JPS58140609A - 表面状態評価装置 - Google Patents
表面状態評価装置Info
- Publication number
- JPS58140609A JPS58140609A JP57022680A JP2268082A JPS58140609A JP S58140609 A JPS58140609 A JP S58140609A JP 57022680 A JP57022680 A JP 57022680A JP 2268082 A JP2268082 A JP 2268082A JP S58140609 A JPS58140609 A JP S58140609A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- amount
- standard
- received
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims abstract description 20
- 238000009826 distribution Methods 0.000 claims abstract description 17
- 238000011156 evaluation Methods 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 5
- 230000003872 anastomosis Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 13
- 239000010408 film Substances 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 238000007740 vapor deposition Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57022680A JPS58140609A (ja) | 1982-02-17 | 1982-02-17 | 表面状態評価装置 |
| US06/404,899 US4583861A (en) | 1981-08-12 | 1982-08-03 | Surface condition judging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57022680A JPS58140609A (ja) | 1982-02-17 | 1982-02-17 | 表面状態評価装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58140609A true JPS58140609A (ja) | 1983-08-20 |
| JPS644141B2 JPS644141B2 (enrdf_load_stackoverflow) | 1989-01-24 |
Family
ID=12089570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57022680A Granted JPS58140609A (ja) | 1981-08-12 | 1982-02-17 | 表面状態評価装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58140609A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61270642A (ja) * | 1985-05-25 | 1986-11-29 | Japan Spectroscopic Co | 拡散反射オ−トサンプラ− |
| JPS6316247A (ja) * | 1985-07-25 | 1988-01-23 | カ−ル・ツアイス−スチフツング | 無接触反射率測定装置 |
| JP2007528997A (ja) * | 2003-07-15 | 2007-10-18 | コンセホ・スペリオール・デ・インベスティガシオネス・シエンティフィカス | 太陽電池セルのテクスチャの定量的評価のための光学的方法および装置 |
| WO2015008016A3 (en) * | 2013-07-18 | 2015-04-09 | Perkinelmer Singapore Pte Limited | Sample spinners and spectrometers including sample spinners |
-
1982
- 1982-02-17 JP JP57022680A patent/JPS58140609A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61270642A (ja) * | 1985-05-25 | 1986-11-29 | Japan Spectroscopic Co | 拡散反射オ−トサンプラ− |
| JPS6316247A (ja) * | 1985-07-25 | 1988-01-23 | カ−ル・ツアイス−スチフツング | 無接触反射率測定装置 |
| JP2007528997A (ja) * | 2003-07-15 | 2007-10-18 | コンセホ・スペリオール・デ・インベスティガシオネス・シエンティフィカス | 太陽電池セルのテクスチャの定量的評価のための光学的方法および装置 |
| WO2015008016A3 (en) * | 2013-07-18 | 2015-04-09 | Perkinelmer Singapore Pte Limited | Sample spinners and spectrometers including sample spinners |
| US9983119B2 (en) | 2013-07-18 | 2018-05-29 | Perkinelmer Singapore Pte Limited | Sample spinners and spectrometers including sample spinners |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS644141B2 (enrdf_load_stackoverflow) | 1989-01-24 |
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