It is the principal part enlarged plan view (a) and principal part enlarged sectional view (b) which show the connection member fixed to the rotating shaft. It is the principal part enlarged plan view (a) and principal part enlarged sectional view (b) which show the end of the neutral valve part connected with a connection member. It is the principal part enlarged plan view (a) and principal part enlarged sectional view (b) which show the state which made the connection member and the neutral valve part fit. It is a longitudinal cross-sectional view which shows the structure of the gate valve in 2nd Embodiment of this invention, and is the principal part enlarged view of a cylinder vicinity. It is a principal part enlarged view of the connection pin vicinity in 2nd Embodiment of this invention. It is a principal part enlarged view of the fastening member vicinity in 2nd Embodiment of this invention. It is radial direction sectional drawing which expands and shows the principal part near the rotating shaft and fluid path ring in the slide valve of 2nd Embodiment of this invention. It is an axial sectional view showing an enlarged main part in the vicinity of a rotating shaft and a fluid path ring in a slide valve of a second embodiment of the present invention. It is sectional drawing (extension position) which shows the rotating shaft drive mechanism in 2nd Embodiment of this invention. It is sectional drawing (contracted position) which shows the rotating shaft drive mechanism in 2nd Embodiment of this invention. It is a principal part expanded sectional view which shows a rack member and a sliding bearing. It is sectional drawing which shows the effect | action of a buffer groove. It is sectional drawing which shows the effect | action of a buffer groove. It is a principal part expanded sectional view which shows the meshing part of a rack member and a pinion. It is the model perspective view which saw through the principal part of the rotating shaft and fluid path | route ring in the slide valve of 2nd Embodiment of this invention. It is the schematic cross section which saw through the principal part of the rotating shaft and fluid path ring in the slide valve of 2nd Embodiment of this invention. It is the perspective view which saw through the principal part which shows the rotating shaft and fluid path | route ring in the slide valve of other embodiment of this invention. It is an axial sectional view showing a rotating shaft and a fluid path ring in a slide valve of another embodiment of the present invention. It is an axial sectional view showing the inner peripheral surface of the fluid path ring and the vicinity of the sliding surface of the rotary shaft in the slide valve of the second embodiment of the present invention. It is a principal part enlarged view of the connection pin vicinity in 2nd Embodiment of this invention. It is a principal part enlarged view which shows the guide pin vicinity in 2nd Embodiment of this invention. It is a cross-sectional view which shows the structure of the slide valve in 3rd Embodiment of this invention. It is sectional drawing (contracted position Pb1, Pb3, extended position Pa2) which shows the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is sectional drawing (contracted position Pb1, Pb2, Pb3) which shows the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is sectional drawing (extension position Pa1, Pc3, Pa3) which shows the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is a schematic diagram which shows the effect | action of the shock absorbing material in 3rd Embodiment of this invention. It is sectional drawing (contracted position Pb1, intermediate position Pc3, extended position Pa2) which shows the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is sectional drawing (intermediate position Pc1, Pc3, extended position Pa2) which shows the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is sectional drawing (intermediate position Pc1, Pc2, Pc3) which shows the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is a figure which shows the compressed air supply switching state in the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is a figure which shows the compressed air supply switching state in the rotating shaft drive mechanism in 3rd Embodiment of this invention. It is a principal part expanded sectional view which shows a control buffer flow path.

Hereinafter, a slide valve (gate valve) according to a first embodiment of the present invention will be described with reference to the drawings.
In the drawings used in the following description, the dimensions and ratios of the respective components are appropriately changed from the actual ones in order to make the respective components large enough to be recognized on the drawings.
The technical scope of the present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit of the present invention.

(First embodiment)
FIG. 8 is a plan view showing the configuration of the slide valve in the present embodiment. FIG. 9 is a longitudinal sectional view showing the configuration of the slide valve in the first embodiment of the present invention, and is a view showing a case where the valve body is in a retractable position. FIG. 10 is an enlarged view of a main part showing a connection portion between the neutral valve portion and the first movable valve portion in FIG. 9 and the vicinity of the first and second urging portions. FIG. 11 is a longitudinal sectional view showing the configuration of the slide valve according to the first embodiment of the present invention, and is a view showing a case where the valve body is in a hermetically closed position. FIG. 12 is an enlarged view of a main part showing the connection portion between the neutral valve portion and the first movable valve portion in FIG. 11 and the vicinity of the first and second urging portions. FIG. 13 is a longitudinal sectional view showing the configuration of the slide valve in the first embodiment of the present invention, and is a view showing a case where the valve body is in the retracted position.

[Pendulum type gate valve]
The gate valve (slide valve) 100 of the first embodiment is a pendulum type gate valve, as shown in FIGS.
The gate valve 100 is connected to a valve box 10 provided with a first opening 12a and a second opening 12b facing each other, a rotary shaft 20 as switching means penetrating the valve box 10, and a rotary shaft 20. The neutral valve portion 30 that has been moved, the movable valve portion 40 connected to the neutral valve portion 30 so as to be movable in the axial direction of the rotary shaft 20, and the direction of expanding the thickness direction dimension of the movable valve portion 40 are biased. A main spring 70 (first urging portion), a driving air cylinder 80 (second urging portion) that can be extended in a direction opposite to the urging direction of the main spring 70, and the movable valve portion 40 at a central position of the valve box 10. And a position regulating auxiliary spring 90 (third urging portion) that is to be moved toward the position. The neutral valve part 30 and the movable valve part 40 constitute a neutral valve body 5. Moreover, the movable valve part 40 is comprised by the 2nd movable valve part 50 (movable valve board part) and the 1st movable valve part 60 (movable valve frame part). A flow path H (flow path direction H) is set from the first opening 12a toward the second opening 12b.

  Further, as will be described later, the second movable valve portion 50 (movable valve plate portion) and the first movable valve portion 60 (movable valve frame portion) can be fastened with the thickness dimension of the movable valve portion 40 reduced. Bolts 43 (fastening members) are provided.

When the rotating shaft 20 rotates in the direction indicated by reference numeral A1 (direction intersecting the direction of the flow path H), the neutral valve portion 30 also rotates along the direction A1 according to this rotation. Since the movable valve unit 40 is connected to the neutral valve unit 30 so as to be slidable only in the thickness direction, the movable valve unit 40 rotates integrally with the neutral valve unit 30.
By rotating the neutral valve portion 30 in this manner, the valve H is closed from the retracted position located in the hollow portion 11 where the flow passage H is not provided to the valve closed position of the flow passage H that is the position corresponding to the first opening 12a. The movable valve unit 40 moves by a pendulum motion.

Then, as described later, the seal portion of the movable valve frame portion 60 is actuated by the action of expanding the thickness dimension of the movable valve portion 40 in the direction of the flow path H by acting in the extending direction of the main spring 70 (valve closing operation). 61 and the reaction force transmission portion 59 of the movable valve plate portion 50 press the inner surface 15a and the inner surface 15b of the valve box 10, respectively, so that the movable valve portion 40 closes the flow path H. On the contrary, when the air cylinder 80 acts, the pressing force of the air cylinder 80 overcomes the urging force of the main spring 70 and the movable valve portion 40 is contracted in the flow path H direction by the movement of the thickness of the movable valve portion 40. After both the front and back surfaces are separated from the inner surface 15a and the inner surface 15b of the valve box 10 (release operation), when the rotary shaft 20 rotates in the direction indicated by reference numeral A2 (retraction operation), the neutral valve portion 30 and the movable valve are rotated according to this rotation. The part 40 also rotates in the direction A2.
By the release operation and the retreat operation, the movable valve unit 40 performs a valve opening operation that retreats from the valve opening / closing position to the retraction position to open the valve.

[Valve box 10]
The valve box 10 is constituted by a frame having a hollow portion 11. A first opening 12a is provided on the upper surface of the frame in the figure, and a second opening 12b is provided on the lower surface of the frame in the figure.
The gate valve 100 is inserted between a space where the first opening 12a is exposed (first space) and a space where the second opening 12b is exposed (second space). The gate valve 100 partitions (closes) the flow path H connecting the first opening 12a and the second opening 12b, that is, the flow path H connecting the first space and the second space. The partitioning state is opened (connecting the first space and the second space).
The hollow portion 11 of the valve box 10 includes a rotating shaft 20, a connecting member 91 fixed to the rotating shaft 20, a neutral valve portion 30 connected to the rotating shaft 20 through the connecting member 91, a movable valve portion 40, and a main spring. 70 (first urging portion), an air cylinder 80 (second urging portion), and an auxiliary spring 90 (third urging portion) are provided.

  When the rotating shaft 20 rotates in the direction indicated by the reference symbol A1 (the direction intersecting the flow path direction H), the neutral valve portion 30 fixed to the rotating shaft 20 via the connecting member 91 also follows the rotation in the direction A1. Rotate along

[Rotating shaft 20, neutral valve portion 30, connecting member 91]
The rotating shaft 20 extends substantially parallel to the flow path H, penetrates the valve box 10 and is rotatably provided.
A connecting member 91 is fixed to the rotating shaft 20. The connecting member 91 is a substantially flat plate member, for example, and is fixed to the one end 20a of the rotating shaft 20 with a screw 92 as shown in FIG. As shown in FIG. 14B, the connection member 91 is formed with a protrusion 93 having a substantially T-shaped cross-sectional shape in which one end side along the flow path direction H is widened.
In addition, the neutral valve part 30 may be fixed to the rotating shaft 20.

  On the other hand, the neutral valve portion 30 extends in a direction perpendicular to the axis of the rotary shaft 20 and has a surface parallel to this direction. As shown in FIG. 8, the neutral valve portion 30 includes a circular portion 30 a that overlaps the movable valve portion 40, and a rotating portion 30 b that rotates the circular portion as the rotating shaft 20 rotates. The rotating part 30b is located between the rotating shaft 20 and the circular part 30a, and the width of the rotating part 30b gradually increases from the rotating shaft 20 toward the circular part 30a. The rotary shaft 20 and the neutral valve section 30 are provided so as to rotate with respect to the valve box 10 but do not change in position in the flow path H direction.

  As shown in FIGS. 8 and 15, a recess 95 that fits with the protrusion 93 of the connection member 91 is formed at one end of the neutral valve portion 30. The recess 95 has a substantially T-shape whose cross-sectional shape matches the cross-sectional shape of the connection member 91. The concave portions 95 are formed as concave portions 95A and 95B on both sides of the one surface side 30A (first surface) and the other surface side 30B (second surface) in the flow path direction H of the neutral valve portion 30, respectively. Thereby, the rotating shaft 20 (refer to FIG. 16) can be selectively connected to both the upper side and the lower side along the flow direction H with respect to the neutral valve portion 30. Alternatively, the entire neutral valve body 5 can be attached to both surfaces of the rotating shaft 20. That is, if the neutral valve body 5 is attached to the concave portion 95A side of the connecting member 91, the movable valve portion 40 is in a direction to close the first opening 12a (see FIG. 9) when the gate valve 100A is closed. On the contrary, if the neutral valve body 5 is attached to the concave portion 95B side of the connecting member 91, the movable valve portion 40 is in a direction to close the second opening 12ab.

  As shown in FIG. 16, the protrusion 93 formed on the connecting member 91 and the recess 95 formed on the neutral valve portion 30 are fitted to each other. As shown in FIG. 16 (a), the connection member 91 and the neutral valve portion 30 in the engaged state extend in parallel with each other along the flow path direction H and are a set of first parallels separated by a first interval t1. The surfaces 96a and 96b are in contact with each other by a pair of second parallel surfaces 97a and 97b that extend in parallel to each other along the flow path direction H and are separated by a second interval t2 that is wider than the first interval t1.

  The set of first parallel surfaces 96a and 96b and the set of second parallel surfaces 97a and 97b are arranged symmetrically with a single axis L extending perpendicular to the flow direction H. Further, the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b are arranged along the one axis L so as not to overlap each other.

  As shown in FIG. 14, the protrusion 93 of the connecting member 91 includes first contact surfaces 93a and 93b and second parallel surfaces 97a and 97b that constitute the pair of first parallel surfaces 96a and 96b. Second contact surfaces 93c and 93d are formed. Along with the first inclined surfaces 93e and 93f connecting the first contact surfaces 93a and 93b and the second contact surfaces 93c and 93d, the projecting portion 93 has a projecting shape having a two-stage width as a whole. .

  On the other hand, as shown in FIG. 15, the recessed part 95 formed in the end of the neutral valve part 30 is the 3rd contact surface 95a, 95b which comprises one set of 1st parallel surfaces 96a, 96b, and the 2nd parallel surface 97a. , 97b and fourth contact surfaces 95c, 95d are formed. And the recessed part 95 has comprised the groove shape with the width | variety of two steps as a whole with the 2nd inclined surfaces 95e and 95f which connect each of these 3rd contact surfaces 95a and 95b and the 4th contact surfaces 95c and 95d.

  Further, as shown in FIGS. 14 and 16, a male screw 21 (fastener 121) for fastening the rotary shaft 20 and the neutral valve portion 30 through the connecting member 91 is penetrated through the center of the rotary shaft 20. A through hole 22 is formed. A female thread 31 that is screwed into the male thread 21 (fastener) is formed in a recess 95 formed at one end of the neutral valve section 30. Further, the connection member 91 is formed with an opening 98 without a thread groove through which the male screw 21 (fastener) passes.

  With the above configuration, the protruding portion 93 formed on the connection member 91 and the concave portion 95 formed on the neutral valve portion 30 are fitted, and the male screw 21 (fastener) is further provided from the upper end side of the rotating shaft 20. Are inserted into the through hole 22 and the opening 98, and the distal end portion of the male screw 21 is screwed to the female screw 31 of the neutral valve portion 30, so that the rotary shaft 20 and the neutral valve portion 30 are connected via the connecting member 91. And fastened (fixed).

When the neutral valve part 30 is attached to the connecting member 91 fixed to the rotary shaft 20 for maintenance of the neutral valve part 30, for example, replacement of the neutral valve part 30 by repeated opening and closing, it is formed at one end of the neutral valve part 30. The recessed portion 95 thus made is made to face the protruding portion 93 formed on the connecting member 91.
Next, when the concave portion 95 of the neutral valve portion 30 is inserted into the protruding portion 93, the third contact surfaces 95a and 95b of the concave portion 95 come into contact with the first contact surfaces 93a and 93b of the protruding portion 93, respectively. Further, the fourth contact surfaces 95c and 95d of the recess 95 are in contact with the second contact surfaces 93c and 93d of the protrusion 93, respectively.

  The contact surface between the recess 95 and the projection 93 in such an insertion step is limited to the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b, and the first inclined surfaces 93e and 93f of the projection 93, The second inclined surfaces 95e and 95f of the recess 95 are not in contact with each other. In other words, in the connecting direction, which is the direction indicated by the arrow B1, the circumferential mounting position can be regulated at the both side positions sandwiching the axis of the rotating shaft 20, so that the mounting position, in particular, the axis of the rotating shaft 20 can be regulated. The accuracy of the mounting direction of the surrounding neutral valve portion 30 can be easily improved. At the same time, for example, even if the clearance (gap) of the contact surface (first parallel surfaces 96a, 96b, second parallel surfaces 97a, 97b) between the recess 95 and the projection 93 is set to be extremely small, the recess 95 is formed in the projection 93. The frictional force at the time of pushing in is reduced, and the recess 95 and the projection 93 can be smoothly fitted.

  Further, by bringing the recess 95 and the projection 93 into contact with each other at the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b having different widths, the mounting accuracy when the recess 95 is pushed into the projection 93 is improved. In addition, by reducing the frictional force at the time of attachment, the attachment position, that is, the pushing amount of the recess 95 with respect to the protrusion 93 can be easily adjusted. In other words, when the recess 95 and the protrusion 93 are engaged, the screw hole position of the female screw 31 formed in the recess 95 needs to match the opening 98 formed in the protrusion 93 of the connection member 91.

  As in this embodiment, the recess 95 and the projection 93 are brought into contact with each other only by the first parallel surfaces 96a and 96b and the second parallel surfaces 97a and 97b, so that the screw hole position of the female screw 31 and the projection 93 are brought into contact with each other. The formed opening 98 can be easily adjusted with fine adjustment. Thereby, the male screw 121 (fastener) can be easily fastened to the female screw 31 through the opening 98 from the through hole 121A of the rotating shaft 20. Further, by bringing the end face 93m and the end face 95m into contact with each other, it is possible to perform mutual positioning in the connection direction, which is the direction indicated by the arrow B1 in FIG.

  In the present embodiment, the connecting member 91 is provided with the protrusion 93 and the neutral valve portion 30 is provided with the recess 95, but the concavity and convexity may be reversed. That is, it is a structure in which a concave portion is formed in the connecting member fixed to the rotary shaft 20 and a projection that fits into the concave portion is formed at one end of the neutral valve portion.

[Movable valve portion 40, second movable valve portion 50 (movable valve plate portion), first movable valve portion 60 (movable valve frame portion)]
The movable valve portion 40 has a substantially disc shape, a movable valve plate portion 50 formed substantially concentrically with the circular portion 30a, and a substantially annular first plate disposed so as to surround the movable valve plate portion 50. 2 movable valve part 60. The second movable valve portion 60 is connected to the neutral valve portion 30 so as to be slidable in the flow path H direction. Moreover, the movable valve plate part 50 is fitted to the second movable valve part 60 so as to be slidable. The movable valve plate portion 50 and the second movable valve portion 60 are movable while sliding in the directions (reciprocating directions) indicated by the symbols B1 and B2 by the main spring 70 and the air cylinder 80. Here, the directions indicated by the symbols B1 and B2 are directions perpendicular to the surfaces of the movable valve plate portion 50 and the second movable valve portion 60, and are in the flow path H direction parallel to the axial direction of the rotary shaft 20. is there.
Further, an inner peripheral crank portion 50 c is formed in the entire region near the outer periphery of the movable valve plate portion 50. An outer peripheral crank portion 60 c is formed in the entire region near the inner periphery of the movable valve frame portion 60.
In the first embodiment, the outer peripheral crank portion 60c and the inner peripheral crank portion 50c are slidably fitted with each other between the sliding surfaces 50b and 60b parallel to the flow path H direction.

A first seal made of, for example, an O-ring or the like formed in an annular shape corresponding to the shape of the first opening 12a is formed on the surface of the movable valve frame portion 60 facing (abuts) the inner surface of the valve box 10. A portion 61 (main seal portion) is provided.
The first seal portion 61 is in contact with the inner surface 15a of the valve box 10 serving as the periphery of the first opening portion 12a in a state where the movable valve portion 40 covers the first opening portion 12a when the valve is closed. It is pressed by the part 60 and the inner surface of the valve box 10. Thus, the first space is reliably isolated from the second space (partition state is ensured).

[Main spring 70 (first urging portion)]
The main spring 70 (first urging portion) is disposed in a first peripheral region 40b adjacent to the first peripheral region 40a that is the outermost periphery of the movable valve portion 40. In the main spring 70, at the same time, the movable valve plate 50 is directed toward the second opening 12b (B2 direction) so as to press the movable valve frame 60 toward the first opening 12a (B1 direction). A restoring force is generated so as to press. Thereby, in the valve closed state by the movable valve portion 40, the main spring 70 applies a force (bias) to the movable valve plate portion 50, and faces the inner surface 15b of the valve box 10 located around the second opening portion 12b. The movable valve plate 50 is pressed to bring the inner surface 15b into contact with the reaction force transmitting portion 59 of the movable valve plate 50. Further, the main spring 70 simultaneously applies (biases) a force to the movable valve frame 60 and presses the movable valve frame 60 toward the inner surface 15a of the valve box 10 located around the first opening 12a. Thus, the inner surface 15a and the first seal portion 61 of the movable valve frame portion 60 are brought into contact with each other.

In the present embodiment, the main spring 70 has a recess 50a provided in the movable valve plate 50 so as to open toward the second opening 12b, and a first opening in the movable valve frame 60 at a position opposite to the recess 50a. It is an elastic member (for example, a spring, rubber, a sealed air damper, etc.) that is fitted into a recess 60a that is provided so as to open toward the portion 12a.
The main spring 70 has a first end and a second end. The first end is in contact with the bottom surface of the recess 50 a of the movable valve plate portion 50. The second end is in contact with the ceiling surface of the recess 60 a of the movable valve frame 60. Further, as shown in FIG. 8, in the annular movable valve frame portion 60, a plurality of first urging portions 70 are provided at equal intervals along the circumferential direction.

  The natural length of the elastic member constituting the main spring 70 is that the seal portion 61 of the movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50 respectively connect the inner surface 15a and the inner surface 15b of the valve box 10 with each other. This is larger than the distance between the bottom surface of the concave portion 50a of the movable valve plate portion 50 and the ceiling surface of the concave portion 60a of the movable valve frame portion 60 when the maximum thickness dimension of the movable valve portion 40 to be pressed is reached. For this reason, in the main spring 70 arranged inside the recess 50a and the recess 60a while being compressed by the bottom surface of the recess 50a of the movable valve plate portion 50 and the ceiling surface of the recess 60a of the movable valve frame portion 60, an elastic restoring force is provided. (Stretching force, biasing force) is generated. When this elastic restoring force acts, the movable valve frame portion 60 slides in the B1 direction, and simultaneously the movable valve plate portion 50 slides in the B2 direction, while the first seal portion 61 and the reaction force transmission portion 59 become the valve box. The valve 10 is pressed against the inner surface of the valve 10 to perform a valve closing operation.

Further, the main spring 70 is disposed in the second peripheral region 40b close to the first seal portion 61 in order to efficiently transmit the pressing force to the first seal portion 61 and to ensure the closing of the gate valve 100. Specifically, a ridge serving as a reaction force transmitting portion 59 (described later) is located at an immediately outer peripheral position immediately below the first seal portion 61, whereas the first seal is used as a radial position of the movable valve plate portion 50. The main spring 70 is positioned at a position opposite to the ridge 59 (reaction force transmitting portion) sandwiching the portion 61. As a result, the urging force of the main spring 70 is efficiently transmitted to the seal portion 61 of the movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50, and the valve is reliably sealed by the deformation of the first seal portion 61. Can be improved.
In addition, the main spring 70 may be disposed in the second peripheral region 40 b that is located immediately below the first seal portion 61 so that the first seal portion 61 can be directly pressed. In this case, in the gate valve, since the first urging portion 70 is provided in the movable valve frame portion 60, the first urging portion 70 can be positioned directly below the first seal portion 61.

  As described above, in the gate valve 100, as the actuator for performing the valve closing operation and the valve opening operation, the main spring 70 that performs the valve closing operation and the second urging portion 80 (described later) that performs the valve opening operation are close to each other. Is provided. In this configuration, the main spring 70 and the second urging portion 80 have a diameter so as to be close to each other in the peripheral region (the first peripheral region 40a and the second peripheral region 40b) of the movable valve unit 40 close to the first seal portion 61. It is arranged adjacent to the direction. Further, the main spring 70 is located in the vicinity immediately below the first seal portion 61. In other words, the structure of the gate valve 100 is such that the positional relationship between the first seal portion 61, the reaction force transmission portion 59, and the main spring 70 can be efficiently sealed as a structure that applies a moment load in which an action point and a fulcrum exist. Configured.

  Further, the biasing force of the main spring 70 increases the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 are expanded, that is, the thickness of the movable valve portion 40 is increased, and the seal portion 61 and the movable valve of the movable valve frame portion 60 are increased. The reaction force transmission portion 59 of the plate portion 50 is set in a direction in which it is pressed against the inner surfaces 15a, 15b of the valve box 10. For this reason, even when the power supply (energy supply) from the utility equipment to the apparatus including the gate valve 100 is stopped due to a power failure or the like, the gate valve 100 is reliably closed only by the mechanical force generated in the main spring 70. Can do. For this reason, a fail-safe gate valve can be realized reliably.

[Air cylinder 80 (second urging portion)]
The air cylinder 80 is disposed in the first peripheral region 40 a that is the outermost periphery of the movable valve unit 40. In the air cylinder 80, when compressed air is supplied as a driving fluid to the air cylinder 80, a force (biasing force, compressed air) that moves the movable valve frame 60 toward the second opening 12b (direction B2). Resulting force). At the same time, a force (biasing force, force due to compressed air) for moving the movable valve plate portion 50 toward the first opening 12a (direction B1) is generated. As a result, the biasing force of the main spring 70 is overcome, and the movable valve frame 60 is separated from the inner surface 15a of the valve box 10 positioned around the first opening 12a, and at the same time, positioned around the second opening 12b. The movable valve plate portion 50 is separated from the inner surface 15b of the valve box 10 to be operated.
As a result, the body 40 becomes rotatable in the valve box 10 at the center of the thickness of the valve box 10 in the flow path H direction by the biasing force of an auxiliary spring 90 (third biasing part) described later.

  In the movable valve portion 40, the first peripheral region 40 a is located inside the seal portion 61 of the annular movable valve frame portion 60 and the reaction force transmission portion 59 of the movable valve plate portion 50. At the same time, in the movable valve unit 40, the second surrounding region 40b is located inside the first surrounding region 40a. That is, the main spring 70 is disposed inside the air cylinder 80 in the radial direction of the movable valve portion 40. In other words, the air cylinder 80 is adjacent to the main spring 70 in a direction that intersects the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide (the flow path H direction). That is, the air cylinder 80 is positioned between the seal portion 61 and the reaction force transmission portion 59 and the main spring 70 in the radial direction of the movable valve portion 40.

In the present embodiment, the air cylinder 80 is one air cylinder (gap) provided between the movable valve plate portion 50 and the movable valve frame portion 60.
Specifically, the air cylinder 80 includes a recess 60d that opens toward the first opening 12a of the movable valve frame portion 60 and a protrusion 50d that protrudes toward the second opening 12b of the movable valve plate portion 50. The annular recess 60d and the annular projection 50d are formed so as to slide together. The air cylinder 80 includes an annular space formed at the peripheral edge of the movable valve frame portion 60, and a protrusion (annular convex portion) formed on the outermost periphery of the movable valve plate portion 50. It functions as two annular cylinders (annular gaps). In other words, the annular cylinder is formed so as to surround the flow path H.

  When compressed air that is a driving fluid is supplied to the air cylinder 80, an expansion force (biasing force) that expands the volume of the second urging portion 80 is generated in the B1 and B2 directions. When the magnitude of the expansion force is larger than the restoring force generated in the main spring 70, the expansion force overcomes the urging force of the main spring 70, the main spring 70 is compressed, and the movable valve plate portion 50 moves the movable valve frame portion 60 in the B1 direction. By sliding in the B2 direction, the thickness direction dimension of the valve body 40 is reduced, the first seal portion 61 is separated from the inner surface 15a of the valve box 10, and at the same time, the reaction force transmitting portion 59 is moved to the inner surface 15b of the valve box 10. The valve opening operation is performed away from the valve. At this time, the annular concave portion 60d and the convex portion 50d slide so that the moving direction of the movable valve plate portion 50 and the movable valve frame portion 60 is restricted only in the flow path direction, and the movable valve plate The position of the portion 50 and the movable valve frame portion 60 are regulated so that the seal portion 61 and the reaction force transmission portion 59 are moved in parallel from the state in which the seal portion 61 and the reaction force transmission portion 59 are in contact with the inner surfaces 15a and 15b of the valve box 10. That is, the air cylinder 80 can regulate the relative movement direction and the posture of the movable valve plate portion 50 and the movable valve frame portion 60.

[Auxiliary spring 90 (third urging portion)]
The auxiliary spring 90 is provided between the neutral valve portion 30 and the movable valve frame portion 60, and the thickness dimension of the valve body 40 is larger than that of the neutral valve portion 30 located substantially in the center of the valve box 10 in the flow path direction. When contracted, the valve body 40 is urged from the center of the valve box 10.
The auxiliary spring 90 is provided in a rod-like position restricting portion 65 that is connected to the movable valve frame portion 60 through an opening 30 a provided in the outer peripheral position (right side position in FIGS. 9 and 11) of the neutral valve portion 30. ing. The auxiliary spring 90 is also an elastic member (for example, a spring, rubber, a sealed air damper, etc.), like the main spring 70.
The auxiliary spring 90 is locked to the flange portion 30b provided on the first opening 12a side of the opening 30a of the neutral valve portion 30a and the tip 65a of the position restricting portion 65 to open the movable valve frame portion 60 to the second opening. It is urged in the direction toward B2 moving toward the portion 12b.

The auxiliary spring 90 biases the movable valve frame portion 60 positioned on the first opening 12a side from the neutral valve portion 30 toward the second opening 12b, and the valve positioned around the first opening 12a. When the seal portion 61 of the movable valve frame portion 60 is in contact with the inner surface 15a of the box 10 and when the compressed air that is the driving fluid is supplied to the air cylinder 80, the movable valve frame portion 60 is It is urged so as to be separated from the inner surface 15a of the valve box 10 located around the one opening 12a.
Thereby, when compressed air is supplied to the air cylinder 80, the valve body 40 moves toward the center of the flow direction of the valve box 10, and finally the valve body 40 flows in the flow direction of the valve box 10. The posture of the valve body is controlled so as to be positioned substantially at the center. Further, the biasing force of the auxiliary spring 90 is much smaller than the difference between the biasing force of the main spring 70 and the biasing force of the air cylinder 80. That is, since the auxiliary spring 90 functions to change the thickness dimension of the valve body, the auxiliary spring is more active than the active spring for realizing the valve closed state, or the main spring 70 or the air cylinder 80 as an actuator. The biasing force of 90 may be very small.

As described above, in the gate valve 100, as the actuator for performing the valve closing operation and the valve opening operation, the main spring 70 that performs the operation of increasing the thickness of the valve body 40 and the air cylinder that performs the operation of reducing the thickness of the valve body 40. 80 and an auxiliary spring 90 for controlling the posture of the valve body 40 so that the valve body 40 is disposed on the central position side of the valve box 10 in the flow path direction. In this configuration, the main spring 70 and the air cylinder 80 are arranged in parallel so as to be close to each other in the peripheral region of the movable valve portion 40 close to the first seal portion 61.
According to this configuration, if one supply path 41 for supplying compressed air to the second urging unit 80 in one direction is provided, the compressed air is supplied to the inside of the annular air cylinder 80 to provide a valve. The thickness of the body 40 can be expanded and contracted (valve opening operation and valve closing operation), and the position of the valve body 40 in the flow path direction accompanying the expansion and contraction of the valve body 40 by the auxiliary spring 90 during this operation It can be easily maintained near the center of the ten.
Further, since the air cylinder 80 is used to perform the valve opening operation, the first urging unit 70 can be compressed as the magnitude (output) of the force generated in the second urging unit 80. (Output) is enough.

  FIG. 10 is an enlarged longitudinal sectional view showing a portion where the movable valve plate portion 50 and the movable valve frame portion 60 are fitted to each other and a portion where the neutral valve portion 30 and the movable valve plate portion 50 are fitted to each other. And shows a portion where the first urging portion 70 and the guide pin 62 are provided.

[Second seal portion 51a, 51b (double seal portion) and third seal portion 52a, 52b (double seal portion)]
The outer peripheral surface of the annular convex portion 50d (projection) of the movable valve plate portion 50 is in contact with the inner peripheral surface of the annular concave portion 60d of the movable valve frame portion 60, and the movable valve plate portion 50 and the movable valve frame portion 60 are in contact with each other. As the double seal portion for sealing the gap, annular second seal portions 51a and 51b such as O-rings and third seal portions 52a and 52b are provided.

Specifically, the second seal portions 51a and 51b are provided on the first outer peripheral surface 50f located on the radially outer side of the annular convex portion 50d (projection) of the movable valve plate portion 50. Further, third seal portions 52a and 52b are provided on the second inner peripheral surface 50g, which is the inner side of the first outer peripheral surface 50f in the radial direction. The second seal portions 51a and 51b are in contact with the first inner peripheral surface 60f of the movable valve frame portion 60, and the third seal portions 52a and 52b are in contact with the second outer peripheral surface 60g of the movable valve frame portion 60.
The second seal portions 51a and 51b partition the air cylinder 80, which is a space with high pressure, and the hollow portion 11, which is a space with low pressure and close to the first opening portion 12a, to ensure a partitioned state. Similarly, the third seal portions 52a and 52b partition the hollow portion 11 from the air cylinder 80, which is a space with high pressure, and the second opening portion 12b, such as a space with low pressure, to ensure a partitioned state.

  The second seal portions 51a and 51b include an air cylinder 80, which is a space where compressed air for driving is supplied and a high pressure, and a first space side communicating with the first opening 12a, which is a space where the pressure is low, for example. It can block | block and can ensure this partition state. Similarly, the third seal portions 52a and 52b partition the air cylinder 80, which is a high-pressure space, from the second space side, which is a low-pressure space and is close to the second opening 12b, to ensure a partitioned state. be able to.

[Leak hole Seal6]
As shown in FIGS. 4 and 5, the second seal portion 51 a and the third seal portion 52 a are provided on the low pressure side in the second peripheral region 40 b adjacent to the first peripheral region 40 a that is the outermost periphery of the valve body 40. In the annular air cylinder 80 thus formed, in the second seal portion 51a and the third seal portion 52a provided on the outer peripheral surface 50f and the inner peripheral surface 50g, the O-ring grooves Seal1 in which the respective O-rings Sale2 are accommodated. A leak hole Seal6 is provided on the side close to the first opening 12a and the second opening 12b on the low pressure side. 10 and 12, the leak hole Seal6 and the like are omitted.

The second seal portion 51a on the outer peripheral side is provided with a leak hole Seal6e extending in the sliding direction so as to penetrate near the bottom surface Seal3 of the O-ring groove Seal1.
The third seal portion 52a on the inner peripheral side includes a leak hole Seal6a extending in the sliding direction so as to penetrate near the bottom surface Seal3 of the O-ring groove Seal1, and a leak hole communicating with and substantially orthogonal to the leak hole Seal6a Seal 6b is provided, the one end of the leak hole Seal 6a on the low pressure side is closed by the closing member Seal 6c, and the one end of the leak hole Seal 6b on the low pressure side is closed by the closing member Seal 6d. On the opening side of the leak hole Seal6b, a recess Seal67 that is recessed from the periphery is provided in a range larger than the opening diameter.

  By providing the leak hole Seal6 at the position where the closed space may be formed in this way, this portion communicates with the low pressure side, and the internal pressure decreases in conjunction with vacuuming on the low pressure side, Gas can be prevented from being ejected, and the degree of vacuum on the low pressure side is not deteriorated.

  As shown in FIG. 4, the leak hole Seal6a is provided so as to extend in the radial direction of the valve body 40 or the first opening 12a. In the present embodiment, the leak hole Seal6e communicates with the recess when the leak hole Seal6a is formed.

The leak hole Seal6a is formed as a through hole from the radial outer peripheral surface 50f side to the inner peripheral surface 50g side of the annular convex portion 50d, and the leak hole Seal6b is a bottom surface Seal3 of the O-ring groove Seal1 from the low pressure side surface of the annular convex portion 50d. The side wall Seal4 which is the side is formed as a through hole, and these are all closed by the closing members Seal6c and Seal6d.
As shown in FIG. 6, the closing members Seal6c and Seal6d are provided with an O-ring on the head side of the bolt.

[Guide pin 62]
The guide pin 62 is fixed to the movable valve frame 60 and is a rod-shaped body having a uniform thickness and standing in the flow path direction. The guide pin 62 penetrates through the air cylinder 80 and is an annular convex portion of the movable valve plate portion 50. The hole 50h formed in 50d (protrusion) is fitted.
The guide pin 62 is configured so that the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide does not deviate from the directions indicated by reference numerals B1 and B2, and the movable valve plate portion 50 and the movable valve frame. Even when the part 60 slides, the position regulation is surely guided so that the movement is performed without changing the posture.

  As a result, the movable valve plate portion 50 and the movable valve frame portion 60 are prevented from moving obliquely with respect to the symbols B1 and B2. At the same time, the movable valve frame portion 60 is in a closed state with respect to the state in which the seal portion 61 and the reaction force transmission portion 59 are in contact with the inner surfaces 15a and 15b of the valve box 10, respectively. Even when the position in the flow path direction with respect to the frame part 60 is changed, they are moved in parallel while maintaining a parallel state, and the movable valve plate part 50 and the movable valve frame part 60 are prevented from being inclined.

  In this structure, while the movable valve plate portion 50 and the movable valve frame portion 60 are positioned with respect to each other, the movable valve plate portion 50 and the movable valve frame portion 60 move relative to each other while maintaining a parallel state in the directions indicated by reference numerals B1 and B2, thereby closing and opening the valve. Valve operation can be performed.

In the structure including the guide pin 62 as described above, for example, the gate valve 100 is attached so that gravity acts at right angles to the direction in which the movable valve plate portion 50 and the movable valve frame portion 60 slide. In this case, the weights of the movable valve plate portion 50 and the movable valve frame portion 60 that are sliding members are added to the guide pin 62. For this reason, it is prevented that the weight of the movable valve plate part 50 and the movable valve frame part 60 is directly added to the second seal parts 51a and 51b and the third seal parts 52a and 52b (O-ring).
In order to reduce the area of the sliding surface between the guide pin 62 and the hole 50h, and in order to isolate the guide pin 62 from the first space and the second space outside the gate valve 100, the guide pin 62 is It arrange | positions so that the inside of the air cylinder 80 may be penetrated.

[Wiper 53, 54]
An annular wiper 53 that abuts against the inner peripheral surface of the movable valve portion 60 is provided on the first outer peripheral surface 50 f located on the radially outer side of the annular convex portion 50 d (projection) of the movable valve plate portion 50. . Similarly, the second inner peripheral surface 50g, which is the inner side of the first outer peripheral surface 50f in the radial direction of the annular convex portion 50d (projection) of the movable valve plate portion 50, is a circle that contacts the outer peripheral surface of the movable valve portion 60. An annular wiper 54 is provided.

The wiper 53 contacts the first inner peripheral surface 60f of the movable valve frame 60 in the same manner as the second seal portions 51a and 51b, and the wiper 54 is movable in the same manner as the third seal portions 52a and 52b. It abuts on the first outer peripheral surface 60g of the frame portion 60.
The wipers 53 and 54, the second seal portions 51a and 51b, and the third seal portions 52a and 52b are all disposed on the annular convex portion 50d (projection) of the movable valve plate portion 50. The second seal portion 51a is disposed at a position close to the first opening 12a (first space). The third seal portion 52a is disposed at a position close to the second opening 12b (second space). The wipers 53 and 54 are provided so as not to interfere with the leak hole Seal6.

These wipers 53 and 54 are formed on the inner peripheral surface of the recess 60d of the movable valve frame 60 in the air cylinder 80 in which the annular recess 60d and the annular protrusion 50d slide by valve opening and closing operations. Lubricated or cleaned, and has a function of preventing dust generated by the sliding and dust generated from the air cylinder 80 from being discharged into the first space and the second space.
Further, if, for example, a sponge-like porous elastic body is selected as a member (material) constituting the wipers 53 and 54, the lubricating oil can be infiltrated (held) inside the member.
Accordingly, it is possible to maintain a state in which a thin oil film having a certain film thickness is formed on the seal surfaces sealed by the second seal portions 51a and 51b and the third seal portions 52a and 52b. That is, the wipers 53 and 54 wipe off an excessive oil film, and apply an oil film having a certain film thickness when the oil film is exhausted.

[Intermediate atmospheric chamber 55, 56]
An intermediate atmospheric chamber 55 that is an atmospheric pressure space (gap) is provided on the surface of the air cylinder 80 partitioned by the second seal portions 51a and 51b. Similarly, on the surface of the air cylinder 80 partitioned by the third seal portions 52a and 52b, an intermediate atmospheric chamber 56 that is an atmospheric pressure space (gap) is provided.
Specifically, an intermediate atmospheric chamber 55 is provided in a portion partitioned by the second seal portions 51a and 51b on the outer peripheral surface 50f of the annular convex portion 50d (projection) of the movable valve plate portion 50. Further, an intermediate atmospheric chamber 56 is provided in a portion partitioned by the third seal portions 52a and 52b on the inner peripheral surface 50g of the annular convex portion 50d (projection) of the movable valve plate portion 50. The intermediate atmospheric chamber 55 is a space formed by a groove provided in the first inner peripheral surface 60f of the movable valve frame portion 60 and the outer peripheral surface 50f of the movable valve plate portion 50, and the intermediate atmospheric chamber 56 is a movable valve. This is a space formed by the first outer peripheral surface 60 g of the frame portion 60 and the grooves provided on the second inner peripheral surface 50 g of the movable valve plate portion 50.

These intermediate atmospheric chambers 55 and 56 are configured in the same manner as a supply path 41 described later, and communicate with the outside of the gate valve 100 through a communication path (not shown). Even when the air pressure is broken, the compressed air (driving gas) is released to the outside of the gate valve to prevent the compressed air from being released into the valve box 10.
That is, when the second seal portion 51b that is the first seal is torn against the air cylinder 80 that is in a pressurized state, the second seal portion 51a that is the second seal is closer to the gas supply side. An intermediate atmospheric chamber 55 and a communication path for releasing the driving gas to the outside of the gate valve are provided. In addition, when the third seal portion 52b that is the first seal is torn against the air cylinder 80 that is in a pressurized state, the third seal portion 52a that is the second seal is closer to the gas supply side, An intermediate atmospheric chamber 56 and a communication path for releasing the driving gas toward the outside of the gate valve are provided.
Accordingly, it is possible to prevent the compressed air from being ejected into the valve body 10 and adversely affecting the interior of the gate valve 100, the first space, and the second space.

At the same time, the pressure in these intermediate atmospheric chambers 55, 56 can be monitored by a communication path. That is, a pressure gauge is provided outside the gate valve 100 so as to measure the pressure in the intermediate atmospheric chambers 55 and 56 and is connected by a communication path, and the pressure is monitored by the user.
For example, when the first space near the first opening 12a is a decompression space and the second seal portion 51a is damaged, the pressure in the intermediate atmospheric chamber 55 is lower than the atmospheric pressure.
Further, since the pressure in the air cylinder 80 to which compressed air is supplied becomes higher than the atmospheric pressure, when the second seal portion 51b is damaged, the pressure in the intermediate atmospheric chamber 55 is higher than the atmospheric pressure. Get higher.
Similarly, when the second space near the second opening 12b is a decompression space and the third seal portion 52a is damaged, the pressure in the intermediate atmospheric chamber 56 is lower than the atmospheric pressure.
Further, since the pressure in the air cylinder 80 to which compressed air is supplied becomes higher than the atmospheric pressure, when the third seal portion 52b is damaged, the pressure in the intermediate atmospheric chamber 56 is higher than the atmospheric pressure. Get higher.

Thus, since the gate valve 100 can have a structure for monitoring the pressure in the intermediate atmospheric chambers 55 and 56, for example, the pressure value in the intermediate atmospheric chambers 55 and 56 is lower than the atmospheric pressure and has a threshold value. When the pressure is lower than the pressure, or higher than the atmospheric pressure and higher than the threshold pressure, the abnormality of the second seal portions 51a and 51b and the third seal portions 52a and 52b can be detected.
For example, if a structure in which an alarm device is provided in the intermediate atmosphere chambers 55 and 56 or in the communication path, or a structure in which an alarm device is provided in the control device connected to the gate valve 100 is employed, the second seal The abnormality of the parts 51a and 51b and the third seal parts 52a and 52b can be notified by an alarm. Therefore, the second seal portions 51a and 51b and the third seal portions 52a and 52b are damaged, an internal leak occurs in the gate valve 100, and it can be immediately recognized that maintenance is necessary.
As a result, it is possible to reliably determine a problem such as an internal leak occurring in the gate valve that cannot be detected from the outside of the vacuum device or the like.

[Connection Pin 69, Supply Path 41]
As shown by a two-dot chain line in the figure, the gate valve 100 is provided with a supply passage 41 for supplying a driving gas to the air cylinder 80. The supply passage 41 is formed inside the casing of the movable valve frame 60, and It is provided so as to communicate with a driving gas supply means (not shown) provided outside the gate valve 100 via the inside of the neutral valve section 30 and the rotary shaft 10.
A driving gas can be supplied to the supply passage 41 between the movable valve frame portion 60 and the neutral valve portion 30 even when the flow direction position of the movable valve frame portion 60 and the neutral valve portion 30 changes. A connection pin portion 69 is provided for sliding connection.

  The connection pin portion 69 includes a hole 38 having a circular cross section that is drilled in the neutral valve portion 30 in parallel with the flow path direction, and a rod-like connection pin 68 that is rotatably fitted in the hole 38. . The inner surface 38a of the hole 38 is reduced in diameter by the inner surface 38b on the bottom side as compared with the inner surface 38a on the opening side. Correspondingly, the diameter of the connecting pin 68 is reduced in the tip 68b with respect to the base 68a. ing. And the level | step difference 38c and the level | step difference 68c are each formed in the part from which this radial dimension changes.

  As shown by a two-dot chain line in the figure, the connection pin portion 69 has a supply passage 41 formed in the vicinity of the central axis thereof, has a tubular shape, and the supply passage 41 inside the movable valve frame portion 60 communicates. Further, the supply path 41 is opened at the distal end surface 68da of the connection pin 68, and in the pressurizing space 69a formed by the distal end surface 68d and the vicinity of the bottom 38d of the hole 38, the neutral valve portion 30 body is formed. The supply path 41 formed in the communication is communicated. The compressed air supplied from the driving gas supply means is jetted into the space 69a via the supply passage 41 inside the neutral valve portion 30, and the supply passage 41 inside the connection pin portion 69 and the supply passage inside the movable valve frame portion 60. It is supplied to the air cylinder 80 through 41.

  In the connection pin portion 69, the inner peripheral surface 38 a of the hole 38 is in contact with the outer peripheral surface 68 a of the connection pin 68, and the inner peripheral surface 38 b of the hole 38 is in contact with the outer peripheral surface 68 b of the connection pin 68. Yes. Even if the connection pin 68 moves in the axial direction (flow path direction) in the hole 38, the connection pin 68 is not between the front end surface 68d and the bottom surface 38d serving as the pressurizing surface but is a surface in the sliding direction. In addition, a double seal portion that shuts off the pressurized space 69a that is supplied with compressed air for driving and has a high pressure and the second space that communicates with the second opening 1b that is a low-pressure space, for example. Is provided. As the seal portion, a member that can secure a partition state between the pressurizing space 69a and the hollow portion 11 is used.

Specifically, the connection pin 68 has an annular thick seal portion that is an O-ring or the like and a circumferential groove that embeds it as a double seal portion that seals between the connection pin 68 and the hole 38. 68f is provided, and an O-ring or the like and an annular small seal portion 68g serving as a circumferential groove for embedding the O-ring or the like are provided on the outer peripheral surface 68b.
At the same time, an annular intermediate atmospheric chamber 69c formed by the step 68c and the step 38c is located between the double seals and communicates with the communication path 42 (not shown), so that compressed air is ejected into the valve box 10. Thus, adverse effects on the interior of the gate valve 100, the first space, and the second space can be prevented.

In particular, it is not sealed between the tip surface 68d and the bottom surface 38d, which becomes a pressure surface and the distance thereof changes, but the outer peripheral surface 68a which does not directly become a pressure surface and is a sliding surface and the distance does not change. Further, since the sealing is performed between the inner peripheral surface 38a and the outer peripheral surface 68b and the inner peripheral surface 38b, a more reliable sealed state can be maintained.
According to the configuration of the seal portions 68f and 68g, the second seal portions 51a and 51b (double seal portions), the third seal portions 52a and 52b (double seal portions), and the guide pins in the air cylinder 80 described above. It is possible to achieve the same effects as the configuration of 62.

  Even when the connection pin 68 is moving in the axial direction (flow channel direction) in the hole 38 or when the relative position in the flow channel direction is changed due to movement, the compressed air supplied from the driving gas supply means is neutral valve. It is ejected into the space 69a via the supply path 41 inside the part 30, and via the space 69a whose volume has changed, via the supply path 41 inside the connection pin part 69 and the supply path 41 inside the movable valve frame part 60. The air cylinder 80 is stably supplied.

  As described above, in the present embodiment, with the above-described configuration, the movable valve plate portion 50 and the movable valve frame portion 60 are pressed against the inner surfaces 15a and 15b of the valve box, and the seal portion 61 and the reaction force transmission portion 59 are thus pressed. Thus, the valve can be reliably closed. At the same time, by providing the leak hole Seal6 at a position where the closed space Seal5 is likely to be formed, this portion communicates with the low pressure side 11 and interlocks with the vacuum suction on the low pressure side to close the leak hole Seal6 and the blockage. The internal pressure of the space Seal5n is reduced, gas can be prevented from being ejected, and the vacuum degree on the low pressure side is not deteriorated.

  Further, by moving the movable valve plate portion 50 and the movable valve frame portion 60 toward the central position side of the hollow portion 11 in the flow path direction, the valve body 40 is rotated so as not to contact the valve box 10, The valve body 40 can be moved to the retracted position by a drive mechanism that is smaller and has a smaller output than a mechanism that requires an operation other than rotation. In this configuration, a valve body can be formed by one movable valve portion 40 and three urging portions 70, 80, 90. Further, the movable valve plate portion 50 and the movable valve frame portion 60 can be directly pressed against the inner surface of the valve box 10 by the restoring force of the main spring 70 disposed in the peripheral region of the movable valve portion 40, so that the valve can be reliably closed. Similarly, the movable valve plate portion 50 and the movable valve frame portion 60 are separated from the inner surface of the valve box 10 by the action of the compressed air supplied to the air cylinder 80 disposed in the peripheral region of the movable valve portion 40, so that The valve can be opened as a rotatable state. Therefore, in the first embodiment, it is possible to realize a gate valve that has a simple structure and can perform a partitioning operation with high reliability.

(Second Embodiment)
FIG. 17 is a longitudinal sectional view showing the structure of the gate valve in the second embodiment of the present invention, and is an enlarged view of the main part near the cylinder where the fixed valve part and the movable valve part are fitted.
In FIG. 7, members corresponding to those in the first embodiment shown in FIGS. 1 to 16 are denoted by the same reference numerals, and description thereof is omitted or simplified.

In the first embodiment, a U-shaped U-shaped portion is formed on the outer periphery of the movable valve plate portion 50, and an inverted U-shaped inverted U-shaped portion is formed on the inner periphery of the movable valve frame portion 60. Yes. Moreover, the movable valve plate part 50 and the movable valve frame part 60 are provided so that the U-shaped part of the movable valve plate part 50 and the inverted U-shaped part of the movable valve frame part 60 are fitted to each other.
On the other hand, in the structure of the movable valve portion 40 of the second embodiment, as shown in FIG. 17, the outer peripheral crank portion formed on the outer periphery of the movable valve plate portion 50 and the inner periphery formed on the inner periphery of the movable valve frame portion 60. The peripheral crank part is fitted.

  The natural length of the elastic member constituting the main spring 70 is larger than the depth of the recess 60a. For this reason, in the 1st biasing part 70 arrange | positioned in the recessed part 60a, being compressed with the ceiling surface of the recessed part 60a, and the movable valve board part 50, the elastic restoring force (extension | strength force, urging | biasing force) has arisen. . When the elastic restoring force acts, the first seal portion 61 is pressed against the inner surface of the valve box 10 while the movable valve portion 60 slides in the B1 direction, and the valve closing operation is performed.

The main spring 70 is preferably disposed directly below the first seal portion 61 so that the first seal portion 61 can be pressed directly.
In the second embodiment, since the main spring 70 is provided in the movable valve frame portion 60, the main spring 70 can be positioned directly below the first seal portion 61.

In the present embodiment, a main spring 70 that performs the valve closing operation and an air cylinder 80 that performs the valve opening operation are provided as actuators that perform the valve closing operation and the valve opening operation. In this configuration, the main spring 70 and the air cylinder 80 are arranged in parallel so as to be close to each other in the peripheral region of the movable valve portion 40 close to the first seal portion 61.
Specifically, the main spring 70 is provided in the first peripheral region 40a that is the outermost periphery of the valve body 40, and the air cylinder 80 is disposed in the second peripheral region 40b adjacent to the first peripheral region 40a. Further, the main spring 70 is located immediately below the first seal portion 61.
In this structure, the main spring 70 can directly press the first seal portion 61 and directly applies a load to the first seal portion 61 in a substantially vertical direction. That is, since the gate valve 100 is not a structure that applies a moment load in which an action point and a fulcrum exist, a structural member (strength) corresponding to the insulator is not required, and the movable valve portion 60 can support its own weight. It is enough if there is strength.

In the second embodiment, the positions of the third seal portion 52b, the intermediate atmospheric chamber 56, the third seal portion 52a, and the wiper 54 are different from those of the first embodiment.
Specifically, in the first embodiment, the third seal portion 52b, the intermediate atmospheric chamber 56, the third seal portion 52a, and the wiper 54 are provided on the inner surface 50g that is the surface opposite to the first outer peripheral surface 50f. However, in the second embodiment, the second outer peripheral surface 50j is provided with the third seal portion 52b, the intermediate atmospheric chamber 56, the third seal portion 52a, and the wiper 54.

In the outer peripheral crank portion of the movable valve plate portion 50, second seal portions 51a and 51b and a wiper 53 are provided on the first outer peripheral surface 50f located on the radially outer side. The third seal portions 52a and 52b and the wiper 54 are provided on the second outer peripheral surface 50j located inside the first outer peripheral surface 50f in the radial direction and below the second seal portions 51a and 51b. The second seal portions 51a and 51b are in contact with the first inner peripheral surface 60j of the movable valve frame portion 60, and the third seal portions 52a and 52b are positioned below the first inner peripheral surface 60j of the movable valve portion 60. It contacts the second inner peripheral surface 60k.
The second seal portions 51a and 51b, the wiper 53, and the intermediate atmospheric chamber 55 partition the air cylinder 80, which is a high-pressure space, and the first space, which is a low-pressure space or the like and is close to the first opening 12a, Ensure partitioning. Similarly, the third seal portions 52a and 52b, the wiper 54, and the intermediate atmospheric chamber 56 are an air cylinder 80 that is a space with a high pressure, and a second space that is a space with a low pressure and is close to the second opening 12b. To secure the partitioning state.
Also in the second seal portion 51a and the third seal portion 52a of the present embodiment, although not shown, the first opening portion 12a and the second opening portion on the low pressure side of the O-ring groove Seal1 in which the respective O-rings Sale2 are stored. A leak hole Seal6 is provided on the side close to 12b.

These wipers 53 and 54 lubricate or clean the inner peripheral surface of the movable valve frame portion 60 that slides by the valve opening operation and the valve closing operation, and removes dust generated by the sliding and dust generated from the air cylinder 80. The first space and the second space are not released.
Further, the lubricating oil can be penetrated (held) into the wipers 53 and 54.
Accordingly, it is possible to maintain a state in which a thin oil film having a certain film thickness is formed on the seal surfaces sealed by the second seal portions 51a and 51b and the third seal portions 52a and 52b. That is, the wipers 53 and 54 wipe off an excessive oil film, and apply an oil film having a certain film thickness when the oil film is exhausted.

  As described above, according to the present embodiment, the same effect as in the first embodiment can be obtained. Furthermore, in the second embodiment, the main spring 70 that performs the valve closing operation and the air cylinder 80 that performs the valve opening operation are disposed in the peripheral region of the movable valve unit 40 close to the first seal unit 61. There is no need to provide an actuator in the valve box 10, and a gate valve having a simple configuration can be realized.

FIG. 18 is an enlarged vertical cross-sectional view of a main part in the vicinity of a connection pin portion to which a neutral valve portion and a movable valve portion (movable valve frame portion) in the present embodiment are connected.
In FIG. 18, members corresponding to those in the first embodiment illustrated in FIGS. 1 to 16 are denoted by the same reference numerals, and description thereof is omitted or simplified.

In the first embodiment, the connection pin 68 integrated with the movable valve frame portion 60 is formed as the connection pin portion 69. However, as the connection pin portion 69 of this embodiment, the connection pin portion 69 is connected to the movable valve frame portion 60. The connected floating pin 68 </ b> A (connection pin) is fitted into the through hole 67.
As shown in FIG. 18, the lower side of the floating pin 68A fitted into the hole 38 so as to be rotatable and slidable in the axial direction has substantially the same configuration as that of the first embodiment described above. .

  The connection pin portion 69 of the present embodiment has a circular cross-sectional through hole 67 drilled in the movable valve frame portion 60 in parallel with the flow path direction, and a rod-shaped floating pin 68A having a flange portion 68Aa in the through hole 67. Can be rotated and finely moved in the radial direction, and the inclination can be minimized. The inner surface 67a of the through hole 67 has a flange inner surface 67a having a diameter larger than that of the hole 38 facing the movable valve frame portion 60 corresponding to the diameter dimension of the flange portion 68Aa, and is compared with the flange inner surface 67a on the opening side. The gas connection position inner surface 38b on the penetrating side shown in the drawing is reduced in diameter, and the support position inner surface 67c on the penetrating side shown in the drawing is reduced in diameter compared to the gas connection position inner surface 67b, and compared with the support position inner surface 67c. The outer inner surface 67d on the penetrating side as shown in the figure is enlarged.

The floating pin 68A has a diameter dimension corresponding to the diameter dimension of the through hole 67, the diameter of the gas connection portion 68Ab reduced with respect to the flange portion 68Aa, and the fixed end 68Ac with respect to the gas connection portion 68Ab. The diameter is reduced.
A fixed groove 68Ad is provided around the fixed end 68Ac, and a fixing member 68Ae such as a washer fitted into the fixed groove 68Ad is brought into contact with the outer side surface 67e of the through hole 67 so that the axial direction ( The movement in the inner direction (downward direction in the figure) in the flow path direction is restricted and the position is fixed.
A seal surface 68Af on the upper side of the flange portion 68Aa and a seal surface 68Ag on the upper side of the gas connection portion 68Ab are sealed members 67h, 67j that are O-rings or the like between the opposed step surface 67f and the step surface 67g. Is provided.

  As the outer diameter dimension of the floating pin 68A, the fixed end 68Ac is set to be substantially equal to the inner diameter dimension of the support position inner surface 67c, but the flange portion 68Aa and the gas connection portion 68Ab are respectively the flange inner surface 67a and the gas connection position inner surface 38b. On the other hand, the small dimension is set to be small, and the floating pin 68A has a slight play in the radial direction with respect to the movable valve frame portion 60. If tilted, the crushing margin of the seal member 67h will change, so the technical feature is that the tilt is kept to a minimum and slightly displaced in the radial direction. For this reason, there is room for slight inclination and movement with the fixed end 68Ac as the support position in accordance with the external force in the radial direction.

The floating pin 68A is fixed so as to sandwich the movable valve frame 60 in a direction facing the fixing member 68Ae of the fixed end 68Ac and the sealing members 68h and 67j of the sealing surface 68Af and the sealing surface 68Ag. Thus, the floating pin 68A is fixed to the movable valve frame portion 60 so as not to move in the axial direction (the length direction of the through hole 67) while being pressed upward in the drawing.
At the same time, the floating pin 68A is deformed when the seal member 67h is pressed by the seal surface 68Af and the step surface 67f, and the seal member 67j is pressed by the seal surface 68Ag and the step surface 67g. .
As described above, the seal members 67h and 67j, which are O-rings or the like of the floating pin 68A, are pressed and deformed by the step surface 67f and the step surface 67g, so that the gas connection portion 68Ab and the connection position inner surface 67b are sealed. Is done.
Also in the seal members 67h and 67j, the thick seal portion 68f, and the small seal portion 68g of the present embodiment, the leak hole Seal6 is provided on the side close to the low pressure side b of the O-ring groove in which each O-ring is accommodated. be able to.

In the vicinity of the bottom 38 d of the hole 38, an opening that becomes the supply path 41 is provided.
Inside the floating pin 68A, an opening is made in the tip end surface 68d and opened in the center along the axial direction, and an opening is made in the surface of the gas connection portion 68Ab which is positioned opposite to the opening provided in the connection position inner surface 67b. The supply path 41 is provided so that the pressurization space 69a and the air cylinder 80 can be connected.

  In the floating pin 68A of the present embodiment, no seal member is provided between the inner surface 67a that is in the same direction as the sliding surface and the outer periphery of the flange portion 68Aa. Further, no seal member is provided between the gas connection position inner surface 67b and the gas connection portion 68Ab. A sealing member 67j is provided between the sealing surface 68Ag and the step surface 67g between the tip surface 68d serving as the pressing surface and a surface (direction) parallel to the tip surface 68d. In addition, a seal member 67h is provided between the seal surface 68Af (surface perpendicular to the sliding direction) and the step surface 67f. For this reason, even when the floating pin 68A is inclined or when the floating pin 68A is slightly moved in the radial direction, the crushing allowance of the seal members 67h and 67j such as O-rings does not change. Therefore, even when the floating pin 68A moves in this way, that is, when the neutral valve portion 30 and the movable valve frame portion 60 change in relative positions other than in the flow path direction, the pressurized gas connection portion The seal for the supply path 41 near 68 Ab is maintained, and the sealing is not broken.

At the same time, in the present embodiment, even when the thick seal portion 68f and the small seal portion 68g are misaligned in the radial direction with respect to the floating pin 68A due to manufacturing tolerances or the like, the floating pin 68A and the movable valve frame portion 60 Therefore, there is no play in the sliding O-rings of the thick seal portion 68f and the small seal portion 68g. Therefore, even when sliding, the seal between the connection pin 68 and the hole 38 is maintained, and the sealing is not broken.
At the same time, since the deformation does not concentrate on the thick seal portion 68f and the small seal portion 68g even when the position of the floating pin 68A changes, the possibility of deformation / breakage can be reduced, and the sealing maintenance can be more reliably performed. It can be carried out.

  In the above-described embodiment, the structure in which the spring is used as the first urging portion 70 has been described. However, another elastic body may be used.

FIG. 19 is an enlarged view of a main part near the fastening member in the present embodiment.
In FIG. 19, members corresponding to those in the embodiment illustrated in FIGS. 1 to 16 are denoted by the same reference numerals, and description thereof is omitted or simplified.

[Fastening bolt 43 (fastening member)]
As shown in FIG. 19, the fastening bolt 43 (fastening member) includes a screw hole 63 a provided in a fastening screwed portion 63 provided in the movable valve frame portion 60 with a tip portion 43 a provided with a male screw on the outer peripheral surface. It is screwed to. The fastening bolt 43 is provided so that the axis line is in the thickness direction of the movable valve body 40, that is, in the direction parallel to the B1 direction or the B2 direction, which is the moving direction of the movable valve plate portion 50 and the movable valve frame portion 60. ing.

The central portion 43b of the fastening bolt 43 has substantially the same diameter as the tip portion 43a, and penetrates through a through hole 57b provided in the fastening screw portion 63 provided in the movable valve plate portion 50 so as to be movable in the axial direction. . The diameter of the central portion 43b is set to be smaller than the diameter of the through hole 57b so that they do not contact each other even when they move relative to each other in the axial direction.
The proximal end portion 43c of the fastening bolt 43 is a bolt head whose diameter is larger than that of the distal end portion 43a and the central portion 43b, and the contact surface 43d on the distal end portion 43a side is outside the through hole 57b in the opposing fastening portion 57. By abutting against the abutment surface 57d, the flow direction variation position between the fastening bolt 43 and the movable valve plate portion 50 can be regulated.

The fastening bolt 43 is provided with a locking groove 43e at a tip position from a portion where the male screw of the tip portion 43a is screwed, and a retaining ring 43f such as a washer fitted into the locking groove 43e. The (locking member) abuts the outer surface 63f of the screw hole 63a to restrict the movement of the fastening bolt 43 in the axial direction (flow path direction) in the inner direction (the downward direction in the drawing) and rotate the fastening bolt 43. However, it is locked so as not to leave the movable valve frame portion 6 position.
The retaining ring 43f (locking member) is not only simply removed from the fastening bolt 43 (fastening member), but also the fastening bolt 43 is in a state where the fastening of the movable valve plate portion 50 and the movable valve frame portion 60 is released. It is possible to keep the position without loosening. That is, since the locking member 43f needs to stably bear the tightening axial force, an E-type retaining ring, a C-type retaining ring, and a pin type are also applicable. Instead, it can be fixed to a locking hole provided in the radial direction of the fastening bolt 43.

  The fastening bolt 43 has a length in which the retaining ring 43f is in contact with the outer surface 63f, and even when the movable valve portion 40 has the maximum thickness, the contact surface 43d on the distal end portion 43a side is opposed to the fastening portion 57 that faces. Is set to be long enough not to contact the contact surface 57d outside the through hole 57b. Further, when the movable valve portion 40 has the minimum thickness, the contact surface 63g of the fastening screw portion 63 and the fastening screw portion 63 and the contact surface 57g come into contact with each other, so that the movable valve portion 40 Position restriction of the plate part 50 and the movable valve frame part 60 is performed. That is, with respect to the fastening bolt 43 screwed, the movable valve plate portion 50 has a contact surface 57d in the B1 direction until the contact surface 57g contacts the contact surface 63g, and a contact surface 57d in the B2 direction. It can move to a position where it comes into contact with the contact surface 43d.

  Therefore, by rotating the fastening bolt 43 with respect to the screw hole 63a and changing the fastening length, the movement range of the movable valve plate portion 50, that is, the flow path between the movable valve plate portion 50 and the movable valve frame portion 60. The direction position can be regulated. In particular, the fastening bolt is rotated by the air cylinder 80 so that the contact surface 57d contacts the contact surface 43d in a state where the biasing force of the main spring 70 is overcome and the thickness of the movable valve portion 40 is reduced. Thus, even when the driving of the air cylinder 80 is stopped, it is possible to maintain a state in which the thickness of the movable valve portion 40 is reduced. Thus, the neutral valve body 5 can be freely rotated so as not to come into contact with the valve box 10 during maintenance or the like.

  In addition, the fastening bolt 43 overcomes the urging force of the plurality of main springs 70 and stably maintains the state in which the thickness of the movable valve portion 40 is reduced. The fastening bolts 43 are arranged symmetrically with respect to the center position where the plurality of main springs 70 are arranged.

[Rotating shaft 20, casing 14]
As shown in FIGS. 20 and 21, the rotary shaft 20 rotates through the valve box 10 through bearings 16 </ b> A and 16 </ b> B that are fixed to the casing 14 fixed to the valve box 10. Supported as possible. The bearings 16A and 16B are arranged as far apart as possible in the direction of the axis LL of the rotary shaft 20.
The casing 14 is fixed so as to penetrate the valve box 10 in a sealed state, and the rotary shaft 20 is connected to the seal casing 14A and the seal casing 14A through which the rotating shaft 20 penetrates in a sealed manner. A cylindrical casing 14B (414B) that rotatably supports the rotary shaft 20 via bearings 16A and 16B provided on the peripheral side, and a lid casing 14C that closes one end of the cylindrical casing 14B, these are mutually connected. Fixed connection. The lid casing 14C is provided with a lid body 14D that closes an opening through which the rotary shaft 20 can be inserted and removed.

The seal casing 14A is provided with seal portions 14Aa, 14Ab, and 14Ac, and an intermediate atmospheric chamber 14Ad that is an atmospheric pressure space (gap) in order to seal the inside of the valve box 10.
The fluid path rings 17 and 18 are fixed to the inner peripheral surface side of the cylindrical casing 14B so as to slidably contact the outer peripheral surface 20b of the rotary shaft 20 at a position between the bearings 16A and 16B in the axis LL direction. Has been.
A pinion 421 constituting a rotating shaft driving mechanism 300A for driving (rotating) the rotating shaft 20 is fixed to a central position between the fluid path rings 17 and 18 on the outer peripheral surface 20b of the rotating shaft 20. The pinion 421 is housed in an internal space 422h of a casing 414B that can be sealed from the outside. The pinion 421 is reciprocated in the depth direction in FIG. 21 through the pinion 121 (corresponding to the pinion 421 described later). A round bar-like rack member 122 (corresponding to a rack member 422 described later) for rotating the rotary shaft 20 is connected.

[Rotary shaft drive mechanism 300A]
FIG. 22 is a schematic diagram showing a rotating shaft driving mechanism.
The rotary shaft drive mechanism 300A for rotating the rotary shaft 20 includes a pinion 421 fixed to the rotary shaft 20 and a rack member 422 having rack teeth 422a that mesh with the pinion 421. The rotary shaft drive mechanism 300A includes a rotary drive air cylinder 410 for reciprocating the rack member 422. The rack member 422 can linearly reciprocate along the axis (longitudinal direction) C by the rotation drive air cylinder 410.
Further, as specifically described in a fifteenth embodiment described later, the rotation shaft drive mechanism 300A is provided with a limiter switch (rotation operation end detection switch) cdS. This switch is a contact type limiter switch which is provided on one end side 411a of the cylinder body 411 and operates when the piston 412 is in the contracted position Pb.

  As shown in FIGS. 22 and 23, the rack member 422 is connected to a piston 412 having an axis perpendicular to the axis of the rotary shaft 20 and reciprocating. The piston 412 is housed in a cylindrical cylinder body 411 (casing) and constitutes a rotary drive air cylinder 410 (drive means). The rack member 422 connected to the rotational drive air cylinder 410 expands by supplying compressed air (driving gas) to the expansion pressure space 413 on the opposite side to the rack member 422 of the piston 412. The compressed air is compressed by supplying compressed air (driving gas) to the compressed pressure space 422c on the rack member 422 side.

  The rack member 422 is a rack storage space provided inside the casing 414Bb integrated with the casing 414B so as to have a diameter larger than the diameter of the rack member 422 and extend in a direction perpendicular to the rotary shaft 20. 422d, 422g, and 422m (space) are accommodated so as to be movable in the axial direction. Inside the spaces 422d, 422g, and 422m, the rack member 422 is reciprocated by slide bearings 415B and 415C (bearings) provided so as to cover the outer circumferences of two positions that are located on both sides meshing with the pinion 421 in the axial direction. It is supported so that it can move. Each of the bearings 415B and 415C is formed as an outer peripheral surface integrally formed with the casing 414Bb and reduced in diameter so as to have a smaller diameter than the space 422g. The bearings 422B and 422C are rack members 422. It is in close contact with the outer peripheral surface.

  A plurality of rack teeth 422a that mesh with the pinion 421 are provided on one side in the circumferential direction of the outer peripheral surface of the rack member 422 in the axial direction, and the axial direction of the rack member 422 is at a circumferential position different from the rack teeth 422a. On the other hand, a communication groove 416 communicating with the space 422d and the space 422g on both sides of the bearing 415B is provided. As shown in FIG. 24, the communication groove 416 communicates with the spaces 422g and 422m on both sides of the bearing 415C with respect to the axial direction, and the space 422d on both sides of the bearing 422B even when the rack member 422 reciprocates. It is set so that the communication state in the space 422g and the communication state in the space 422g and the space 422m on both sides of the bearing 422C are maintained.

The extension pressure space 413a is connected to a supply source for supplying compressed air for extension from the outside of the rotary drive air cylinder 410 via an extension vent 414 (supply path).
A supply source that supplies compressed air for contraction from the outside of the rotary drive air cylinder 410 is connected to the contracted pressure space 422c. The path includes a reduced pressure space 422c, a space 422d in which the rack member 422 is accommodated, a communication groove 416 at a position corresponding to the reduced diameter bearing 415B, a partial space corresponding to the rack teeth 422a, and between the bearing 415B and the bearing 415C. The space 422g expanded in diameter, the internal space 422h of the casing 414B in which the pinion 421 is accommodated, and the supply path 422j (contracted vent) connected to the internal space 422h and the outside of the casing 414B.

  The rotary shaft 20 supported with respect to the casing 14 by the bearings 16A and 16B (see FIG. 21) is driven by a rack member 422 that reciprocates by a rotary drive air cylinder (rotation drive means), and a pinion that meshes with the rack member 422. Rotate with 421.

  Further, during the contraction operation of the rotary drive air cylinder 410 (drive means) and while the contraction position Pb of the rack member 422 is maintained, the pressurized state is maintained in the following space (cylinder). Specifically, the compression pressure space 422c, the storage space 422d, the space 422g in which the rack member 422 is stored, the communication groove 416 at a position corresponding to the reduced diameter bearing 415B, and the space 422g corresponding to the meshing position of the rack teeth 422a, Regardless of the position of the bearing 415B and the bearing 415C, the spaces 422d, 422g, and 422m having an enlarged diameter, the internal space 422h of the casing 414B in which the pinion 421 is accommodated, and the supply connected to the internal space 422h and the outside of the casing 414B In any of the paths 422j, the pressurized state is maintained.

  The rotary drive air cylinder 410 (cylinder) is integrated with a casing 414B that houses the rotary shaft 20, and is slidable into a cylindrical cylinder body 411 with one end side 411a closed and an internal space 411b of the cylinder body 411. And a piston 412 housed in the housing. The internal space 411b is formed with an extension pressure space 413 that is partitioned by one end side 411a of the cylinder body 411 and one surface side 412a (first surface) of the piston 412 and whose capacity is variable by the movement of the piston 412. The The cylinder body 411 is formed with an extension vent 414 (a vent) that communicates with the extension pressure space 413 and supplies compressed air for driving to the extension pressure space 413 from the outside. For example, a pump may be connected to the vent 414 as a driving pressure air supply source provided outside the slide valve 100B.

  The piston 412 is accommodated in the internal space 411b of the cylinder body 411 so as to be able to reciprocate linearly along the axis (longitudinal direction) C. Such a piston 412 has an extension position Pa (FIG. 22) in which the extension pressure space 413 is expanded to the maximum and the piston 412 is located farthest from the one end side 411a in the internal space 411b of the cylinder body 411, and a rack member of the piston 412. The contracted pressure space 422c on the 422 side is expanded and contracted to the maximum, the expanded pressure space 413 is contracted to the minimum, and the contracted position Pb (FIG. 23) where the piston 412 is located closest to the one end side 411a. It is made slidable.

  A protrusion 412c is formed on one surface side 412a of the piston 412. A concave portion 411c into which the protruding portion 412c enters when the piston 412 is in the contracted position Pb is formed on one end side 411a of the cylinder body 411. The outer diameter of the protrusion 412c and the inner diameter of the recess 411c are substantially equal, and when these slide, the inside of the recess 411c and the tension space 413 are set to be close to an airtight state. One end side of the vent 414 is formed at a position exposed by the recess 411c. Further, the rack member 422 is fixed to the other surface side 412b (second surface) of the piston 412 via a protruding portion 412d (connecting portion) formed in the same manner as the protruding portion 412c. The outer diameter of the connecting portion 412d and the inner diameter of the rack storage space 422d are substantially equal, and when they slide, the inside of the rack storage space 422d and the compressed pressure space 422c are set to be close to an airtight state. ing.

The protrusion 412c of the piston 412 has a cross-sectional area that continuously changes along the reciprocating direction of the piston 412, that is, the axis (longitudinal direction) C, and air in the pressure-stretching space 413 is directed toward the vent hole 414. A buffer groove 418 (condensed buffer groove) for gradually ventilating is formed.
Specifically, as shown in FIGS. 25 and 26, the buffer groove 418 has a cross-sectional area formed from the one surface side 412a of the piston 412 to the one end side 411a of the cylinder body 411, which is formed in the protrusion 412c of the piston 412. Is formed by a groove inclined with respect to the axis (longitudinal direction) C.

In the protrusion 412d of the piston 412, the cross-sectional area continuously changes along the reciprocating direction of the piston 412, that is, along the axis (longitudinal direction) C, and the air in the compressed pressure space 422c gradually moves toward the space 422g. A buffer groove 419 (extension buffer groove) for allowing air to pass through is formed.
Similarly to the buffer groove 418 shown in FIGS. 25A and 26, the buffer groove 419 (extension buffer groove) is formed in the protrusion 412 d of the piston 412 and extends from the one surface side 412 b of the piston 412 to the space 422 d on the rack member 422 side. It consists of a groove inclined with respect to the axis (longitudinal direction) C so that its cross-sectional area widens.

  As shown in FIGS. 22, 23, and 24, the rack member 422 (122) is formed in a round bar shape in which a cross section perpendicular to the axis (longitudinal direction) C forms a circle. Rack teeth 422a are arrayed at a predetermined pitch along the axis (longitudinal direction) C on a part of the peripheral surface of the round bar-shaped rack member 422.

  Sliding bearings 415B and 415C that slidably support the rack member 422 are disposed on both sides of the meshing portion S between the pinion 421 and the rack teeth 422a fixed to the rotary shaft 20, respectively. As shown in FIG. 24, the slide bearings 415B and 415C have a round bar-shaped rack in which an inner peripheral surface 415a having a circular cross section slightly larger than the cross section of the rack member 422 is formed, and the outer periphery contacts the inner peripheral surface 415a. The member 422 is supported so as to be smoothly slidable along the axis (longitudinal direction) C.

  As shown in FIGS. 22 and 24, the communication groove 416 (groove) is formed on the surface (circumferential surface) of the rack member 422 (122) as described above in the direction of the axis C, and the slide bearing 415B and the slide bearing. It is formed so as to extend to both outer side positions with 415C. Also, a boss (not shown) that enters the communication groove 416 is formed in the casing 414B that houses the rack member 422, and the rack member 422 rotates around the axis C by engagement of the communication groove 416 and the boss. It can also be prevented. Thus, the rack member 422 is not twisted around the axis C when reciprocating.

FIG. 27 is an explanatory diagram showing the arrangement positions of the plain bearings 415B and 415C.
The sliding bearings 415B and 415C are formed by the action lines (extension lines) L1 and L2 of the rack member 422 generated at the meshing portion S between the pinion 421 and the rack teeth 422a, and the axis (axis center line) C of the rack member 422. It is preferable to be arranged in a direction away from the meshing portion S rather than the intersection points P1 and P2.

  That is, action points L1 and L2, which are the moving directions of the contact points between the pinion 421 and the rack teeth 422a, which are the two meshing teeth, respectively intersect with the axis (axis centerline) C of the rack member 422 at the intersection P1. , P2, the sliding bearings 415B, 415C are arranged so that the center line Q of the sliding bearings 415B, 415C is outside the intersections P1, P2.

  By setting the arrangement positions of the sliding bearings 415B and 415C as described above, the sliding bearings 415B and 415C do not receive an external force generated by the rotation of the pinion 421, that is, a force moving away from the pinion 421. As a result, the sliding bearings 415B and 415C prevent the stress in the direction perpendicular to the axial center (axial center line) C from being applied at the contact portion with the rack member 422, and reduce the frictional force with the rack member 422. Thus, the rack member 422 can be held so as to be smoothly slidable.

  According to the rotary shaft drive mechanism 300A configured as described above, for example, when the piston 412 is in the contracted position Pb shown in FIG. 23, the rack member 422 fixed to the piston 412 is linked via the pinion 421. The rotating shaft 20 to be rotated (rotated) is rotated in the counterclockwise direction in FIG. 23 to the full extent in the rotation range, and the neutral valve fixed to the rotating shaft 20 at the position of the rotating shaft 20. The movable valve unit 40 is placed in the valve closing position E2 (FIG. 8) of the flow path H through the unit 30.

  On the other hand, when the piston 412 is moved from the contracted position Pb to the extended position Pa shown in FIG. 22, ventilation is performed in the extension pressure space 413 defined by the inner surface of the cylinder body 411 and the one surface side 412a of the piston 412. Driven compressed air is fed from the port 414. Then, the internal pressure of the extension pressure space 413 increases, and the piston 412 moves (slids) along the axis (longitudinal direction) C in a direction away from the one end side 411a of the cylinder body 411, and the pressure space 413 is expanded. At this time, excess air inside the compression pressure space 422c is transferred from the compression pressure space 422c to a space 422d in which the rack member 422 is accommodated, a communication groove 416 at a position corresponding to the bearing 415B, and a partial space corresponding to the rack teeth 422a, It is discharged to the outside through the internal space 422g of the casing 414Bb, the internal space 422h of the casing 414B, and the vent 422j.

  When the piston 412 moves to the extended position Pa in the direction away from the one end side 411a of the cylinder body 411, the rack member 422 fixed to the piston 412 rotates the pinion 421 meshing with the rack teeth 422a in the clockwise direction in FIG. Let As a result, the rotating shaft 20 is also rotated in the clockwise direction, and the movable valve portion 40 is moved by a pendulum motion to the retracted position E1 (FIG. 8) of the flow path H through the neutral valve portion 30 fixed to the rotating shaft 20. To do.

  Furthermore, when the piston 412 is in the extended position Pa shown in FIG. 22 and the movable valve portion 40 is set to the retracted position E1 (FIG. 8) of the flow path H, the contracted position Pb is extended from the extended position Pa (FIG. 22). When the piston 412 is moved to (FIG. 23), the vent 422j is formed in the compressed pressure space 422c defined by the end surface 414Ba side of the casing 414Bb, the inner surface 411b of the cylinder body 411, and the other surface side 412b of the piston 412. Compressed air for driving is fed from. Then, as the internal pressure of the contracted pressure space 422c increases, the piston 412 moves (slids) along the axis (longitudinal direction) C in a direction approaching the one end side 411a of the cylinder body 411, and the pressure space 413 contracts.

At this time, excess air inside the tension space 413 is discharged from the tension space 413 to the outside through the vent 414.
In the contracted pressure space 422c, the internal space 422h in which the pinion 421 is accommodated from the vent 422j, the internal space 422g in which the rack member 422 is accommodated, the communication groove 416 at the position corresponding to the bearing 415B, and the mesh position of the rack teeth 422a Compressed air is supplied through a space 422g and a storage space 422d corresponding to the. At this time, the inside of the communication groove 416 corresponding to the bearing 415C and the space 422d are also in a pressurized state.

  When the piston 412 moves to the contracted position Pb in a direction approaching the one end side 411a of the cylinder body 411, the rack member 422 fixed to the piston 412 moves the pinion 421 engaged with the rack teeth 422a in the counterclockwise direction in FIG. Rotate. As a result, the rotating shaft 20 is also rotated counterclockwise, and the movable valve portion 40 is moved to the valve closing position E2 (FIG. 8) of the flow path H via the neutral valve portion 30 fixed to the rotating shaft 20. Move with.

  In this way, the internal pressures of the expansion pressure space 413 and the compression pressure space 422c in the cylinder body 411 constituting the rotary shaft drive mechanism 300A are varied, and the piston 412 is expanded to the extended position Pa (FIG. 22) and the compressed position Pb (FIG. 23). , The rotary shaft 20 is rotated via the rack member 422 and the pinion 421, and the movable valve unit 40 is retracted from the flow path H with the retracted position E1 and the valve closed position E2 (FIG. 8). Can be moved between.

  In the movement between the extended position Pa and the contracted position Pb of the piston 412 as described above, the movement of the piston 412 to the contracted position Pb is smoothly changed by the buffer groove 418. Similarly, the movement of the piston 412 to the extended position Pa is smoothly changed by the buffer groove 419.

The buffer groove 418 will be described.
When the piston 412 is moved from the extended position Pa to the contracted position Pb, the piston 412 is suddenly stopped due to the rapid contraction of the extension pressure space 413, that is, a large stress is applied to the meshing portion S of the rack member 422 and the pinion 421. So that the movement of the piston 412 to the contracted position Pb is smoothly changed by the buffer groove 418 formed in the projection 412c of the piston 412.

  For example, as shown in FIG. 25, when the compressed air for driving is supplied to the contracted pressure space 422c to increase its internal pressure and the piston 412 is moved toward the contracted position Pb, the protrusion 412c is a recess of the cylinder body 411. If it moves to the position where it enters 411c, the flow of the air that flows into the recess 411c from the pressure expansion space 413 around the projection 412c and is discharged from the vent 414 is blocked. Further, the internal pressure of the extension pressure space 413a spreading around the periphery of the protrusion 412c suddenly increases (the extension pressure space 413a is compressed), and a force acts in a direction in which the moving speed of the piston 412 decreases rapidly.

  However, the air in the extension pressure space 413a is guided to the vent hole 414 through the buffer groove 418 by the buffer groove 418 formed in the protrusion 412c. That is, the extension pressure space 413 a communicates with the vent hole 414 through the buffer groove 418.

  Moreover, since the buffer groove 418 is formed so that the cross-sectional area increases from the one surface side 412a of the piston 412 toward the one end side 411a of the cylinder body 411, the piston 412 is in the contracted position Pb as shown in FIG. The closer to (FIG. 23), the smaller the cross-sectional area of the buffer groove 418, that is, the opening area. As a result, immediately before the piston 412 reaches the contracted position Pb, the flow rate of air from the expansion pressure space 413a to the vent 414 is gradually reduced (decreased), so the decrease in internal pressure of the expansion pressure space 413a gradually decreases. . As a result, the piston 412 can be gently stopped at the contracted position Pb. Therefore, the sudden stop of the piston 412 due to the rapid contraction of the extension pressure space 413 can be prevented, and the engagement portion S (FIG. 47) between the rack member 422 and the pinion 421 can be stopped smoothly without applying a large stress. It becomes possible.

Similarly, the movement of the piston 412 to the extended position Pa is smoothly changed by the buffer groove 419.
When the compressed air for driving is supplied to the extension pressure space 413 to increase its internal pressure and move toward the extension position Pa of the piston 412, the protrusion 412d moves to a position where it enters the space 422d of the casing 414Bb. The flow of air that has flowed into the space 422d from the contracted pressure space 422c around the protrusion 412d and moved to the space 422h side is discharged from the vent 422j. Further, the internal pressure of the contracted pressure space 422c spreading around the periphery of the protrusion 412d suddenly increases (the contracted pressure space 422c is compressed), and a force acts in a direction in which the moving speed of the piston 412 decreases rapidly.

  However, due to the buffer groove 419 formed in the protrusion 412d, the air in the contracted pressure space 422c is guided to the space 422d communicating with the vent 422j through the buffer groove 419. That is, the expansion / contraction pressure space 422 c communicates with the space 422 d through the buffer groove 419.

  Moreover, since the buffer groove 419 is formed so that the cross-sectional area increases from the one surface side 412b of the piston 412 toward the other end side 414Ba of the casing 414Bb, the closer the piston 412 approaches the extended position Pa (FIG. 22). The cross-sectional area of the buffer groove 419, that is, the opening area is reduced. As a result, immediately before the piston 412 reaches the extended position Pa, the flow rate of air from the compressed pressure space 422c to the space 422d is gradually reduced (decreased), so that the decrease in the internal pressure of the compressed pressure space 422c gradually decreases. Thereby, the piston 412 can be gently stopped at the extended position Pa. Therefore, the sudden stop of the piston 412 due to the rapid contraction of the contracted pressure space 422c can be prevented, and the meshing portion S (FIG. 27) between the rack member 422 and the pinion 421 can be stopped smoothly without applying a large stress. It becomes possible.

  In addition to the buffer grooves 418 and 419, the rotational drive air cylinder 410 has a moving speed of the piston 412 immediately before the piston 412 reaches the extended position Pa or immediately after the piston 412 starts to move from the extended position Pa. A control buffer channel 419a for adjustment is provided.

As shown in FIGS. 22, 23, and 45, the control buffer flow path 419 a has one end in a space 422 d that is closed by the protrusion 412 d when the piston 412 is in the extended position Pa (FIG. 22). The other end is a flow path 419a that opens to the other surface side 414Ba (second surface) of the casing 414Bb.
The flow path 419a is provided with a control hole 416b that communicates in the intersecting direction and opens to the outside of the casing 414Bb. Inside the control hole 416b, a control pin 419c capable of closing the flow path 419a is provided. It is provided to be slidable in the extending direction of 419b.

The control buffer flow path 419a controls the flow rate of the air moving between the contracted pressure space 422c and the space 422d, like the buffer groove 419.
In the control buffer channel 419a, as shown in FIG. 45, when the control pin 419c moves inside the control hole 416b, the cross-sectional area of the channel 419a changes depending on the position. As a result, the flow rate of the air moving between the contracted pressure space 422c and the space 422d changes. Therefore, while the control buffer flow path 419a is open to the space 422d and the protrusion 412d enters the space 422d of the casing 414Bb, the opening of the flow path 419a is controlled by the position of the control pin 419c. By adjusting, the moving speed of the piston 412 can be controlled.

When the control pin 419c is removed to increase the cross-sectional area of the flow path 419a, the moving speed of the rack member 422, that is, the moving speed of the pendulum movement of the movable valve body 40 increases. When the control pin 419c is inserted to reduce the cross-sectional area of the flow path 419a, the moving speed of the rack member 422, that is, the moving speed of the pendulum movement of the movable valve body 40 is reduced.
In particular, not only immediately before the piston 412 arrives at the extended position Pa, but also when the piston 412 starts to move from the extended position Pa to the contracted position Pb, that is, the movable valve portion 40 is at the retracted position E1 (FIG. 8) of the flow path H. Such an air damper effect is also obtained when the movement starts with a pendulum motion. Accordingly, it is possible to smoothly start and stop the operation without suddenly applying a large stress to the meshing portion S (FIG. 27) between the rack member 422 and the pinion 421.

  With such a cylinder 410, the neutral valve body 5 can be swung by performing expansion and contraction of the cylinder 410 simply by switching the supply of compressed air between the expansion vent 414 and the contraction vent 422j. .

[Fluid path ring 17 and fluid path ring 18]
As shown in FIGS. 20, 21, 28, and 29, the fluid path ring 17 and the fluid path ring 18 have substantially the same inner diameter as the rotary shaft 20, and are located closer to the valve box 10 than the pinion 121. 17 is set to be larger than the outer diameter of the bearing 16A and smaller than the outer diameter dimension of the pinion 421 (121), and the outer diameter of the fluid path ring 18 closer to the lid body 14D than the pinion 421 is the diameter dimension of the pinion 421. Is set larger than. When the rotating shaft 20 supported by the bearings 16A and 16B rotates, the contact position with respect to the fluid path ring 17 and the fluid path ring 18 changes in the circumferential direction.

  The fluid path ring 17 is a part of a supply path 41 for supplying a driving gas to an air cylinder 80 formed between the movable valve plate part 50 and the movable valve frame part 60 in the second peripheral region 40a. As the fluid path, a radial ring path 17c extending in the radial direction and opening to the outer peripheral surface 17a and the inner peripheral surface 17b is provided. The outer peripheral surface 17a side of the radial ring path 17c communicates with a path 14Bc penetrating in the radial direction of the cylindrical casing 14B.

  The fluid path ring 18 includes a second seal 51a, a second seal 51a in a double seal portion provided in an air cylinder 80 formed between the movable valve plate portion 50 and the movable valve frame portion 60 in the second peripheral region 40a. 52a is connected to an intermediate atmospheric chamber 55 provided on the gas supply side, and is part of a communication path 42 that allows the driving gas to escape to the outside of the slide valve 100B when the first seals 51b and 52b are broken. As a fluid path, a radial ring path 18c extending in the radial direction and opening to the outer peripheral surface 18a and the inner peripheral surface 18b is provided. The outer peripheral surface 18a side of the radial ring path 18c communicates with a path 14Cc penetrating in the radial direction of the cylindrical casing 14B.

In the fluid path ring 17, a groove 17 d is provided around the inner peripheral surface 17 b, and the fluid path ring 17 is surrounded by the outer peripheral surface 20 b of the rotary shaft 20, thereby forming a circumferential path.
On the outer peripheral surface 20b of the rotary shaft 20 that is positioned to face the groove 17d, a radial axial path 27 opens, and the radial axial path 27 extends in the direction of the axis LL of the rotary shaft 20 and rotates. The shaft 20 communicates with an axial path 125 in the axial direction that opens to one end surface 20 a of the shaft 20.

In the fluid path ring 18, a groove 18 d is provided around the inner peripheral surface 18 b, and the fluid path ring 18 is surrounded by the outer peripheral surface 20 b of the rotary shaft 20 to form a circumferential path.
On the outer peripheral surface 20b of the rotary shaft 20 that is positioned opposite to the groove 18d, a radial axial path 28 opens, and the radial axial path 28 rotates in the direction of the axis LL of the rotary shaft 20 and rotates. The shaft 20 communicates with an axial passage 126 in the axial direction that opens at one end surface 20 a of the shaft 20.
The axial in-axis path 125 and the axial in-axis path 126 are parallel to each other and parallel to the axis LL, and the other end 20c side of the rotating shaft 20 on the lid 14D side is closed.
The axial in-axis path 125 and the axial in-axis path 126 are both connected to the supply path 41 and the communication path 42 inside the neutral valve section 30.

The fluid path ring 17 includes a seal member 17h such as an O-ring that slidably seals the opening portion of the radial axial path 27 and the groove 17d between the inner peripheral face 17b and the outer peripheral face 20b of the rotary shaft 20. 17j and 17k are provided around.
The fluid path ring 17 is provided with sealing members 17e, 17f, and 17g such as O-rings that seal the opening of the radial ring path 17c and the path 14Bc between the outer peripheral surface 17a and the inner surface of the cylindrical casing 14B. .

The fluid path ring 18 includes a sealing member 18h such as an O-ring that slidably seals the opening portion of the radial axial path 27 and the groove 18d between the inner peripheral face 18b and the outer peripheral face 20b of the rotary shaft 20. 18j and 18k are provided around.
The fluid path ring 18 is provided with sealing members 18e, 18f, and 18g such as O-rings that seal the opening of the radial ring path 18c and the path 14Cc between the outer peripheral surface 18a and the inner surface of the cylindrical casing 14B. .

As shown in FIG. 20, FIG. 21, FIG. 28, and FIG. 29, the fluid path ring 17 and the fluid path ring 18 are provided with grooves 17d and 18d serving as circumferential paths, so that any rotation is possible. Even when the shaft 20 is in the rotational position, it is possible to maintain a state in which the radial axial path 27 and the radial axial path 28 communicate with each other. Can do. In addition, since the supply path 41 and the connection path 42 are independently connected to each other, two systems having different pressure states or different gas states are provided inside the valve body 10 regardless of the rotational position of the rotary shaft 20. It becomes possible to control without affecting.
At the same time, since the grooves 17d and 18d serving as the circumferential path are provided around, the pressure from the fluid in the grooves 17d and 18d acts so as to make a round on the outer peripheral surface 20b of the rotating shaft 20, and thus acts in the radial direction. Since the pressure to be applied can be made uniform over the entire circumference, it is possible to prevent the bearing 16A and the bearing 16B from affecting the support state of the rotary shaft 20 regardless of the pressure state in these flow paths.

At the same time, the fluid path ring 17 and the fluid path ring 18 are positioned between the bearing 16A and the bearing 16B, and the distance between the bearing 16A and the bearing 16B supporting the rotating shaft can be ensured as long as possible. . As a result, when the bearing 16A and the bearing 16B hold a moment that acts on the rotating shaft in the direction in which the rotating shaft 20 is inclined, the radial load received by the bearing 16A and the bearing 16B can be minimized, and thereby these bearings can be minimized. The durability of 16A and bearing 16B can be improved. Alternatively, the axial length of the rotating shaft 20 can be ensured while maintaining the necessary deformation preventing ability in the tilting direction of the rotating shaft 20, and the drive means of the rotating shaft 20 can be downsized to reduce the size of the valve. Can be planned.
Further, by setting the outer diameter dimensions of the bearing 16A and the bearing 16B, the fluid path ring 17, the pinion 121, and the fluid path ring 18 as described above, only by changing the assembly direction of the parts without changing the configuration of the parts, These can be assembled to the casing 14 by reversing the mounting surface of the rotation mechanism portion with respect to the valve box.

  In the present embodiment, compressed air used for driving the air cylinder 80 is supplied to the neutral valve body 5 via the inside of the rotary shaft 20 without being exposed (exposed) to the hollow portion 11 inside the valve box 10, and will be described later. It is possible to communicate the communication path 42 to the intermediate atmospheric chambers 55 and 56 to the outside of the valve box 10 via the inside of the rotary shaft 20.

  The rotating shaft 20 of the present embodiment is provided with axial paths 125 and 126 that are the supply path 41 and the communication path 42 in parallel. Furthermore, the fluid path ring 17 and the fluid path ring 18 corresponding to the supply path 41 and the communication path 42 are provided at different positions in the axis LL direction of the rotary shaft 20. With this configuration, the plurality of paths 125 and 126 can be individually and individually communicated with each other through the inside of the single rotation shaft 20. For this reason, it becomes possible to arrange | position the supply path 41 of the driving fluid of the air cylinder 80, and the communication path 42 for safety intermediate | middle atmosphere by only one rotating shaft 20, without using another structure.

  The fluid path rings 17 and 18 corresponding to the supply path 41 and the communication path 42 in the present embodiment are arranged symmetrically with respect to the intermediate position in the axial direction of the bearings 16A and 16B, thereby applying a load to the bearings 16A and 16B. The durability of the bearings 16A and 16B can be improved by making them substantially equal, and the maintenance cost of the slide valve 100B can be reduced.

  In the present embodiment, as shown in FIGS. 20, 21, 28, and 29, grooves 17d and 18d are formed as circumferential paths in the inner surfaces 17b and 18b of the fluid path ring 17 and the fluid path ring 18, respectively. However, as shown in FIG. 30, the grooves 122 and 23 can be formed on the outer peripheral surface 20 b of the rotating shaft 20. Alternatively, grooves can be formed on both the inner surfaces 17 b and 18 b of the fluid path ring 17 and the fluid path ring 18 and the outer peripheral surface 20 b of the rotating shaft 20.

  In this embodiment, as shown in FIGS. 28 and 29, grooves 17d and 18d are provided on the entire circumference of the rotary shaft 20 as circumferential paths. However, the neutral paths indicated by arrows A1 and A2 in FIG. Only a necessary portion corresponding to the rotation range of the valve body 5, that is, as shown in FIG. 31, an arc-shaped groove is formed in a portion corresponding to the circumferential arc range A1A2 corresponding to the rotation range required for the rotary shaft 20. 17d and 18d can also be formed. In this example, the groove 17d is provided in an arc shape in the movement range A1A2 of the radial axial path 27 with respect to the radial ring path 18c, and the groove 17d is substantially the same as the central angle range in which the neutral valve body 5 operates. Equal center angle range. In addition to the movement range A1A2 of the radial axial path 28 with respect to the radial ring path 18c, the groove 18d is also provided in the connection portion A1A2a with respect to the radial ring path 18c.

On the inner peripheral surface 17b of the fluid path ring 17, a groove 17d communicating with the radial ring path 17c is provided between the seal member 17h and the seal member 17j, and between the seal member 17j and the seal member 17k. A groove 17p is provided around.
The outer peripheral surface 20b of the rotary shaft 20 facing the groove 17p forms a second intermediate atmospheric chamber that is an atmospheric pressure space (gap) and is connected to the outside of the casing by the second communication passage 42A.

  The seal member 17j and the seal member 17k function as a double seal portion for the groove 17d serving as the supply path 41 where the driving gas exists. For this reason, even when the seal member 17j which is the first seal in the rotary shaft 20 is torn during the pressurization of the air cylinder 80, the compressed air (driving gas) is passed through the groove 17p and the second communication passage 42A. To escape outside the casing 14. As a result, the pressure state changes between the groove 17d and the internal space 122h, such as compressed air being discharged from the groove 17d side of the fluid path ring 17 into the internal space 122h on the pinion 121 side in the casing 14B. It is designed to prevent this problem.

  At the same time, the seal member 17k and the seal member 17j function as a double seal portion for the internal space 122h that is a pressurizing space in the rotation drive air cylinder (drive means) of the rotation shaft 20. For this reason, even when the seal member 17k which is the first seal in the rotary shaft 20 is torn during the contraction of the rotary drive air cylinder, the compressed air (drive gas) is passed through the groove 17p and the second communication passage 42A. To escape outside the casing 14. This prevents a problem that the pressure state changes between the groove 17d and the internal space 122h, such as compressed air being discharged from the internal space 122h side into the groove 17d serving as the supply path 41 in the casing 14B. It is supposed to be.

The groove 17d and the internal space 122h are both pressurized spaces, but when the pressure state corresponding to a predetermined operation changes due to the tearing of the seal portion, the thickness of the neutral valve body 5 suddenly expands. It is possible to prevent an unexpected operation such that the neutral valve body 5 rotates.
That is, the seal member 17k, the seal member 17j, the groove 17p, and the second communication passage 42A can prevent the slide valve 100B from being damaged due to a seal breakage.

On the inner peripheral surface 18b of the fluid path ring 18, a groove 18d communicating with the radial ring path 18c is provided between the seal member 18k and the seal member 18j, and between the seal member 18j and the seal member 18h. A groove 18p is provided around.
The outer peripheral surface 20b of the rotary shaft 20 facing the groove 18p forms a second intermediate atmospheric chamber that is an atmospheric pressure space (gap) and is connected to the outside of the casing by a second communication passage 42A.

  The seal member 18j and the seal member 18h function as a double seal portion for the internal space 122h (422h) serving as a pressurizing space in the rotation drive air cylinder (drive means) of the rotary shaft 20. Even when the seal member 18h which is the first seal in the rotary shaft 20 is broken during the contraction of the rotary drive air cylinder, the compressed air (drive gas) is supplied to the casing 14 via the groove 18p and the second communication passage 42A. Escape outside. As a result, there is a problem that the pressure state changes between the groove 18d and the internal space 122h, such as compressed air being discharged from the internal space 122h side into the groove 18d serving as the communication path 42 in the casing 14B. It comes to prevent.

Thereby, the internal space 422h is a pressurizing space, and when the pressure state corresponding to the predetermined operation is changed due to the tearing of the seal portion, an unexpected operation such as the rotation of the neutral valve body 5 occurs. To prevent that.
That is, it is possible to prevent the slide valve 100 from being damaged due to the seal breakage by the seal member 18h, the seal member 18j, the groove 18p, and the second communication path 42A.

Further, as shown in FIG. 32, the groove 17d and the groove 18d are provided with a tapered surface 17m and a tapered surface 18m at the opening position on the outer peripheral surface 20b side of the rotating shaft 20, and the diameter thereof is increased.
The tapered surfaces 17m and 18m have a depth dimension Tt1 in the radial direction of the fluid path rings 17 and 18, and the depth dimension Tt1 is such that the seal members 17h, 17j, 17k, 18h, 18j, and 18k are O-rings. In this case, the O-ring is larger than the height dimension Tt2 protruding from the outer peripheral surface 20b of the rotating shaft 20 in a state where the rotating shaft 20 is not in contact with the fluid path rings 17 and 18 instead of the crushing allowance at the time of sealing. Is set to be

Further, the taper surfaces 17m and 18m are set so that the angle θ formed with the radial normal line of the fluid path rings 17 and 18 is 45 ° or more, preferably 30 ° or more.
Thereby, at the time of assembling | attaching the rotating shaft 20 to the casing 14, problems, such as an O-ring being caught in the opening part of the groove | channels 17d and 18d and being damaged, can be prevented.
The tapered surfaces 17m and 18m are not limited to this shape as long as the O-ring can be damaged.

Furthermore, curved surfaces with rounded corners can be formed at the opening positions on the outer peripheral surface 20b side of the rotating shaft 20 of the grooves 17d and 18d, instead of the tapered surfaces 17m and 18m.
Similarly, the depth dimension Tt1 of the curved surface can be set to be larger than the height dimension Tt2 where the O-ring protrudes from the outer peripheral surface 20b of the rotating shaft 20.

  A leak passage 14He extending in the radial direction is provided on the seal casing 14A side of the cylindrical casing 14B (414B). As shown in FIG. 21, the leak flow path 14He is in communication with a leak space 122He that is closer to the seal casing 14A than the bearing 16A and is in contact with the surface 20b of the rotary shaft 20.

  An axial leak channel 27He is provided inside the rotary shaft 20 in contact with the leak space 122He. One end of the axial leak channel 27He is open to the leak space 122He as shown in FIGS. As will be described later, the other end of the axial leakage flow path 27He penetrates the rotation shaft 20 in the axial direction through the center of the rotation shaft 20, as shown in FIG. 21 and FIG. 30 is opened toward a through hole 121A through which a male screw 121 (fastener) for fastening the screw 30 is passed.

The through hole 121A is provided in the opening 98 of the connecting member 91 and the neutral valve portion 30, and communicates with a space 31He having a female screw 31 (fastener) into which the male screw 121 is screwed.
As will be described later, as shown in FIG. 16, the male screw 121 passes through an opening 98 without a thread groove up to a space 31He where the female screw 31 is fastened. The space 31He is closed on the groove 95B side by a closing member (not shown).

The air reservoir space 31He of the neutral valve section 30 needs to be subjected to a helium leak test for checking whether the sealing by an O-ring (not shown) or the like on the groove 95B side is broken. For this reason, the air reservoir space 31He communicates with the leak space 122He via the opening 98, the through hole 121A, the axial leak channel 27He, the leak space 122He, and the leak channel 14He. From here, the air reservoir space 31He, Helium can be supplied for a helium leak test for inspecting the sealing state of the opening 98 and the through hole 121A.
Thus, by providing the axial leak channel 27He and the leak channel 14He, it is possible to perform a helium leak test on the air reservoir space 31He, the opening 98, and the through hole 121A.

  At the same time, the hollow portion 11 from the leak passage 14He to the sealing portions 14Aa, 14Ab, 14Ac as sealing means along the surface 20b of the rotating shaft 20 and the intermediate atmospheric chamber 14Ad which is an atmospheric pressure space (gap). It is possible to perform a seal test on In other words, the helium leak test can be performed by supplying helium from the leak channel 14He to the leak space 122He side and checking the leak to the hollow portion 11.

  Furthermore, the leakage flow path 14He is sealed by the seal members 17h, 17j, 17k, the seal members 17e, 17f, 17g, etc., and the internal space 122h, the radial ring path 17c, the groove 17d, and the like, which are pressurization spaces, etc. Thus, when the compressed air leaks into the leak space 122He, the compressed air can be released to the outside. Thereby, it can prevent that pressure is added to seal part 14Aa, 14Ab, and 14Ac, and it can prevent that the leaked compressed air flows into the hollow part 11. FIG.

[Connection pin portion 69, floating pin 68A, supply path 41]
The connection pin portion 69 of the present embodiment is provided as a supply path 41 as shown in FIG.

[Connection pin portion 69, floating pin 68B, communication path 42]
As the connection pin portion 69 of the present embodiment, the floating pin 68B provided as the communication path 42 has a configuration substantially similar to the floating pin 68A shown in FIG. 11 on the movable valve frame portion 60 side as shown in FIG. Therefore, the same reference numerals are given to corresponding components, or the reference numerals 68A are replaced with 68B, and the description thereof is omitted.
The floating pin 68B has a shorter neutral valve portion 30 side. For this reason, the space 69Ba serving as the intermediate atmosphere chamber is not pressurized, and the open communication path 42 forms an end face 68Bd at a position corresponding to the step 68c. Moreover, since it is not a pressurization state, the double seal is not employ | adopted. As shown in FIG. 8, the floating pin 68 </ b> B that is a part of the communication path 42 and the floating pin 68 </ b> A that is a part of the supply path 41 are provided at different positions in the plane of the neutral valve body 5. . As described above, the communication path 42 and the supply path 41 are provided in the neutral valve portion 30 and the movable valve frame portion 60 in parallel so as to be in a parallel position in the rotary shaft 20.

  Inside the floating pin 68B, an opening is formed in the tip end surface 68Bd and opened in the center along the axial direction, and an opening is formed in the surface of the gas connection portion 68Bb which is positioned opposite to the opening provided in the connection position inner surface 67b. The communication path 42 is provided so that the intermediate atmospheric space 69Ba and the intermediate atmospheric chambers 55 and 56 can be connected. Even when the neutral valve portion 30 and the movable valve frame portion 60 change relative positions other than in the flow path direction, the floating pin 68A maintains the seal with respect to the supply path 41 near the pressurized gas connection portion 68Ab. The floating pin 68B maintains a seal with respect to the communication path 42 in the same manner as the sealing is not broken, and the sealing is not broken.

[Guide pin 62]
As shown in FIG. 34, the guide pin 62 has an opening that communicates with the tip and an internal space 62a formed on the movable valve frame 60 side, and an axial path 62b that penetrates the guide pin 62 is provided. The base side is connected to the communication path 42. Further, the cylindrical internal space 62 a is communicated with intermediate atmospheric chambers 55 and 56 located on the center side of the guide pin 62 via a path 42 a directed radially inward and outward of the neutral valve portion 5. A seal member 62c such as an O-ring is provided on the distal end side of the guide pin 62, which is the movable valve plate 50 side, to seal the sliding surface with the hole 50h.

(Third embodiment)
Next, the rotating shaft drive mechanism 300B in the third embodiment of the present invention will be described.
Hereinafter, in the slide valve of this embodiment, the same number is attached | subjected to the structure similar to each embodiment mentioned above.
FIG. 35 is a plan view showing the configuration of the slide valve in the present embodiment. FIG. 36 is a cross-sectional view showing the configuration of the rotary shaft drive mechanism 300B in this embodiment, and shows a state when the rotary drive air cylinder (cylinder) is in the extended position. FIG. 37 is a cross-sectional view showing the configuration of the rotary shaft drive mechanism 300B, and shows a state when the cylinder is in the contracted position. FIG. 38 is a cross-sectional view showing the configuration of the rotary shaft drive mechanism 300B, and shows a state when the cylinder is in the extended position. FIG. 39 is a cross-sectional view showing a configuration of the rotary shaft drive mechanism 300B, and shows a state when the cylinder is at an intermediate position.
In the present embodiment, components and members corresponding to those in the embodiment shown in FIGS. 1 to 34 are denoted by the same reference numerals, and the description thereof is omitted or simplified. The pinion 421 and the rotary shaft 20 side are illustrated. Is omitted.

In the present embodiment, there is one piston 412 accommodated in the internal space 411b of the cylinder body 411, and two positions of the extended position Pa and the contracted position Pb are set as the stop positions of the piston 412 (see FIG. 22, see FIG.
On the other hand, in the embodiment described below, two pistons 521a and 521b are accommodated in series in the first internal space 511b and the second internal space 511c of the cylinder body 511, respectively. The two pistons 521a and 521b are set at three stop positions, that is, extended positions Pa1 and Pa2, contracted positions Pb1 and Pb2, and intermediate positions Pc1 and Pc2.

By setting three stop positions for these two pistons 521a and 521b, the movable valve portion 40 of the slide valve in the present embodiment shown in FIG. 35 can be stopped at the three stop positions in the movable valve portion. . Specifically, the three stop positions are a retracted position E1 that is located in the hollow portion 11 where the flow path H is not provided, a valve closing position E2 of the flow path H that is a position corresponding to the first opening 12a, and This is a half-open position E3 that is between the retreat position E1 and the valve close position E2 and covers (shields) about half of the opening area of the flow path H. The state of the half-open position E3 can be adjusted.
Other configurations are the same as those in the second embodiment. Hereinafter, the configuration and operation will be described focusing on the cylinder 510 constituting the rotary shaft drive mechanism 300B.

The rotating shaft drive mechanism 300B for rotating the rotating shaft 20 includes a pinion 421 fixed to the rotating shaft 20 and a rack member 422 provided with rack teeth 422a meshing with the pinion 421, which are the casing 14. Sealed inside the other.
The rotary shaft drive mechanism 300B includes a cylinder 510 for reciprocating the rack member 422. The rack member 422 can linearly reciprocate along the axis (longitudinal direction) C by the cylinder 510.

The rotary drive air cylinder 510 (cylinder) is integrated with a casing 414B that houses the rotary shaft 20, and has a substantially cylindrical cylinder body 511 that is closed at one end side 511a.
Inside the cylinder main body 511, a first internal space 511b and a second internal space 511c that are partitioned from each other by an intermediate partition wall 523 are partitioned.
Moreover, the 1st piston 521 slidably accommodated in the first internal space 511b and the second piston 522 slidably accommodated in the second internal space 511c are provided. A stop position setting pressure space 524 (first pressure space) that is partitioned by the cylinder body 511 and the one surface 521a (first surface) of the first piston 521 and whose capacity is variable by the movement of the first piston 521 is defined. It is formed. Further, the second partition 525 of the cylinder main body 511 and the one side 522a (first surface) 522a (first surface) of the second piston 522, the capacity of which is variable by the movement of the second piston 522, and the casing 414Bb A second contracted pressure space 422c that is partitioned by the other surface side 414Ba and the second piston 522 and whose capacity is variable by the movement of the second piston 522 is formed.

The cylinder body 511 communicates with the first pressure space 524, sends air from the outside to the first pressure space 524, or discharges air from the first pressure space 524 to the outside. The first piston 521 communicates with a displacement variable space 523A opposite to the first pressure space 524 whose displacement is variable, and exchanges air inside the displacement variable space 523A with the outside according to the movement of the first piston 521. A communication hole 523b is formed.
Further, the cylinder body 511 communicates with the second pressure space 525, sends air from the outside to the second pressure space 525, or discharges air from the second pressure space 525 to the outside. Is formed. In the casing 414B, the second contracted pressure space 422c is provided with a contracted vent 422j that communicates with the space 422d (see FIGS. 22 and 23), the space 422g, and the space 422h, and sends or discharges pressurized air from the outside. It is done. (See FIGS. 22 and 23)
These extended vents 526 and 527 and the contracted vent 422j may be connected to a pressurized air supply source such as a pump, for example.

  The first piston 521 is formed with a hollow protrusion 531 whose central portion extends from the one surface side 521a toward the second pressure space 525. The intermediate partition wall 523 is formed with a through hole 523a through which the protruding portion 531 is slidably penetrated. The projecting portion 531 has a narrowed portion 531a on one surface side 521a of the first piston 521, and has an opening width narrower than a hollow portion spreading toward the intermediate partition wall 523 side. When the first piston 521 is positioned at one end 511a of the cylinder body 511, the protrusion 531 has a through hole 523a corresponding to the recess 411c in the eleventh embodiment with respect to the second piston 522 side. Thus, the length dimension C in the axial direction is set. In addition, an O-ring 523c is provided around the inner surface of the through hole 523a as a sealing means that enables the protruding portion 531 to slide in a sealed state on the variable capacity space 523A side.

A first piston restricting member 535 including a long screw 532, a rotary knob 533, and a nut 534 screwed into one end of the long screw 532 is rotatably provided on one end side 511 a of the cylinder body 511. .
Among these, one end side of the long screw 532 passes through the narrowed portion 531 a in the protruding portion 531 of the first piston 521, and the nut 534 is fastened to the hollow portion of the protruding portion 531. The outer diameter of the nut 534 is larger than the opening width of the narrowed portion 531a. Further, when the nut 534 rotates the long screw 532, the nut 534 does not rotate and the screw 532 is rotated by the inner surface of the hollow portion of the protruding portion 531 so that the screwing position to the long screw 532 changes in the axial direction. Movement is regulated.

On the other hand, a protrusion 522b is formed on one surface 522a of the second piston 522.
And as this projection part 522b can obtain the effect | action similar to the projection part 412c in 2nd Embodiment, as shown in FIG. 36, the outer diameter of the projection part 522b and the internal diameter of the through-hole 523a are substantially equal, These Is slid, the inside of the recess formed by the tip of the protruding portion 531 and the through hole 523a and the tension space 525 are set to be close to an airtight state. At the same time, an air cushion packing 523d is provided on the inner surface of the through-hole 523a on the side of the pressure increasing space 525 so as to maintain airtightness between the protrusion 522b and the inside of the through-hole 523a. At the same time, the reciprocating direction of the piston 521, that is, the cross-sectional area continuously changes along the axis (longitudinal direction) C, and the air inside the through-hole 523a gradually enters the tension space 525. A buffer groove 518 for venting toward the air is provided in the same manner as the buffer groove 418 (contracted buffer groove) in the second embodiment.

A buffer material 536 is formed at one end of the protrusion 522b. The first piston 521 and the second piston 522 come into contact with the outer surface (bottom surface) of the protruding portion 531 on the second piston 522 side and the protrusion 522b. The first piston 521 and the second piston 522 come into contact with each other. The buffer material 536 may be made of, for example, an elastic material such as rubber or gel, or a porous material such as sponge.
In this case, the rack member 422 is fixed to the other surface side 522c (second surface) of the second piston 522 via the protrusion 522d (connection portion).

  The first piston 521 is accommodated in the first internal space 511b of the cylinder body 511 so as to be linearly reciprocable along the axis (longitudinal direction) C. In the first piston 521, the position where the first pressure space 524 is expanded to the maximum and is farthest from the one end side 521a in the first internal space 511b, that is, the other surface side 521b (second surface) of the first piston 521. The extended position Pa1 (FIG. 36) at a position in contact with the intermediate partition wall 523, the contracted position Pb1 (FIG. 37) at which the first internal space 511b is reduced to the minimum and closest to the one end side 511a, Three stop positions, an intermediate position Pc1 (FIG. 39) in the vicinity of the intermediate position between the extended position Pa1 and the contracted position Pb1, are set.

  The first piston 521 can be adjusted at the stop position at the intermediate position Pc1 (FIG. 39) by the first piston restricting member 535. That is, by rotating the rotation knob 533 of the first piston restricting member 535, the positions of the nut 534 and the long screw 532, which are prevented from rotating in contact with the inner surface of the protrusion 531, are changed.

  Accordingly, for example, when the fastening position of the nut 534 with respect to the long screw 532 is set to the position close to the one end side 511a of the cylinder body 511, when the first piston 521 is moved toward the extended position Pa1, the nut 531 534 abuts, and the first piston 521 can no longer move toward the intermediate partition 523. Accordingly, it is possible to adjust the stop position at the intermediate position Pc1 of the first piston 521, that is, to adjust the stop position at the half-open position (E3) of the movable valve portion 40 connected via the rotary shaft 20.

The second piston 522 is accommodated in the second internal space 511c of the cylinder body 511 so as to be linearly reciprocable along the axis (longitudinal direction) C. The position at which the second piston 522 stops is set to three positions (stop positions), ie, an extended position Pa2 (FIG. 36), a contracted position Pb2 (FIG. 37), and an intermediate position Pc2 (FIG. 38). Here, the extended position Pa2 is a position farthest from the intermediate partition wall 523 in the second internal space 511c where the second pressure space 525 is expanded to the maximum. The contracted position Pb2 is a position where the second internal space 511c is contracted to the minimum and the one surface side 522a of the second piston 522 is close to or in contact with the intermediate partition 523. The intermediate position Pc2 is near the middle between the extended position Pa2 and the contracted position Pb2, and is set by the intermediate position Pc1 of the first piston 521.
In the protrusion 522d of the second piston 522, the cross-sectional area continuously changes along the reciprocating direction of the second piston 522, that is, along the axis (longitudinal direction) C, and the air in the compressed pressure space 422c is transferred to the space 422g. A buffer groove 519 (extension buffer groove) for gradually venting toward the bottom is formed in the same manner as the buffer groove 419 of the eleventh embodiment.

The rack member 422 is formed in a round bar shape in which a cross section perpendicular to the axis (longitudinal direction) C forms a circle. Rack teeth 422a are arrayed at a predetermined pitch along the axis (longitudinal direction) C on a part of the peripheral surface of the round bar-shaped rack member 422. Sliding bearings 415B and 415C that slidably support the rack member 422 are disposed on both sides of the meshing portion S between the pinion 421 and the rack teeth 422a fixed to the rotary shaft 20, respectively. (See FIGS. 22 and 23)
Further, the rotation shaft drive mechanism 300B is provided with a limiter switch (rotation operation end detection switch) cdS. This switch is a contact-type limiter switch that is provided on the intermediate partition wall 523 of the cylinder body 511 and operates when the second piston 522 is in the contracted position Pb2.

The operation of the slide valve provided with the rotary shaft drive mechanism 300B having the above configuration will be described.
For example, as an initial state, when the first piston 521 and the second piston 522 are present at the contracted positions Pb1 and Pb2 shown in FIG. 37, respectively, the rack member 422 fixed to the second piston 522 is connected via the pinion 421. The interlocking (rotating) rotating shaft 20 is rotated counterclockwise in the same manner as in FIG. 23, and at the position of the rotating shaft 20, the neutral valve portion 30 fixed to the rotating shaft 20 is interposed. The movable valve unit 40 is placed in the valve closing position E2 (FIG. 35) of the flow path H.

  Here, as an initial state of the first piston restricting member 535, as shown in FIG. 36 and FIG. 37, the rotation knob 533 is turned, and the constricted portion 531a is moved to the nut 534 in the first piston 521 which is in the contracted position Pb1. The positions of the nut 534 and the long screw 532 are adjusted so that the contracted position Pb3 is in contact. (Case1,2)

  With the initial state of the first piston regulating member 535 set to the contracted position Pb3 and the final state, the second piston 522 is moved from the contracted position Pb2 to the extended position Pa2 shown in FIG. When moving to the retracted position E1 (FIG. 35), compressed air is supplied from the vent 527 into the second pressure space 525, and exhaust is possible without supplying compressed air to the vent 422j. Then, while the internal pressure of the second pressure space 525 increases and the pressure of the contracted pressure space 422c decreases, the second piston 522 moves away from the one end side 511a of the cylinder body 511 along the axis line (longitudinal direction) C. The internal volume of the second pressure space 525 expands and the internal volume of the contracted pressure space 422c contracts.

  When the second piston 522 moves away from the one end side 511a of the cylinder body 511, the rack member 422 fixed to the second piston 522 causes the pinion 421 engaged with the rack teeth 422a to move clockwise in FIG. Rotate. As a result, the rotating shaft 20 is also rotated in the clockwise direction, and the movable valve portion 40 is moved to the retracted position E1 (FIG. 35) of the flow path H by a pendulum movement via the neutral valve portion 30 fixed to the rotating shaft 20. To do.

Next, as an initial state of the first piston restricting member 535, as shown in FIG. 38, the rotating knob 533 is turned to extend the narrowed portion 531a in contact with the nut 534 in the first piston 521 at the extended position Pa1. The positions of the nut 534 and the long screw 532 are adjusted so that the position Pa3 is obtained. (Cases 3-6)
Further, as an initial state, the first pressure space 524 can be exhausted without supplying compressed air from the vent 526, and the second pressure space 525 can be exhausted without supplying compressed air from the vent 527. 422j is supplied with compressed air. Accordingly, the first piston 521 and the second piston 522 are positioned at the contracted positions Pb1 and Pb2 shown in FIG.

  With the initial state of the first piston restricting member 535 set to the extended position Pa3, the second piston 522 is moved from the contracted position Pb2 in the initial state to the extended position Pa2 shown in FIG. When moving to the retracted position E1 (FIG. 51) of the path H, compressed air is supplied from the vent 527 into the second pressure space 525, and exhaust is possible without supplying compressed air to the vent 422j. . Then, while the internal pressure of the second pressure space 525 increases and the pressure of the contracted pressure space 422c decreases, the second piston 522 moves away from the one end side 511a of the cylinder body 511 along the axis line (longitudinal direction) C. The internal volume of the second pressure space 525 expands and the internal volume of the contracted pressure space 422c contracts.

  Accordingly, the first piston 521 becomes the contracted position Pb1 and the second piston 522 extended position Pa2, and the second piston 522 moves in a direction away from the one end side 511a of the cylinder body 511. Then, the rack member 422 fixed to the second piston 522 rotates the pinion 421 meshing with the rack teeth 422a in the clockwise direction as in FIG. As a result, the rotating shaft 20 is also rotated in the clockwise direction, and the movable valve portion 40 is moved to the retracted position E1 (FIG. 35) of the flow path H by a pendulum movement via the neutral valve portion 30 fixed to the rotating shaft 20. To do.

  Similarly, as an initial state, the nut 534 of the first piston restricting member 535 is set to the extended position Pa3, the first piston 521 is set to the contracted position Pb1, and the second piston 522 is set to the contracted position Pb2.

  In this state, compressed air is supplied from the vent 526 into the first pressure space 524, compressed air is supplied from the vent 527 into the second pressure space 525, and compressed air is not supplied to the vent 422j. Make it possible. As a result, the first piston 521 and the second piston 522 are moved away from the one end side 511a of the cylinder body 511, and the first piston 521 and the second piston 522 are both set to the extended positions Pa1 and Pa2. Then, the rack member 422 fixed to the second piston 522 rotates the pinion 421 engaged with the rack teeth 422a in the clockwise direction in FIG. As a result, the rotating shaft 20 is also rotated in the clockwise direction, and the movable valve portion 40 is moved to the retracted position E1 (FIG. 35) of the flow path H by a pendulum movement via the neutral valve portion 30 fixed to the rotating shaft 20. To do.

  As described above, when the first piston 521 and the second piston 522 are moved to the extended positions Pa1 and Pa2, the stop position of the first piston 521 at the extended position Pa1 can be finely adjusted by the first piston restricting member 535. It is. That is, it is possible to finely adjust the stop position at the extended position Pa1 of the first piston 521, that is, finely adjust the stop position at the valve open position E1 of the movable valve unit 40 connected via the rotary shaft 20.

Next, as an initial state of the first piston restricting member 535, as shown in FIGS. 40 to 42, the rotary knob 533 is turned to an intermediate position that is an arbitrary position between the contracted position Pb3 and the extended position Pa3. The positions of the nut 534 and the long screw 532 are adjusted so as to be Pc3.
(Cases 7 to 14)

  First, as an initial state, the first pressure space 524 can be exhausted without supplying compressed air from the vent 526, and the second pressure space 525 can be exhausted without supplying compressed air from the vent 527. 422j is supplied with compressed air. Accordingly, the first piston 521 and the second piston 522 are set to the contracted positions Pb1 and Pb2.

  Next, the first pressure space 524 can be exhausted without supplying compressed air from the vent 526, compressed air can be supplied from the vent 527 into the second pressure space 525, and compressed air can be supplied to the vent 422j. It is possible to exhaust. Thereby, as shown in FIG. 40, the first piston 521 becomes the contracted position Pb1, and the second piston 522 becomes the extended position Pa2.

  In this state, compressed air is supplied from the vent 526 into the first pressure space 524, compressed air is supplied from the vent 527 into the second pressure space 525, and compressed air is not supplied to the vent 422j. Make it possible. As a result, as shown in FIG. 41, the first piston 521 becomes the intermediate position Pc1, and the second piston 522 becomes the extended position Pa2.

  In this state, supply of compressed air from the vent 526 to the first pressure space 524 is maintained, exhaust can be performed without supplying compressed air from the vent 527 to the second pressure space 525, and compressed to the vent 422j. Supply air. Thereby, as shown in FIG. 42, the 1st piston 521 and the 2nd piston 522 become intermediate position Pc1, Pc2. At this time, the protrusion 522 b of the second piston 522 collides with the protrusion 531 of the first piston 521. However, since the cushioning material 536 is formed on the projection 522b of the second piston 522, the projection 522b of the second piston 522 is provided with this cushioning material on the first piston 521 stopped at the intermediate position Pc1. It abuts via 536. Thereby, the impact of the collision is absorbed by the buffer material 536, and it is possible to prevent a strong impact from being applied to the first piston 521 due to the movement of the second piston 522.

Then, the second piston 522 stops at a position where the protrusion 522b of the second piston 522 abuts against the protrusion 531 of the first piston 521 via the buffer material 536, and the second piston 522 is disposed at the intermediate position Pc2. The
When the first piston 521 and the second piston 522 are in the intermediate positions Pc1 and Pc2, respectively, the movable valve portion 40 fixed to the rotary shaft 20 via the neutral valve portion 30 is in the half-open position E3 of the flow path H. (FIG. 35). In such a half-open position E3, the movable valve section 40 covers the flow path H by about half, and for example, the opening area of the flow path H is limited to about half of the valve-open position E1. By setting such a half-open position E3, it can be applied as a valve position that restricts the flow rate passing through the slide valve rather than the valve-open position E1.

  Also in the rotary shaft drive mechanism 300B, as in the rotary shaft drive mechanism 300 of the first embodiment, buffer grooves are formed in the first piston 521 and the second piston 522, and the first piston 521 and the second piston 522 are formed. When the two pistons 522 move toward the contracted positions Pb1 and Pb2, the first piston 521 and the second piston 522 may be brought into gentle contact with the cylinder body 511.

  In the present embodiment, as shown in FIGS. 43 and 44, the initial state of the first piston restricting member 535 is selected from the contracted position Pb3, the extended position Pa3, and the intermediate position Pc3 by turning the rotary knob 533. The initial state and the final state of the first piston 521 are selected from the contracted position Pb2, the extended position Pa2, and the intermediate position Pc2. The initial state and the final state of the second piston 522 are selected from the contracted position Pb1, the extended position Pa1, and the intermediate position Pc1. Compressed air supply state from the vent 526 into the first pressure space 524, compressed air supply state from the vent 527 into the second pressure space 525, compressed air from the vent 422j into the compressed pressure space 422c Set and switch the supply status. Accordingly, the retracted position E1 (valve open position) E1, the valve closed position E2, and the half open position E3 in the movable valve unit 40 can be switched.

  Moreover, as shown in FIGS. 40 to 42, as an initial state of the first piston restricting member 535, the turning knob 533 is turned to set the intermediate position Pc3 to an arbitrary position between the contracted position Pb3 and the extended position Pa3. By adjusting the positions of the nut 534 and the long screw 532 so that the semi-destructive body at the half-open position E3 in the movable valve section 40 is adjusted, the retracted position E1 (valve open position) E1 and the valve closed position E2 Can be set arbitrarily.

  Further, in the present embodiment, as shown in FIG. 39, the compressed air supplied from the vent 526 to the first pressure space 524 can be exhausted without being supplied from the vent 527 to the second pressure space 525. By controlling the pressure state of the air and the pressure state of the compressed air supplied to the pressure space 422c from the vent 422j, as shown in FIG. 39, the first piston 521 and the second piston 522 are placed at the intermediate position, Pc1. , Pc2.

  In this case, when the first piston 521 and the second piston 522 are moved from the extended positions Pa1 and Pa2 to the intermediate positions Pa3 and Pa3, that is, the half-open position E3 of the movable valve portion 40, first, as shown in FIG. Then, the air in the first pressure space 524 is exhausted from the vent 526, and the first pressure space 524 is contracted (reduced). As a result, the first piston 521 moves (slids) along the axis (longitudinal direction) C in a direction approaching the one end side 511a of the cylinder body 511. And it stops at the predetermined intermediate position Pc1.

  Thereafter, the air in the second pressure space 525 is exhausted from the vent hole 527 and the second pressure space 525 is contracted (reduced). At this time, the protrusion 522 b of the second piston 522 collides with the protrusion 531 of the first piston 521. However, since the cushioning material 536 is formed on the projection 522b of the second piston 522, the projection 522b of the second piston 522 stopped at the intermediate position Pc1 contacts the projection 522b via the cushioning material 536. It will be. Thereby, the impact of the collision is absorbed by the buffer material 536, and it is possible to prevent a strong impact from being applied to the first piston 521 due to the movement of the second piston 522.

  Hereinafter, experimental examples of the present invention will be described.

<Sudden gas release phenomenon>
It is known that both the leak and transmission phenomena draw an ascending curve in the initial stage and maintain a substantially constant value after a certain time. Conventionally, the measurement of the amount of leak has been completed in a few minutes using a He detection type mass spectrometer (commonly known as a leak detector). This is because transmission of He starts in a few minutes, so that it is difficult to distinguish between leak and transmission in long-time measurement beyond this. On the other hand, the permeation amount is measured by using a general-purpose mass spectrometer and paying attention to fluctuations over a long period of the rising curve of the introduced gas (usually atmospheric component or argon) component. This time, in a vacuum device using an O-ring as a sealing means at the boundary between atmospheric pressure or a high-pressure space and a vacuum space, unlike the above-described methods for measuring the leak amount and the permeation amount, the sampling cycle is set to a few seconds. As a result of measurement using a mass spectrometer continuously over a long period of time of 1 h or more with high time resolution, the inventors of the present application suddenly have a minute period of several seconds to several minutes as shown in the figure. We found that an increase in gas volume was observed. This sudden increase in gas volume is not a problem in normal vacuum processes, but it may have an adverse effect on instruments that require a higher vacuum and use an O-ring seal, such as analyzers. There is. According to the present invention, the sudden release gas phenomenon in the O-ring seal structure can be reliably reduced by communicating the closed space Seal5 with the leak hole Seal6.

The present invention relates to a vacuum apparatus using an O-ring as a sealing means for a boundary between an atmospheric pressure or a high-pressure space and a vacuum space, particularly an O-ring such as a slide valve having a large opening, such as a film forming apparatus or an analysis apparatus. Therefore, the closed space Seal5 has a large volume, and the amount of gas ejected from the closed space Seal5 has a seal portion that adversely affects the degree of vacuum.
Further, although the rectangular groove O-ring having a rectangular cross section is excited as the O-ring seal, any cross-sectional shape or seal shape can be applied as long as it forms a closed space.

  DESCRIPTION OF SYMBOLS 5 ... Neutral valve body 10, 10a, 10b ... Valve box, 11 ... Hollow part, 12a ... 1st opening part, 12b ... 2nd opening part, 17, 18 ... Fluid path ring, 20 ... Rotating shaft, 21,121 ... male screw, 25 ... valve rod, 30 ... neutral valve part, 31 ... female screw, 40 ... movable valve part, 41 ... supply path, 42 ... communication path, 43 ... fastening bolt (fastening member), 43f ... retaining ring ( (Locking member), 50 ... movable valve plate (second movable valve), 51a, 51b ... second seal, 52a, 52b ... third seal, 53, 54 ... wiper, 55, 56 ... intermediate atmospheric chamber , 60 ... movable valve frame part (first movable valve part), 61 ... first seal part, 62 ... guide pin, 68 ... connection pin, 68A ... floating pin, 69 ... connection pin part, 70 ... main spring (first attached) ), 80... Air cylinder (second urging portion, annular air cylinder), 9 ... Auxiliary spring (third biasing part), 91 ... Connecting member, 93 ... Protrusion, 95 ... Recess, 96a, 96b ... First parallel surface, 97a, 97b ... Second parallel surface, 121,421,621 ... Pinion 122, 422, 622 ... rack, 125, 126 ... axial path, 100, 100A, 1000 ... gate valve, 100B ... slide valve, 300A, 300B, 300C, 300D ... rotating shaft drive mechanism, 410, 510, 610, 710 ... cylinder, 411, 511, 611, 711 ... cylinder body, 412, 521, 612, 712 ... piston, 413, 613 ... pressure space, 414, 614 ... vent, 418, 618 ... buffer groove, 536 736: Buffer material, Seal6: Leakage hole.

Claims (3)

A gate valve,
A valve box having a hollow portion, and a first opening and a second opening that are provided to communicate with each other across the hollow portion and communicate with each other;
A neutral valve body disposed in the hollow portion of the valve box and capable of closing the first opening;
Position switching means that operates between a valve closing position for closing the neutral valve body with respect to the first opening and a valve opening position for retracting from the first opening;
Comprising
The neutral valve body has a neutral valve portion connected to the switching means, and a movable valve portion connected to the neutral valve portion so as to be capable of changing the flow direction direction,
The movable valve portion is provided around the movable valve portion and is provided with a seal portion that is in close contact with the inner surface of the valve box around the first opening, and is connected to the neutral valve portion so that the position in the flow direction can be changed. A first movable valve portion,
A first urging portion that urges the first movable valve portion toward the first opening in the flow path direction so that the seal portion can be brought into close contact with the inner surface of the valve box around the first opening;
A second movable valve portion slidable in the flow path direction with respect to the first movable valve portion;
A second biasing portion that drives the first movable valve portion and the second movable valve portion so as to be able to contract the flow direction thickness dimension against the biasing force of the first biasing portion;
The first movable valve portion is connected to the neutral valve portion in such a manner that the position in the flow direction can be changed in response to a change in thickness in the flow direction between the first movable valve portion and the second movable valve portion. A third urging portion that urges the first movable valve portion toward the flow path direction central position side;
And having
The second urging portion is an air cylinder formed between the first movable valve portion and the second movable valve portion in the second peripheral region, and the air cylinder includes a sliding portion. A seal portion having an O-ring provided in the groove is provided;
A gate valve, wherein the seal portion is provided with a leak hole for communicating the closed space portion to the low pressure side so that the closed space is not formed in the groove.   2. The gate valve according to claim 1, wherein the leak hole has a portion extending in a biasing direction of the first movable valve portion and a portion orthogonal to the portion, and these portions are communicated with each other. The gate valve according to claim 1 or 2, wherein a recess is formed at the low pressure side outlet of the leak hole.

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