JPS58150839U - 電子ビ−ムを用いた測定装置 - Google Patents

電子ビ−ムを用いた測定装置

Info

Publication number
JPS58150839U
JPS58150839U JP1659783U JP1659783U JPS58150839U JP S58150839 U JPS58150839 U JP S58150839U JP 1659783 U JP1659783 U JP 1659783U JP 1659783 U JP1659783 U JP 1659783U JP S58150839 U JPS58150839 U JP S58150839U
Authority
JP
Japan
Prior art keywords
potential
electron beam
semiconductor element
measuring
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1659783U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62191Y2 (ko
Inventor
純一 石井
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP1659783U priority Critical patent/JPS58150839U/ja
Publication of JPS58150839U publication Critical patent/JPS58150839U/ja
Application granted granted Critical
Publication of JPS62191Y2 publication Critical patent/JPS62191Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP1659783U 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置 Granted JPS58150839U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1659783U JPS58150839U (ja) 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1659783U JPS58150839U (ja) 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置

Publications (2)

Publication Number Publication Date
JPS58150839U true JPS58150839U (ja) 1983-10-08
JPS62191Y2 JPS62191Y2 (ko) 1987-01-07

Family

ID=30028960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1659783U Granted JPS58150839U (ja) 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置

Country Status (1)

Country Link
JP (1) JPS58150839U (ko)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974484A (ko) * 1972-11-17 1974-07-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4974484A (ko) * 1972-11-17 1974-07-18

Also Published As

Publication number Publication date
JPS62191Y2 (ko) 1987-01-07

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