JPS58152252A - Information recording material - Google Patents

Abstract

PURPOSE:To obtain an information recording material having superior resistance to scratch, oxidation and moisture and undergoing little change in the surface resistance with the passage of time, by coating one side or both sides of a support with a thin film of titanium carbide or titanium nitride. CONSTITUTION:One side or both sides of a support such as a film of a transparent flexible org. polymer such as polyethylene terephthalate are coated with a thin film of titanium carbide or titanium nitride. The film has high scratch resistance and resistance to oxidation and moisture. Accordingly, the surface resistance is hardly changed, and stable performance is maintained. By the coating an information recording film applicable to electrostatic recording, electrophotographic recording, etc. is obtd.

Description

[Detailed Description of the Invention] This ll@ is for use as a substitute telegraph material for use in electrophotographic meetings, etc., and as a film for livc information recording. ◎For example, as a conductive thin film, a conductive thin film made of organic polymers in glass and on a stone support is known.
Gold, silver, steel, mutt.

mt, orgoMetal single substance % ★9 Various thin films such as metal alloys and oxides of tin group have been proposed. resistance is 10-6 to 10-1
The O quality in the range of 9.1 is at least 10 to 10 used for electrostatics, etc., to obtain a conductive film with a resistance of ρ/ro. Desirably, a thickness of 1011 μm or more is required, and the track thickness O must be strictly controlled in order to obtain the desired surface resistance.

In addition, thin films of metal alloys and metal oxides are very sensitive to scratches, and are not exposed to air.
It has the disadvantage of being oxidized by 7, and it is difficult to obtain a material with Table II resistance that does not change over time because it is required as a material for rounding and information records.
In order to overcome these conventional drawbacks and obtain a material that satisfies the various performance requirements of tatami mats as an information storage material, we developed optical properties of a transparent conductive thin film to be deposited on a support.
As a result of intensive research into electrical properties 1, mechanical properties, etc., by coating the support with a thin film containing titanium carbide or titanium nitride as the main component, it is sufficient as the final film for information recording. Todoroki discovers that it is possible to obtain a transparent conductive film with the following characteristics.
This article is based on the fact that the main component is Oka IIIK titanium carbide or titanium nitride, so it is coated with a thin film. In terms of materials, the thin film of No. 11 has high scratch resistance, oxidation resistance is excellent, and corrosion resistance is excellent. However, the resistance is relatively large compared to the body sn existence.Table II resistance is 10 which is useful as a rounding information record #M# class.
~1 gamez, KFi to get @1101111 layer
% quality metal *o*i+uc The thickness control is strictly required 1 to 1-, so there will be some trouble on the way.0 This 1lIIIK The supports used are polyethylene tele 7 merate and polybutylene tele 7. Voice rate, polyethylene-! , 4-? 7) Rangecal is polyester chain such as xylate, positive electrode.

Examples include organic polymer substances such as loose acetate, cellulose tate butyrate, polystyrene, polymethyl metatallate, polycarbonate, polysulfone, and polysulfate ethylene, or glass.
A film of an organic polymer substance that is flexible and has K'a@ is useful because it is a thin film that is mainly composed of titanium carbide or titanium nitride. % thin film! Elements of 0vt91 or less, such as seaweed, aluminum, steel, aluminum, iron, cobalt, copper, or these O-based metals, etc., are ll, m and 4j
L 0 Invention KJI) Support O on one side or on both sides 1IIK
Physical and chemical methods are used to deposit thin films based on titanium carbide or titanium nitride. Such methods include vacuum evaporation 9 reactive vacuum evaporation;
Ionpreteinda.

Various methods are used such as cathode sputtering, reactive sputtering, and continuous plasma firing. ◇ Due to the uniformity of the thin film formed and the volume of the construction.

Thin film first place f! 1. From what point do you cover titanium carbide or titanium nitride O straight chain ★ Sword sputtering or metal titanium 6j [favorable for Cathode sputtering/##41 〇 Thin film of titanium carbide or titanium nitride The thickness varies depending on the mechanical and chemical requirements of approximately 11 mK, permeability of 11 mK, and electrical conductivity of 11 mK.

At least 100 μm or more, and in order to ensure uniform conductivity, it is preferable to use KFisoom or more.

One or both sides of the support in this case can be coated with a thin film mainly composed of IFK titanium or titanium nitride. After providing an undercoat layer of positive ester, polyurethane, positive acrylate IA, epoxy, etc., a titanium carbide or titanium nitride thin film is formed on the sand or on the titanium carbide or titanium nitride thin film. It is also possible to provide a protective coating layer of silicone, titanate, metal alkoxide, gelatin, 3-dione, etc. For even higher purposes, it is possible to form a photoconductor on this titanium carbide or titanium nitride thin film. It is also possible to provide a layer of a high-voltage electrolyte material, a thermoplastic thin film, an electrolyte material, etc. In other words, the information material of the present invention is an electrophotographic material. Recording) Appropriate use of electrostatic recording, thermoplastic recording, heat mode recording, display electrodes, etc. iiA.

Hereinafter, the si+u* example will be explained as one of the OII manufacturing methods of the information material of the present invention.
ji! It's not 10 that will be done.

mm example 1 12 of polyethylene tele7 merate! ! Using a P-thick two-wheeled stretched film as a support, a titanium carbide (TE10) target was applied to this piece using a low-temperature, high-temperature sputter I-linda device (Nichiden Anelpa Co., Ltd. @ 8F?-210Hml).
') using a vacuum IIIL1x1o-' while keeping it off, set the acceleration voltage to 4, and perform high frequency sputtering with a beam electric 11401+.
The thickness of the obtained titanium carbide thin film was about 00 μm, and the surface resistance of the film was 2×1@' for this transparent conductive film. The adhesion of the first thin film is 1002 in the friction test with gauze. After 100 reciprocations under load, the titanium carbide thin film did not peel off at all, and the surface resistance increased by 1.2 times. Using a biaxially stretched film as a support, titanium nitride (T1) was applied to this layer using a high-temperature high-temperature sputtering device (Nichiden Anelpa Co., Ltd. @ 5py-z 10!).
Using the value of Ill ), the vacuum 11 stroke
Frequency sputtering was performed at an acceleration voltage of 4 and a beam current of 40 mm while maintaining K. The spatter is moderate at this time! After sputtering with GA71- for 15 seconds, the resulting thin film of titanium nitride has a thickness of about 100 mm. The surface resistance of this transparent conductive film is 5XIO'~
Ink
4. A cram school.

The adhesion of the vapor-deposited thin film was determined by adhesive tape using cellophane tape.
It has enough 11IIJIm that it will not be peeled off by K.

100 at a load of 100 tons in a friction test using Aikyu gauze.
Although the titanium nitride thin film was moved back and forth, no peeling of the titanium nitride thin film was observed, and the surface resistance increased by 1.1 times. After applying a cutter knife with a force of 100 mph to create a wound, the wound surface was observed (through a mirror) and no peeling was observed.

Claims (1)

[Claims] A thin film mainly composed of titanium carbide or titanium nitride is coated on one or both sides of the support to prevent mold and mildew.