JPS5817658A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5817658A
JPS5817658A JP56115092A JP11509281A JPS5817658A JP S5817658 A JPS5817658 A JP S5817658A JP 56115092 A JP56115092 A JP 56115092A JP 11509281 A JP11509281 A JP 11509281A JP S5817658 A JPS5817658 A JP S5817658A
Authority
JP
Japan
Prior art keywords
region
input
diode
junction area
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56115092A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0319709B2 (enrdf_load_stackoverflow
Inventor
Kiyobumi Uchibori
内堀　清文
Naoki Yashiki
直樹 屋鋪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56115092A priority Critical patent/JPS5817658A/ja
Publication of JPS5817658A publication Critical patent/JPS5817658A/ja
Publication of JPH0319709B2 publication Critical patent/JPH0319709B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
    • H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
    • H10D89/611—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using diodes as protective elements

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56115092A 1981-07-24 1981-07-24 半導体装置の製造方法 Granted JPS5817658A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56115092A JPS5817658A (ja) 1981-07-24 1981-07-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56115092A JPS5817658A (ja) 1981-07-24 1981-07-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5817658A true JPS5817658A (ja) 1983-02-01
JPH0319709B2 JPH0319709B2 (enrdf_load_stackoverflow) 1991-03-15

Family

ID=14653998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56115092A Granted JPS5817658A (ja) 1981-07-24 1981-07-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5817658A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077459A (ja) * 1983-10-05 1985-05-02 Fujitsu Ltd 半導体装置
JPH02298393A (ja) * 1989-05-15 1990-12-10 Raizaa Kogyo Kk 光酸化処理方法及びその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5422277A (en) * 1977-07-18 1979-02-20 Shinya Minemura Making of ornamental material from flowers or leaves

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5422277A (en) * 1977-07-18 1979-02-20 Shinya Minemura Making of ornamental material from flowers or leaves

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077459A (ja) * 1983-10-05 1985-05-02 Fujitsu Ltd 半導体装置
JPH02298393A (ja) * 1989-05-15 1990-12-10 Raizaa Kogyo Kk 光酸化処理方法及びその装置

Also Published As

Publication number Publication date
JPH0319709B2 (enrdf_load_stackoverflow) 1991-03-15

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