JPS58165003A - マグネツト式コ−ト層厚さ測定ゲ−ジ - Google Patents
マグネツト式コ−ト層厚さ測定ゲ−ジInfo
- Publication number
- JPS58165003A JPS58165003A JP58007518A JP751883A JPS58165003A JP S58165003 A JPS58165003 A JP S58165003A JP 58007518 A JP58007518 A JP 58007518A JP 751883 A JP751883 A JP 751883A JP S58165003 A JPS58165003 A JP S58165003A
- Authority
- JP
- Japan
- Prior art keywords
- layer thickness
- coating layer
- housing
- contact member
- thickness measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011247 coating layer Substances 0.000 title claims description 46
- 239000000523 sample Substances 0.000 claims description 42
- 239000010410 layer Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 241000283707 Capra Species 0.000 claims 1
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims 1
- 239000003921 oil Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 210000003811 finger Anatomy 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910000851 Alloy steel Inorganic materials 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 210000003813 thumb Anatomy 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 241001062872 Cleyera japonica Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- -1 cobalt rare earth Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 210000004247 hand Anatomy 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000010584 magnetic trap Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S33/00—Geometrical instruments
- Y10S33/01—Magnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/341,337 US4567436A (en) | 1982-01-21 | 1982-01-21 | Magnetic thickness gauge with adjustable probe |
US341337 | 1989-04-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58165003A true JPS58165003A (ja) | 1983-09-30 |
JPH0322561B2 JPH0322561B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-27 |
Family
ID=23337126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58007518A Granted JPS58165003A (ja) | 1982-01-21 | 1983-01-21 | マグネツト式コ−ト層厚さ測定ゲ−ジ |
Country Status (5)
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3331407A1 (de) * | 1983-08-31 | 1985-03-14 | Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen | Elektromagnetische mess-sonde |
DE3519540A1 (de) * | 1984-11-10 | 1986-12-04 | Zinser Textilmaschinen Gmbh, 7333 Ebersbach | Maschine zum herstellen gedrehter oder gezwirnter faeden |
DE3701428A1 (de) * | 1987-01-20 | 1988-07-28 | Gertraud Krensing | Messmethode und messeinrichtung fuer betonbauteile, wie z.b. stahlbetonbauteile |
US4738131A (en) * | 1987-06-17 | 1988-04-19 | Paul N. Gardner Company, Inc. | Guarded ring tensioned thickness standard |
GB8716022D0 (en) * | 1987-07-08 | 1987-08-12 | Swarbrick P | Body tester |
USD333794S (en) | 1990-02-28 | 1993-03-09 | Kett Electric Laboratory | Coating thickness tester |
US5241280A (en) * | 1990-06-05 | 1993-08-31 | Defelsko Corporation | Coating thickness measurement gauge |
US5094009A (en) * | 1990-10-17 | 1992-03-10 | Defelsko Corporation | Gauge for measuring the thickness of a coating on a substrate |
US5343146A (en) * | 1992-10-05 | 1994-08-30 | De Felsko Corporation | Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil |
EP0702033B1 (en) | 1994-09-14 | 1997-12-03 | Shin-Etsu Chemical Co., Ltd. | Process of producing vinyl chloride type polymer |
USD379938S (en) * | 1995-03-15 | 1997-06-17 | Gary Jones | Thickness gauge |
US6232789B1 (en) * | 1997-05-28 | 2001-05-15 | Cascade Microtech, Inc. | Probe holder for low current measurements |
DE19953061C1 (de) * | 1999-11-03 | 2001-02-08 | Elektrophysik Dr Steingroever | Dickenmeßgerät für nichtmagnetische Schichten auf ferromagnetischen Unterlagen |
US6433541B1 (en) | 1999-12-23 | 2002-08-13 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current measurements during the process for removing the film |
US6707540B1 (en) | 1999-12-23 | 2004-03-16 | Kla-Tencor Corporation | In-situ metalization monitoring using eddy current and optical measurements |
DE10143173A1 (de) * | 2000-12-04 | 2002-06-06 | Cascade Microtech Inc | Wafersonde |
EP1509776A4 (en) * | 2002-05-23 | 2010-08-18 | Cascade Microtech Inc | PROBE TO TEST ANY TESTING EQUIPMENT |
GB2397652B (en) * | 2002-11-15 | 2005-12-21 | Immobilienges Helmut Fischer | Measurement probe for measurement of the thickness of thin layers |
US7057404B2 (en) * | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
KR100960496B1 (ko) * | 2003-10-31 | 2010-06-01 | 엘지디스플레이 주식회사 | 액정표시소자의 러빙방법 |
US7427868B2 (en) * | 2003-12-24 | 2008-09-23 | Cascade Microtech, Inc. | Active wafer probe |
JP2008512680A (ja) * | 2004-09-13 | 2008-04-24 | カスケード マイクロテック インコーポレイテッド | 両面プロービング構造体 |
US7449899B2 (en) * | 2005-06-08 | 2008-11-11 | Cascade Microtech, Inc. | Probe for high frequency signals |
US7619419B2 (en) | 2005-06-13 | 2009-11-17 | Cascade Microtech, Inc. | Wideband active-passive differential signal probe |
US7609077B2 (en) | 2006-06-09 | 2009-10-27 | Cascade Microtech, Inc. | Differential signal probe with integral balun |
US7403028B2 (en) * | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7764072B2 (en) * | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US7443186B2 (en) * | 2006-06-12 | 2008-10-28 | Cascade Microtech, Inc. | On-wafer test structures for differential signals |
US7723999B2 (en) * | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7876114B2 (en) * | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
US9541367B2 (en) | 2013-05-01 | 2017-01-10 | Covidien Lp | Tissue caliper |
US12326332B2 (en) * | 2022-06-23 | 2025-06-10 | GM Global Technology Operations LLC | Systems, methods, and devices for measuring tear seam thicknesses of breakaway panels for vehicle airbags |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54151865A (en) * | 1978-04-04 | 1979-11-29 | Otdel Fiz Nerazrushajuschego | Device for measuring thickness of coating of metallic product |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE7147884U (de) * | 1972-04-06 | Elcometer Instr Ltd | Dickenmeßgerat | |
GB542968A (en) * | 1940-07-01 | 1942-02-04 | William Henry Tait | Improvements in magnetic apparatus for measuring the thickness of thin layers |
US2469476A (en) * | 1948-01-13 | 1949-05-10 | East Lancashire Chemical Compa | Magnetic testing apparatus |
US2625585A (en) * | 1949-12-01 | 1953-01-13 | Glen N Krouse | Magnetic measuring gauge |
US2693979A (en) * | 1950-08-03 | 1954-11-09 | George L Russell | Magnetic device |
DE869125C (de) * | 1951-10-11 | 1953-03-02 | Hans Nix | Schichtdickenmesser |
US2903645A (en) * | 1954-09-28 | 1959-09-08 | Gen Electric | Magnetic thickness gauge |
GB1126988A (en) * | 1967-04-22 | 1968-09-11 | Hans Nix | Improvements in or relating to magnetic thickness gauges |
DE2054929A1 (de) * | 1970-11-07 | 1972-05-10 | Elektro Physik Hans Nix U Dr I | Magnetischer Dickenmesser |
DE2107076C3 (de) * | 1971-02-15 | 1975-01-30 | Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever Kg, 5000 Koeln | Magnetischer Schicht-Dickenmesser |
DE2345848C3 (de) * | 1973-09-12 | 1986-06-19 | ELEKTRO-PHYSIK Hans Nix & Dr.-Ing. E. Steingroever GmbH & Co KG, 5000 Köln | Elektromagnetischer Schichtdickenmesser |
US3999120A (en) * | 1973-10-12 | 1976-12-21 | Ludwig Streng | Spherical sector for sensor probe |
DE2556340A1 (de) * | 1975-12-13 | 1977-06-16 | Fischer Gmbh & Co Helmut | Endstueck fuer messtaster |
GB1562444A (en) * | 1975-12-27 | 1980-03-12 | Nix Steingroeve Elektro Physik | Method of calibrating magnetic layerthickness gauges |
DE2558897C3 (de) * | 1975-12-27 | 1979-02-15 | Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever Kg, 5000 Koeln | Testplatte zum Kalibrieren von Schichtdicken-Meßgeräten |
US4160208A (en) * | 1976-01-27 | 1979-07-03 | Elektro-Physik, Hans Nix & Dr. -Ing E. Steingroever Kg. | Method of calibrating magnetic thickness gauges |
US4164707A (en) * | 1976-06-30 | 1979-08-14 | Norbert Nix | Magnetic thickness gauge of the magnet adhesion type using drive means with a governor to raise the magnet |
DE2629505C2 (de) * | 1976-06-30 | 1985-05-09 | Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln | Vorrichtung zur Messung der Dicke von nichtmagnetischen Schichten |
DE2630099C2 (de) * | 1976-07-03 | 1985-09-19 | Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln | Magnetischer Schichtdickenmesser |
DE2638248C2 (de) * | 1976-08-25 | 1983-07-28 | Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln | Magnetischer Schichtdickenmesser |
DE3013596A1 (de) * | 1980-04-09 | 1981-10-15 | Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln | Magnetischer schichtdickenmesser |
-
1982
- 1982-01-21 US US06/341,337 patent/US4567436A/en not_active Expired - Lifetime
-
1983
- 1983-01-12 GB GB08300760A patent/GB2113851B/en not_active Expired
- 1983-01-20 DE DE3301785A patent/DE3301785C2/de not_active Expired - Fee Related
- 1983-01-21 JP JP58007518A patent/JPS58165003A/ja active Granted
- 1983-01-21 FR FR8300947A patent/FR2519958B1/fr not_active Expired
-
1986
- 1986-01-07 GB GB08600225A patent/GB2170604B/en not_active Expired
- 1986-01-07 GB GB08600224A patent/GB2170603B/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54151865A (en) * | 1978-04-04 | 1979-11-29 | Otdel Fiz Nerazrushajuschego | Device for measuring thickness of coating of metallic product |
Also Published As
Publication number | Publication date |
---|---|
FR2519958A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1983-07-22 |
GB2113851A (en) | 1983-08-10 |
DE3301785C2 (de) | 1996-02-15 |
GB2170604B (en) | 1987-01-21 |
GB2113851B (en) | 1987-01-21 |
GB2170604A (en) | 1986-08-06 |
GB2170603B (en) | 1987-01-21 |
FR2519958B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-15 |
GB2170603A (en) | 1986-08-06 |
GB8300760D0 (en) | 1983-02-16 |
JPH0322561B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-03-27 |
GB8600225D0 (en) | 1986-02-12 |
US4567436A (en) | 1986-01-28 |
GB8600224D0 (en) | 1986-02-12 |
DE3301785A1 (de) | 1983-08-18 |
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