JPS5815351U - Semiconductor inspection equipment - Google Patents
Semiconductor inspection equipmentInfo
- Publication number
- JPS5815351U JPS5815351U JP10878981U JP10878981U JPS5815351U JP S5815351 U JPS5815351 U JP S5815351U JP 10878981 U JP10878981 U JP 10878981U JP 10878981 U JP10878981 U JP 10878981U JP S5815351 U JPS5815351 U JP S5815351U
- Authority
- JP
- Japan
- Prior art keywords
- inspection equipment
- semiconductor inspection
- semiconductor
- detector
- sound waves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims description 6
- 238000007689 inspection Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は検出器に本考案の音波を使用している状態を示
す図である。第２図は検出器に光学系の検出器を使用し
ている従来技術を示す図である。
第３図はサファイヤ基板上の半導体装置に照射されてい
る様子を表わした平面図である。
図中１． １’・・・・・・サファイヤ基板、２． ２
’・・・・・・半導体装置、３，３′・・・・・・照射
範囲、４．４′・・・・・・照射、５．５′・・・・・
・反射、６．６′・・・・・・回転上面、７，７′・・
・・・・側御装置、８，８′・・・・・・検出器、９・
・・・・・透過である。FIG. 1 is a diagram showing a state in which the sound waves of the present invention are used in a detector. FIG. 2 is a diagram showing a conventional technique in which an optical system detector is used as a detector. FIG. 3 is a plan view showing how a semiconductor device on a sapphire substrate is irradiated. 1 in the figure. 1'... Sapphire substrate, 2. 2
'...Semiconductor device, 3,3'...Irradiation range, 4.4'...Irradiation, 5.5'...
・Reflection, 6.6'...Top surface of rotation, 7,7'...
...Side control device, 8, 8'...Detector, 9.
...It is transparent.
Claims (1)
置において、半導体基板を検出するために音波を利用し
た検出器を有することを特徴とした半導体検査装置。A semiconductor testing device used for electrical characteristic testing of semiconductor devices, characterized by having a detector that uses sound waves to detect a semiconductor substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10878981U JPS5815351U (en) | 1981-07-22 | 1981-07-22 | Semiconductor inspection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10878981U JPS5815351U (en) | 1981-07-22 | 1981-07-22 | Semiconductor inspection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5815351U true JPS5815351U (en) | 1983-01-31 |
Family
ID=29903180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10878981U Pending JPS5815351U (en) | 1981-07-22 | 1981-07-22 | Semiconductor inspection equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5815351U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6070584U (en) * | 1983-10-20 | 1985-05-18 | 株式会社ハイランド | flexible container |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258946A (en) * | 1975-11-10 | 1977-05-14 | Yokogawa Hokushin Electric Corp | Displacement detector |
-
1981
- 1981-07-22 JP JP10878981U patent/JPS5815351U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5258946A (en) * | 1975-11-10 | 1977-05-14 | Yokogawa Hokushin Electric Corp | Displacement detector |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6070584U (en) * | 1983-10-20 | 1985-05-18 | 株式会社ハイランド | flexible container |
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