JPS58154607A - 規則性パタ−ンの欠陥検査装置 - Google Patents

規則性パタ−ンの欠陥検査装置

Info

Publication number
JPS58154607A
JPS58154607A JP3634982A JP3634982A JPS58154607A JP S58154607 A JPS58154607 A JP S58154607A JP 3634982 A JP3634982 A JP 3634982A JP 3634982 A JP3634982 A JP 3634982A JP S58154607 A JPS58154607 A JP S58154607A
Authority
JP
Japan
Prior art keywords
pattern
defect
signal
movement
regular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3634982A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0134322B2 (enrdf_load_stackoverflow
Inventor
Nobuo Tsumita
積田　伸夫
Shunsuke Mukasa
武笠　俊介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP3634982A priority Critical patent/JPS58154607A/ja
Publication of JPS58154607A publication Critical patent/JPS58154607A/ja
Publication of JPH0134322B2 publication Critical patent/JPH0134322B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP3634982A 1982-03-10 1982-03-10 規則性パタ−ンの欠陥検査装置 Granted JPS58154607A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3634982A JPS58154607A (ja) 1982-03-10 1982-03-10 規則性パタ−ンの欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3634982A JPS58154607A (ja) 1982-03-10 1982-03-10 規則性パタ−ンの欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS58154607A true JPS58154607A (ja) 1983-09-14
JPH0134322B2 JPH0134322B2 (enrdf_load_stackoverflow) 1989-07-19

Family

ID=12467357

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3634982A Granted JPS58154607A (ja) 1982-03-10 1982-03-10 規則性パタ−ンの欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS58154607A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115389624A (zh) * 2022-10-27 2022-11-25 智能网联汽车(山东)协同创新研究院有限公司 一种加工用声波测试系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115389624A (zh) * 2022-10-27 2022-11-25 智能网联汽车(山东)协同创新研究院有限公司 一种加工用声波测试系统

Also Published As

Publication number Publication date
JPH0134322B2 (enrdf_load_stackoverflow) 1989-07-19

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