JPS58167774A - 金属膜の選択的除去方法 - Google Patents

金属膜の選択的除去方法

Info

Publication number
JPS58167774A
JPS58167774A JP5034982A JP5034982A JPS58167774A JP S58167774 A JPS58167774 A JP S58167774A JP 5034982 A JP5034982 A JP 5034982A JP 5034982 A JP5034982 A JP 5034982A JP S58167774 A JPS58167774 A JP S58167774A
Authority
JP
Japan
Prior art keywords
metal film
film
metal
substrate
platinum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5034982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214635B2 (enExample
Inventor
Yoshibumi Kuroda
黒田　義文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP5034982A priority Critical patent/JPS58167774A/ja
Publication of JPS58167774A publication Critical patent/JPS58167774A/ja
Publication of JPS6214635B2 publication Critical patent/JPS6214635B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP5034982A 1982-03-29 1982-03-29 金属膜の選択的除去方法 Granted JPS58167774A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5034982A JPS58167774A (ja) 1982-03-29 1982-03-29 金属膜の選択的除去方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5034982A JPS58167774A (ja) 1982-03-29 1982-03-29 金属膜の選択的除去方法

Publications (2)

Publication Number Publication Date
JPS58167774A true JPS58167774A (ja) 1983-10-04
JPS6214635B2 JPS6214635B2 (enExample) 1987-04-03

Family

ID=12856431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5034982A Granted JPS58167774A (ja) 1982-03-29 1982-03-29 金属膜の選択的除去方法

Country Status (1)

Country Link
JP (1) JPS58167774A (enExample)

Also Published As

Publication number Publication date
JPS6214635B2 (enExample) 1987-04-03

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