JPS58168570U - サセプタ−リング - Google Patents

サセプタ−リング

Info

Publication number
JPS58168570U
JPS58168570U JP6367082U JP6367082U JPS58168570U JP S58168570 U JPS58168570 U JP S58168570U JP 6367082 U JP6367082 U JP 6367082U JP 6367082 U JP6367082 U JP 6367082U JP S58168570 U JPS58168570 U JP S58168570U
Authority
JP
Japan
Prior art keywords
susceptor ring
ring
heat shield
susceptor
shield part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6367082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS623407Y2 (enrdf_load_stackoverflow
Inventor
井深　敏彦
Original Assignee
三菱化成ポリテック株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱化成ポリテック株式会社 filed Critical 三菱化成ポリテック株式会社
Priority to JP6367082U priority Critical patent/JPS58168570U/ja
Publication of JPS58168570U publication Critical patent/JPS58168570U/ja
Application granted granted Critical
Publication of JPS623407Y2 publication Critical patent/JPS623407Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6367082U 1982-04-30 1982-04-30 サセプタ−リング Granted JPS58168570U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6367082U JPS58168570U (ja) 1982-04-30 1982-04-30 サセプタ−リング

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6367082U JPS58168570U (ja) 1982-04-30 1982-04-30 サセプタ−リング

Publications (2)

Publication Number Publication Date
JPS58168570U true JPS58168570U (ja) 1983-11-10
JPS623407Y2 JPS623407Y2 (enrdf_load_stackoverflow) 1987-01-26

Family

ID=30073765

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6367082U Granted JPS58168570U (ja) 1982-04-30 1982-04-30 サセプタ−リング

Country Status (1)

Country Link
JP (1) JPS58168570U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS623407Y2 (enrdf_load_stackoverflow) 1987-01-26

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