JPS58151541A - 水漏洩検出装置 - Google Patents

水漏洩検出装置

Info

Publication number
JPS58151541A
JPS58151541A JP57033906A JP3390682A JPS58151541A JP S58151541 A JPS58151541 A JP S58151541A JP 57033906 A JP57033906 A JP 57033906A JP 3390682 A JP3390682 A JP 3390682A JP S58151541 A JPS58151541 A JP S58151541A
Authority
JP
Japan
Prior art keywords
hydrogen
ion pump
pumping speed
detection device
equilibrium pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57033906A
Other languages
English (en)
Japanese (ja)
Other versions
JPS622257B2 (enrdf_load_stackoverflow
Inventor
Nobuyuki Isogai
磯貝 暢之
Tatsuo Hamada
浜田 辰男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Industry and Control Solutions Co Ltd
Original Assignee
Hitachi Engineering Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Engineering Co Ltd, Hitachi Ltd filed Critical Hitachi Engineering Co Ltd
Priority to JP57033906A priority Critical patent/JPS58151541A/ja
Publication of JPS58151541A publication Critical patent/JPS58151541A/ja
Publication of JPS622257B2 publication Critical patent/JPS622257B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
JP57033906A 1982-03-05 1982-03-05 水漏洩検出装置 Granted JPS58151541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57033906A JPS58151541A (ja) 1982-03-05 1982-03-05 水漏洩検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57033906A JPS58151541A (ja) 1982-03-05 1982-03-05 水漏洩検出装置

Publications (2)

Publication Number Publication Date
JPS58151541A true JPS58151541A (ja) 1983-09-08
JPS622257B2 JPS622257B2 (enrdf_load_stackoverflow) 1987-01-19

Family

ID=12399553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57033906A Granted JPS58151541A (ja) 1982-03-05 1982-03-05 水漏洩検出装置

Country Status (1)

Country Link
JP (1) JPS58151541A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS622257B2 (enrdf_load_stackoverflow) 1987-01-19

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