JPS58157036A - イオン発生装置 - Google Patents

イオン発生装置

Info

Publication number
JPS58157036A
JPS58157036A JP57038155A JP3815582A JPS58157036A JP S58157036 A JPS58157036 A JP S58157036A JP 57038155 A JP57038155 A JP 57038155A JP 3815582 A JP3815582 A JP 3815582A JP S58157036 A JPS58157036 A JP S58157036A
Authority
JP
Japan
Prior art keywords
cathode
anode
ion
hole
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57038155A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334178B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Kageyama
影山　賀都鴻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57038155A priority Critical patent/JPS58157036A/ja
Publication of JPS58157036A publication Critical patent/JPS58157036A/ja
Publication of JPH0334178B2 publication Critical patent/JPH0334178B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP57038155A 1982-03-12 1982-03-12 イオン発生装置 Granted JPS58157036A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57038155A JPS58157036A (ja) 1982-03-12 1982-03-12 イオン発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57038155A JPS58157036A (ja) 1982-03-12 1982-03-12 イオン発生装置

Publications (2)

Publication Number Publication Date
JPS58157036A true JPS58157036A (ja) 1983-09-19
JPH0334178B2 JPH0334178B2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=12517513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57038155A Granted JPS58157036A (ja) 1982-03-12 1982-03-12 イオン発生装置

Country Status (1)

Country Link
JP (1) JPS58157036A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150010A (en) * 1990-03-14 1992-09-22 Kabushiki Kaisha Toshiba Discharge-in-magnetic-field type ion generating apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5150010A (en) * 1990-03-14 1992-09-22 Kabushiki Kaisha Toshiba Discharge-in-magnetic-field type ion generating apparatus

Also Published As

Publication number Publication date
JPH0334178B2 (enrdf_load_stackoverflow) 1991-05-21

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