JPH01171856A - Metallized film - Google Patents

Metallized film

Info

Publication number
JPH01171856A
JPH01171856A JP33168287A JP33168287A JPH01171856A JP H01171856 A JPH01171856 A JP H01171856A JP 33168287 A JP33168287 A JP 33168287A JP 33168287 A JP33168287 A JP 33168287A JP H01171856 A JPH01171856 A JP H01171856A
Authority
JP
Japan
Prior art keywords
film
layer
vapor
deposited
plasma polymerization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33168287A
Other languages
Japanese (ja)
Inventor
Mitsuyoshi Yokura
与倉 三好
Kenji Hatada
研司 畑田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Industries Inc
Original Assignee
Toray Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Industries Inc filed Critical Toray Industries Inc
Priority to JP33168287A priority Critical patent/JPH01171856A/en
Publication of JPH01171856A publication Critical patent/JPH01171856A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To provide a metallized film showing no lowering of the bonding strength of a vapor-deposited metal layer not only under a high temp. and high humidity condition but also in a liquid, by bonding a polymer film and the vapor-deposited metal layer through a plasma polymerization layer formed from an acrylic or methacrylic compound having a glycidyl group. CONSTITUTION:A polyester film is introduced into an internal electrode type plasma polymerization apparatus and, after said apparatus is evacuated to set initial pressure to 1X10<-4>Torr, glycidyl methacrylate is introduced and discharge treatment is performed at power density of 400Wmin/m<2> while pressure is held to 0.2Torr to provide a plasma polymerization layer having a thickness of about 100Angstrom on the surface of the polyester film. Then, a metal vapor- deposited layer is formed on the plasma polymerization layer to obtain 180 deg. wet release strength of 55g/cm exceeding 30g/cm being a practical level in a general use aspect.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は金属蒸着フイルムムに関するもので、蒸着ヌケ
(ピンホール)が極めて少なく、かつ高温高湿下および
液中での接着性に優れた金属蒸着フィルムに関するもの
である。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a metal vapor-deposited film, which has extremely few vapor deposition holes (pinholes) and has excellent adhesion under high temperature and high humidity conditions and in liquids. It relates to vapor-deposited films.

[従来の技術] 高分子樹脂フィルム基材上に/l、Cu、Pd。[Conventional technology] /l, Cu, Pd on the polymer resin film base material.

Tiなどの金属を蒸着したフィルム、いわゆる金属蒸着
フィルムは種々の用途に用いられている。
Films on which metals such as Ti are deposited, so-called metal-deposited films, are used for various purposes.

例えば、コンデンサー、食品包装材、透明導電フィルム
、磁気テープなどである。
Examples include capacitors, food packaging materials, transparent conductive films, and magnetic tapes.

しかしながら、高分子樹脂フィルム基材上に直接金属を
蒸着した場合には、金属と基材の接着力が弱く、金属蒸
着膜の剥離、あるいはピンホールによる蒸着ヌケが生じ
、実用上問題がある。
However, when a metal is directly deposited on a polymer resin film base material, the adhesion between the metal and the base material is weak, resulting in peeling of the metal deposited film or missing deposition due to pinholes, which poses a practical problem.

例えば、ポリエステルフィルムに、八〇、を蒸着した包
装材用途では、水蒸気透過率の増大から生ずる透湿の問
題、あるいは磁気記録テープにおけるドロップアウトな
どの問題などである。
For example, in the case of packaging materials in which 80 is deposited on a polyester film, there are problems such as moisture permeability caused by an increase in water vapor permeability or dropouts in magnetic recording tapes.

これらの問題点を改善したものとして、特開昭59−9
6137には、有機ケイ素化合物ガスの低温プラズマ処
理によるプラズマ重合膜を形成し、次いでメタライジン
グする方法が提案されている。しかし該方法によるもの
は、通常湿度条件下における接着力は優れているが、高
温高湿下あるいは液体中で急激に接着力が低下する欠点
がある。ざらに、製造技術的には、プラズマ重合中に重
合が急激に進み、電極および処理基材表面上にプラズマ
重合物が、パウダー状に析出するという欠点がある。
As a solution to these problems, Japanese Unexamined Patent Publication No. 59-9
No. 6137 proposes a method in which a plasma polymerized film is formed by low-temperature plasma treatment of organosilicon compound gas, and then metallized. However, although the adhesive obtained by this method has excellent adhesive strength under normal humidity conditions, it has the disadvantage that the adhesive strength rapidly decreases under high temperature and high humidity conditions or in liquid. Generally speaking, in terms of manufacturing technology, there is a drawback that polymerization proceeds rapidly during plasma polymerization, and a plasma polymer is deposited in powder form on the surface of the electrode and the treated substrate.

また、特公昭61−13310には、ポリエステルフィ
ルム表面を窒素気体雰囲気中でコロナ放電処理した後、
金属蒸着したものが提案されている。該提案によるもの
は、従来のものより高温高湿下の水蒸気遮断性劣化防止
の点からいえば、改良されているが、近年要求されてい
る過酷な条件での使用、例えばワイン容器などのような
飲料用液体保存容器として使用する場合には、高温殺菌
時に蒸着層が簡単に剥離してしまい、使用できないとい
う問題がある。
Furthermore, in Japanese Patent Publication No. 13310/1986, after the surface of a polyester film was subjected to corona discharge treatment in a nitrogen gas atmosphere,
A metal vapor-deposited one has been proposed. Although the proposed product is better than the conventional one in terms of preventing deterioration of water vapor barrier properties under high temperature and high humidity, it cannot be used under harsh conditions that have been required in recent years, such as wine containers. When used as a beverage liquid storage container, there is a problem that the vapor deposition layer easily peels off during high temperature sterilization, making it unusable.

ざらにメツキ型のフレキシブルプリント基板の製造にコ
ロナ放電処理を適用する場合、例えば耐熱フィルムをコ
ロナ放電処理後、その上に予めCUなどを蒸着し、次い
でさらにメツキ方式によって銅を厚く積層する必要がお
るが、この場合、メツキ浴中に入れた際、蒸着膜がフィ
ルムから簡単に剥離してしまうという問題がある。
When corona discharge treatment is applied to the production of rough plating type flexible printed circuit boards, for example, it is necessary to apply corona discharge treatment to a heat-resistant film, then evaporate CU or the like on it in advance, and then further laminate a thick layer of copper using a plating method. However, in this case, there is a problem in that the deposited film easily peels off from the film when placed in a plating bath.

[発明が解決しようとする問題点] 本発明は、かかる従来技術の諸欠点に鑑み創案されたも
ので、その目的はフィルムの機械的特性を損なわず、金
属蒸着膜の接着力、特に液中または高湿下における接着
力が優れ、かつ蒸着ヌケの少ない金属蒸着フィルムを提
供することにある。
[Problems to be Solved by the Invention] The present invention was devised in view of the various drawbacks of the prior art, and its purpose is to improve the adhesive strength of the metal-deposited film, especially in liquid, without impairing the mechanical properties of the film. Another object of the present invention is to provide a metal vapor-deposited film that has excellent adhesive strength under high humidity and has few vapor deposition spots.

[問題点を解決するための手段] かかる本発明の目的は、高分子樹脂フィルムと金属蒸着
層が、グリシジル基を有するアクリルまたはメタクリル
化合物から形成されたプラズマ重合層を介して接合され
てなる金属蒸着フィルムにより達成される。
[Means for Solving the Problems] The object of the present invention is to provide a metal film in which a polymer resin film and a metal vapor deposition layer are bonded via a plasma polymerized layer formed from an acrylic or methacrylic compound having a glycidyl group. Achieved by vapor deposited film.

本発明において使用される高分子樹脂フィルムとしては
、ポリエステルフィルム、ポリプロピレンフィルムある
いはポリイミド系フィルム、ポリフェニレンスルフィド
系フィルムなど通常蒸着用基材として用いられているも
のが挙げられるが、好ましくは、耐高湿性、耐水性に優
れたポリエステルフィルム、ポリプロピレンフィルムお
よびピロメリット酸二無水物と4,4′−ジアミノジフ
ェニルエーテルの縮合物または、3,4.3−。
Examples of the polymer resin film used in the present invention include those commonly used as substrates for vapor deposition, such as polyester films, polypropylene films, polyimide films, and polyphenylene sulfide films. , a polyester film with excellent water resistance, a polypropylene film, and a condensate of pyromellitic dianhydride and 4,4'-diaminodiphenyl ether, or 3,4.3-.

4−−ビフェニルテトラカルボン ジアミノジフェニルエーテルの縮合物からなるポリイミ
ドフィルムがより好ましく、中でもポリエステルフィル
ムが特に好ましい。
A polyimide film made of a condensate of 4-biphenyltetracarboxylic diaminodiphenyl ether is more preferred, and a polyester film is particularly preferred.

ここでポリエステルフィルムとは、芳香族二塩基酸また
はそのエステル形成性誘導体と、ジオールとから合成さ
れる高結晶性の線状飽和ポリエステルであり、具体的に
はポリエチレンテレフタレート、ポリエチレンイソフタ
レート、ポリブチレンテレフタレート、ポリエチレン−
2,6−ナフタレートまたは一部が他成分に置換された
共重合体や、ポリアルキレングリコール、ポリカーボネ
ートなどの配合体を常法により二軸延伸したフィルムが
挙げられる。
Here, the polyester film is a highly crystalline linear saturated polyester synthesized from an aromatic dibasic acid or its ester-forming derivative and a diol. Terephthalate, polyethylene
Examples include a film obtained by biaxially stretching a blend of 2,6-naphthalate or a copolymer partially substituted with another component, polyalkylene glycol, polycarbonate, etc. by a conventional method.

フィルムの厚さは、特に限定されるものではなく、目的
に応じ好ましく選定すれば良い。
The thickness of the film is not particularly limited, and may be appropriately selected depending on the purpose.

通常包装材用途としては約50μm前後のものが使用さ
れる。また上記フィルムを予めグロー放電、あるいはコ
ロナ放電、表面改質用のコーティングなど前処理を施し
ておいてもよい。
Generally, for packaging materials, a thickness of around 50 μm is used. Further, the film may be subjected to a pretreatment such as glow discharge, corona discharge, or coating for surface modification.

本発明においてプラズマ重合層とはグリシジル基を有す
るアクリルまたはメタクリル化合物の蒸気雰囲気下で放
電によって形成される有機化合物重合体層をさす。
In the present invention, the plasma polymerized layer refers to an organic compound polymer layer formed by electric discharge in a vapor atmosphere of an acrylic or methacrylic compound having a glycidyl group.

プラズマ重合の方法は公知の方法でよく、例えばフィル
ムを内部電極方式の装置内にセットした後、真空ポンプ
で排気し、次いでグリシジル基を有するアクリルまたは
メタクリル化合物の蒸気を所定の圧力(0.01〜10
TOrr程度)になるまで供給した後、適当な電力を電
極に印加する方法などである。
The method of plasma polymerization may be a known method. For example, after setting the film in an internal electrode type device, it is evacuated with a vacuum pump, and then the vapor of an acrylic or methacrylic compound having a glycidyl group is heated to a predetermined pressure (0.01 ~10
For example, after supplying the voltage until the voltage reaches approximately 100 mΩ (TORR), appropriate power is applied to the electrodes.

本発明においてグリシジル基を有するアクリルまたはメ
タクリル化合物とは、次式で示されるものをいう。
In the present invention, the acrylic or methacrylic compound having a glycidyl group refers to one represented by the following formula.

CH2=CR 嘱 Coo (CH2→−CH−CI−121  \1 ここでRは一Hまたは一〇H3を示す。CH2=CR 嘱 Coo (CH2→-CH-CI-121 \1 Here, R represents 1H or 10H3.

nは1〜3の整数を示す。n represents an integer of 1 to 3.

中でもRが一〇H3、n=1のグリシジルメタクリレー
トが接着効果、取扱い性などの点から好ましい。
Among them, glycidyl methacrylate in which R is 10H3 and n=1 is preferable from the viewpoint of adhesive effect and ease of handling.

プラズマ重合層の厚さは特に限定されないが、接着効果
および蒸着時のカール防止性などの点から20人〜4μ
mの範囲が好ましく、より好ましくは50〜2000人
である。
The thickness of the plasma polymerized layer is not particularly limited, but from the viewpoint of adhesion effect and curl prevention during vapor deposition, it is 20 to 4μ.
The range of m is preferable, and more preferably 50 to 2000 people.

本発明における金属蒸着層としては、特に限定されるも
のではなく、公知の金属または合金を、加熱蒸着、電子
ビーム蒸着、あるいはスパッタリングなどの公知の方法
によって形成されるものが使用可能であるが、ArL、
Cu、Zn、T i 、Ni、Go、 Feなどの金属
またはこれらの合金など、おるいはこれらの酸化物など
の蒸着層が、高温または液中でも接着力が強い点で好ま
しい。
The metal vapor deposited layer in the present invention is not particularly limited, and a layer formed from a known metal or alloy by a known method such as heating vapor deposition, electron beam vapor deposition, or sputtering can be used. ArL,
A vapor-deposited layer made of metals such as Cu, Zn, Ti, Ni, Go, Fe, alloys thereof, or oxides thereof is preferable because it has strong adhesive strength even at high temperatures or in liquid.

金属蒸着層の厚さは特に限定されるものではないが、4
00人〜50μmの範囲が好ましく、より好ましくは5
00人〜20μmである。
The thickness of the metal vapor deposition layer is not particularly limited, but may be 4
The range is preferably 00 to 50 μm, more preferably 5
00 to 20 μm.

[実施例] 以下実施例により本発明を具体的に説明するが、実施例
中の物性はそれぞれ次の方法で測定したものである。
[Example] The present invention will be specifically described below with reference to Examples, and the physical properties in the Examples were measured by the following methods.

[物性の測定方法] (1)蒸着層と基材フィルムの接着性 A、セロテープの剥離強度 蒸着フィルムの蒸着面に、市販のセロファン粘着テープ
にチバン(株)製、“′セロテープ′)を貼り付け、指
で強く押圧後、180度剥離し、次の基準に従って剥離
後の付着面積を5段階指数で判定した。
[Method for measuring physical properties] (1) Adhesion A between vapor deposited layer and base film, peel strength of cellophane tape A commercially available cellophane adhesive tape manufactured by Chiban Co., Ltd., "'Cello Tape") was applied to the vapor deposition surface of the vapor deposited film. After applying it and pressing it strongly with a finger, it was peeled off at 180 degrees, and the adhesion area after peeling was evaluated using a 5-level index according to the following criteria.

8.180度湿剥離強度 a、サンプル 厚さ9.5mmのアルミ板上にエポキシ系接着剤(チバ
ガイギー(株)製“アラルダイト・ラピッド”)を塗布
した上に蒸着フィルムの蒸着面をつけ、直径’lQmm
のガラス棒を手でころがしながら押圧し、80℃に調温
された熱風乾燥機中で30分間キュアした。ざらに幅’
lQmm、接着長さ75mm、非接着長さ25mm、全
長100mmに切断した。
8. Apply an epoxy adhesive (“Araldite Rapid” manufactured by Ciba Geigy Corporation) to an aluminum plate with a sample thickness of 9.5 mm and a wet peel strength of 180 degrees, and attach the vapor deposition surface of the vapor deposition film to the aluminum plate with a sample thickness of 9.5 mm. 'lQmm
A glass rod was rolled and pressed by hand, and cured for 30 minutes in a hot air dryer controlled at 80°C. Rough width'
It was cut into pieces of lQmm, bonded length 75mm, non-bonded length 25mm, and total length 100mm.

(2)180度湿剥離強度の測定 (1)で得たサンプルを、万能引張り試験機(東洋ボー
ルドウィン製、“テンシロン″)を用い、サンプルをセ
ット後、剥離界面にスポイトで水を滴下(約0.050
0)L/た後、接着力を測定した。
(2) Measurement of 180 degree wet peel strength After setting the sample obtained in (1) on a universal tensile tester (Toyo Baldwin, "Tensilon"), drop water with a dropper onto the peel interface (approx. 0.050
After 0)L/, the adhesive strength was measured.

測定条件:引張り速度 200mm/m i nサンプ
ル寸法:幅’l□mm、長さ100mm。
Measurement conditions: tensile speed 200 mm/min Sample dimensions: width '1 mm, length 100 mm.

接着長さ75mm 実施例1 厚さ38μm1幅15cmのポリエステルフィルム(東
しく株)製 ゛ルミラー″)を内部電極方式のプラズマ
重合装置に入れ、初期圧力1×10−4丁orrに排気
後、グリシジルメタクリレートを導入し、Q、21or
rの圧力に保ち、電力密度400W−mi n/m2で
放電処理してポリエステルフィルム表面上にプラズマ重
合層を約100人厚さに設けた後、該プラズマ重合層上
に下記条件で金属蒸着層を形成した。
Adhesion length: 75 mm Example 1 A polyester film (manufactured by Toshiku Co., Ltd.) with a thickness of 38 μm and a width of 15 cm was placed in an internal electrode type plasma polymerization device, and after being evacuated to an initial pressure of 1×10 −4 orr, glycidyl Introducing methacrylate, Q, 21or
After forming a plasma polymerized layer to a thickness of about 100 mm on the surface of the polyester film by maintaining the pressure at a pressure of was formed.

蒸着条件 装置:高真空蒸着装置 EBB−6型 (日本真空(株)製) 蒸着金属ニアルミニウム 真空度: ’l x ’l Q ″4mmH蒸着厚み2
600人 得られた金属蒸着フィルムについてセロテープ剥離強度
を測定したところ指数5と極めて良好であった。また1
80度湿剥離強度は55(J/Cmでおり、一般使用上
実用レベルと判断される30に]/Cmをはるかに上回
る強度であった。
Vapor deposition conditions Equipment: High vacuum evaporation equipment EBB-6 type (manufactured by Japan Vacuum Co., Ltd.) Evaporation metal Nialuminum Vacuum degree: 'l x 'l Q'' 4mmH evaporation thickness 2
When the cellophane tape peel strength of the metallized films obtained by 600 people was measured, it was found to be extremely good with an index of 5. Also 1
The 80 degree wet peel strength was much higher than 55 (J/Cm, which is 30]/Cm, which is considered to be a practical level for general use).

比較例1 実施例1と同じポリエステルフィルムを下記条件でN2
中でコロナ放電処理を行なった後、金属 ゛蒸着を実施
例1と同条件で行なった。得られたサンプルのセロテー
プ剥離強度は1 C1/Cm以下で、全く接着力を有し
ていなかった。
Comparative Example 1 The same polyester film as Example 1 was heated with N2 under the following conditions.
After corona discharge treatment was carried out in the chamber, metal vapor deposition was carried out under the same conditions as in Example 1. The obtained sample had a cellophane tape peel strength of 1 C1/Cm or less, and had no adhesive strength at all.

コロナ放電処理条件 装置:コロナ放電処理装置 (春日電機(株)製 HF−401) Lll1強度:  6,0OOJ/m”N2流量: 2
00D、/分 [発明の効果] 本発明は上述のごとく構成したので、高温高湿下はもと
より、液中においても蒸着金属層の接着力が低下せず、
コンデンサー、包装容器、特に高圧蒸気滅菌を施す液体
容器をはじめとして電機、包装、装飾など種々の用途に
おいて優れた性能を示すものである。
Corona discharge treatment conditions Equipment: Corona discharge treatment equipment (Kasuga Denki Co., Ltd. HF-401) Lll1 strength: 6,0OOJ/m”N2 flow rate: 2
00D,/min [Effects of the Invention] Since the present invention is configured as described above, the adhesive strength of the vapor-deposited metal layer does not decrease not only under high temperature and high humidity conditions but also in liquid.
It shows excellent performance in a variety of applications including condensers, packaging containers, especially liquid containers subject to high-pressure steam sterilization, electrical equipment, packaging, and decoration.

Claims (1)

【特許請求の範囲】[Claims] (1)高分子樹脂フィルムと金属蒸着層が、グリシジル
基を有するアクリルまたはメタクリル化合物から形成さ
れたプラズマ重合層を介して接合されてなる金属蒸着フ
ィルム。
(1) A metal vapor deposited film in which a polymer resin film and a metal vapor deposited layer are bonded via a plasma polymerized layer formed from an acrylic or methacrylic compound having a glycidyl group.
JP33168287A 1987-12-26 1987-12-26 Metallized film Pending JPH01171856A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33168287A JPH01171856A (en) 1987-12-26 1987-12-26 Metallized film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33168287A JPH01171856A (en) 1987-12-26 1987-12-26 Metallized film

Publications (1)

Publication Number Publication Date
JPH01171856A true JPH01171856A (en) 1989-07-06

Family

ID=18246399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33168287A Pending JPH01171856A (en) 1987-12-26 1987-12-26 Metallized film

Country Status (1)

Country Link
JP (1) JPH01171856A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010058516A (en) * 2000-04-20 2010-03-18 Battelle Memorial Inst Smoothing layer and barrier layer on tg substrate
GB2485336A (en) * 2010-10-29 2012-05-16 Camvac Ltd Metallised multi-layer film
GB2500084A (en) * 2010-10-29 2013-09-11 Camvac Ltd Metallised multi-layer film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010058516A (en) * 2000-04-20 2010-03-18 Battelle Memorial Inst Smoothing layer and barrier layer on tg substrate
JP2013056546A (en) * 2000-04-20 2013-03-28 Samsung Display Co Ltd SMOOTHING LAYER AND BARRIER LAYER ON Tg SUBSTRATE
GB2485336A (en) * 2010-10-29 2012-05-16 Camvac Ltd Metallised multi-layer film
GB2485336B (en) * 2010-10-29 2013-02-20 Camvac Ltd Metallised film
GB2500084A (en) * 2010-10-29 2013-09-11 Camvac Ltd Metallised multi-layer film
GB2500084B (en) * 2010-10-29 2014-04-23 Camvac Ltd Metallised film

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