JPS621215B2 - - Google Patents

Info

Publication number
JPS621215B2
JPS621215B2 JP56033424A JP3342481A JPS621215B2 JP S621215 B2 JPS621215 B2 JP S621215B2 JP 56033424 A JP56033424 A JP 56033424A JP 3342481 A JP3342481 A JP 3342481A JP S621215 B2 JPS621215 B2 JP S621215B2
Authority
JP
Japan
Prior art keywords
hydrogen
vacuum chamber
vacuum
orifice
ion pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56033424A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57148234A (en
Inventor
Shiro Furumura
Juji Sano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3342481A priority Critical patent/JPS57148234A/ja
Publication of JPS57148234A publication Critical patent/JPS57148234A/ja
Publication of JPS621215B2 publication Critical patent/JPS621215B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
    • G01N7/10—Analysing materials by measuring the pressure or volume of a gas or vapour by allowing diffusion of components through a porous wall and measuring a pressure or volume difference

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating And Analyzing Materials By Characteristic Methods (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP3342481A 1981-03-09 1981-03-09 Hydrogen detector Granted JPS57148234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3342481A JPS57148234A (en) 1981-03-09 1981-03-09 Hydrogen detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3342481A JPS57148234A (en) 1981-03-09 1981-03-09 Hydrogen detector

Publications (2)

Publication Number Publication Date
JPS57148234A JPS57148234A (en) 1982-09-13
JPS621215B2 true JPS621215B2 (enrdf_load_stackoverflow) 1987-01-12

Family

ID=12386170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3342481A Granted JPS57148234A (en) 1981-03-09 1981-03-09 Hydrogen detector

Country Status (1)

Country Link
JP (1) JPS57148234A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004034381A1 (de) * 2004-07-16 2006-02-16 Inficon Gmbh Gassensor und Verfahren zum Betreiben einer Getterpumpe
DE102005021909A1 (de) * 2005-05-12 2006-11-16 Inficon Gmbh Schnüffellecksucher mit Quarzfenstersensor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54691A (en) * 1977-06-03 1979-01-06 Hitachi Ltd Hydrogen detector

Also Published As

Publication number Publication date
JPS57148234A (en) 1982-09-13

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