JPS58161234A - 電界放出型荷電粒子発生装置 - Google Patents

電界放出型荷電粒子発生装置

Info

Publication number
JPS58161234A
JPS58161234A JP57044077A JP4407782A JPS58161234A JP S58161234 A JPS58161234 A JP S58161234A JP 57044077 A JP57044077 A JP 57044077A JP 4407782 A JP4407782 A JP 4407782A JP S58161234 A JPS58161234 A JP S58161234A
Authority
JP
Japan
Prior art keywords
emitter
electrode
voltage
extraction
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57044077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6340017B2 (enrdf_load_stackoverflow
Inventor
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57044077A priority Critical patent/JPS58161234A/ja
Publication of JPS58161234A publication Critical patent/JPS58161234A/ja
Publication of JPS6340017B2 publication Critical patent/JPS6340017B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57044077A 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置 Granted JPS58161234A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57044077A JPS58161234A (ja) 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57044077A JPS58161234A (ja) 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置

Publications (2)

Publication Number Publication Date
JPS58161234A true JPS58161234A (ja) 1983-09-24
JPS6340017B2 JPS6340017B2 (enrdf_load_stackoverflow) 1988-08-09

Family

ID=12681556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57044077A Granted JPS58161234A (ja) 1982-03-19 1982-03-19 電界放出型荷電粒子発生装置

Country Status (1)

Country Link
JP (1) JPS58161234A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006118504A (ja) * 2004-10-20 2006-05-11 Pcm Pompes プログレッシブキャビティポンプを備えたポンピングシステム
US7777194B2 (en) 2007-03-14 2010-08-17 Hitachi High-Technologies Corporation Charged particle beam apparatus
DE102018200593A1 (de) * 2018-01-15 2019-07-18 Carl Zeiss Microscopy Gmbh Steckverbindungseinheit, Teilchenstrahlerzeuger mit einer Steckverbindungseinheit sowie Teilchenstrahlgerät mit einem Teilchenstrahlerzeuger

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2017361126A1 (en) 2016-11-16 2019-06-27 Solar Pile International (Hk) Ltd Screw pile and drive tool

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940058A (enrdf_load_stackoverflow) * 1972-08-17 1974-04-15
JPS4940664A (enrdf_load_stackoverflow) * 1972-08-24 1974-04-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940058A (enrdf_load_stackoverflow) * 1972-08-17 1974-04-15
JPS4940664A (enrdf_load_stackoverflow) * 1972-08-24 1974-04-16

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006118504A (ja) * 2004-10-20 2006-05-11 Pcm Pompes プログレッシブキャビティポンプを備えたポンピングシステム
US7777194B2 (en) 2007-03-14 2010-08-17 Hitachi High-Technologies Corporation Charged particle beam apparatus
DE102018200593A1 (de) * 2018-01-15 2019-07-18 Carl Zeiss Microscopy Gmbh Steckverbindungseinheit, Teilchenstrahlerzeuger mit einer Steckverbindungseinheit sowie Teilchenstrahlgerät mit einem Teilchenstrahlerzeuger
DE102018200593B4 (de) 2018-01-15 2019-08-08 Carl Zeiss Microscopy Gmbh Steckverbindungseinheit, Teilchenstrahlerzeuger mit einer Steckverbindungseinheit sowie Teilchenstrahlgerät mit einem Teilchenstrahlerzeuger

Also Published As

Publication number Publication date
JPS6340017B2 (enrdf_load_stackoverflow) 1988-08-09

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