JPS58148935U - probe card - Google Patents

probe card

Info

Publication number
JPS58148935U
JPS58148935U JP4639482U JP4639482U JPS58148935U JP S58148935 U JPS58148935 U JP S58148935U JP 4639482 U JP4639482 U JP 4639482U JP 4639482 U JP4639482 U JP 4639482U JP S58148935 U JPS58148935 U JP S58148935U
Authority
JP
Japan
Prior art keywords
probe card
support
attach
holes
large number
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4639482U
Other languages
Japanese (ja)
Inventor
昌男 大久保
Original Assignee
日本電子材料株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電子材料株式会社 filed Critical 日本電子材料株式会社
Priority to JP4639482U priority Critical patent/JPS58148935U/en
Publication of JPS58148935U publication Critical patent/JPS58148935U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本案品の一実施例を略示する斜視図、第２図は
その部分断面図、第３図は支持体の貫通孔を説明するた
めの説明図、第４図は本案品のその他の実施例の説明図
である。 １・・・・・・プリント基板、２・・・・・・プリント
配線、３・・・・・・開口部、６・・・・・・支持体、
８・・・・・・貫通孔、９・・・・・・探針。Fig. 1 is a perspective view schematically showing one embodiment of the proposed product, Fig. 2 is a partial sectional view thereof, Fig. 3 is an explanatory diagram for explaining the through hole of the support, and Fig. 4 is a diagram of the proposed product. It is an explanatory view of other examples. DESCRIPTION OF SYMBOLS 1... Printed circuit board, 2... Printed wiring, 3... Opening, 6... Support,
8... Through hole, 9... Probe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 表面にプリント配線の形成されたプリント基板の開口部
の裏面に、予め所定の間隔で多数の貫通孔が鉛直に穿設
されている支持体を取り付け、前記貫通孔のうち、測定
しようとする半導体素子の電極に対応した貫通孔に探針
の一端をそれぞれ絶縁性を保持しつつ摺動自在に挿入し
、その先端部を支持体下面より突出させたことを特徴と
するプローブカード。Attach a support in which a large number of through holes are vertically drilled at predetermined intervals to the back side of the opening of a printed circuit board with printed wiring formed on its surface, and attach a support body in which a large number of through holes are perforated vertically at predetermined intervals. A probe card characterized in that one end of a probe is slidably inserted into a through-hole corresponding to an electrode of an element while maintaining insulation, and the tip thereof protrudes from the lower surface of a support.
JP4639482U 1982-03-31 1982-03-31 probe card Pending JPS58148935U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4639482U JPS58148935U (en) 1982-03-31 1982-03-31 probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4639482U JPS58148935U (en) 1982-03-31 1982-03-31 probe card

Publications (1)

Publication Number Publication Date
JPS58148935U true JPS58148935U (en) 1983-10-06

Family

ID=30057390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4639482U Pending JPS58148935U (en) 1982-03-31 1982-03-31 probe card

Country Status (1)

Country Link
JP (1) JPS58148935U (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154137A (en) * 1984-12-27 1986-07-12 Seiichiro Sogo Test probe assembly
JPS63114228A (en) * 1986-10-31 1988-05-19 Tokyo Electron Ltd Tester
JPS63142826A (en) * 1986-12-05 1988-06-15 Tokyo Electron Ltd Probe card
JPS63108634U (en) * 1987-01-07 1988-07-13
JPS6428565A (en) * 1987-05-29 1989-01-31 Teradyne Inc Probe for inspection of electronic component
JPH01140072A (en) * 1987-11-26 1989-06-01 Tokyo Electron Ltd Probing card
JP2006010559A (en) * 2004-06-28 2006-01-12 Nidec-Read Corp Probe device, and substrate inspection device
JPWO2020203848A1 (en) * 2019-04-05 2020-10-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133550A (en) * 1979-04-03 1980-10-17 Yoshie Hasegawa Probe needle

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133550A (en) * 1979-04-03 1980-10-17 Yoshie Hasegawa Probe needle

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154137A (en) * 1984-12-27 1986-07-12 Seiichiro Sogo Test probe assembly
JPS63114228A (en) * 1986-10-31 1988-05-19 Tokyo Electron Ltd Tester
JPS63142826A (en) * 1986-12-05 1988-06-15 Tokyo Electron Ltd Probe card
JPS63108634U (en) * 1987-01-07 1988-07-13
JPS6428565A (en) * 1987-05-29 1989-01-31 Teradyne Inc Probe for inspection of electronic component
JPH01140072A (en) * 1987-11-26 1989-06-01 Tokyo Electron Ltd Probing card
JP2006010559A (en) * 2004-06-28 2006-01-12 Nidec-Read Corp Probe device, and substrate inspection device
JPWO2020203848A1 (en) * 2019-04-05 2020-10-08
WO2020203848A1 (en) * 2019-04-05 2020-10-08 日本電産リード株式会社 Inspection jig and inspection device
US11933837B2 (en) 2019-04-05 2024-03-19 Nidec Read Corporation Inspection jig, and inspection device

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