JPS58158843A - イオン銃 - Google Patents

イオン銃

Info

Publication number
JPS58158843A
JPS58158843A JP57041520A JP4152082A JPS58158843A JP S58158843 A JPS58158843 A JP S58158843A JP 57041520 A JP57041520 A JP 57041520A JP 4152082 A JP4152082 A JP 4152082A JP S58158843 A JPS58158843 A JP S58158843A
Authority
JP
Japan
Prior art keywords
electrode
ion beam
extraction electrode
electrons
accelerated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57041520A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6347226B2 (enExample
Inventor
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP57041520A priority Critical patent/JPS58158843A/ja
Publication of JPS58158843A publication Critical patent/JPS58158843A/ja
Publication of JPS6347226B2 publication Critical patent/JPS6347226B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57041520A 1982-03-16 1982-03-16 イオン銃 Granted JPS58158843A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57041520A JPS58158843A (ja) 1982-03-16 1982-03-16 イオン銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57041520A JPS58158843A (ja) 1982-03-16 1982-03-16 イオン銃

Publications (2)

Publication Number Publication Date
JPS58158843A true JPS58158843A (ja) 1983-09-21
JPS6347226B2 JPS6347226B2 (enExample) 1988-09-21

Family

ID=12610651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57041520A Granted JPS58158843A (ja) 1982-03-16 1982-03-16 イオン銃

Country Status (1)

Country Link
JP (1) JPS58158843A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167357U (enExample) * 1986-04-14 1987-10-23
EP1665319A4 (en) * 2003-08-27 2009-06-17 Fei Co SPRAY PROTECTION SCREENS FOR IMPROVED OPERATION OF ION COLUMNS
DE102010041156A1 (de) 2010-09-21 2012-03-22 Carl Zeiss Nts Gmbh Blendeneinheit für ein Teilchenstrahlgerät
JP2014102980A (ja) * 2012-11-20 2014-06-05 Gigaphoton Inc ターゲット供給装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62167357U (enExample) * 1986-04-14 1987-10-23
EP1665319A4 (en) * 2003-08-27 2009-06-17 Fei Co SPRAY PROTECTION SCREENS FOR IMPROVED OPERATION OF ION COLUMNS
DE102010041156A1 (de) 2010-09-21 2012-03-22 Carl Zeiss Nts Gmbh Blendeneinheit für ein Teilchenstrahlgerät
US8779381B2 (en) 2010-09-21 2014-07-15 Carl Zeiss Nts Gmbh Aperture unit for a particle beam device
DE102010041156B4 (de) * 2010-09-21 2017-08-17 Carl Zeiss Microscopy Gmbh Blendeneinheit für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät
DE102010041156B9 (de) * 2010-09-21 2018-01-25 Carl Zeiss Microscopy Gmbh Blendeneinheit für ein Teilchenstrahlgerät sowie Teilchenstrahlgerät
CZ307991B6 (cs) * 2010-09-21 2019-10-09 Carl Zeiss Microscopy Gmbh Clonová jednotka pro přístroj používající korpuskulární záření
JP2014102980A (ja) * 2012-11-20 2014-06-05 Gigaphoton Inc ターゲット供給装置

Also Published As

Publication number Publication date
JPS6347226B2 (enExample) 1988-09-21

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