JPS58140609A - 表面状態評価装置 - Google Patents

表面状態評価装置

Info

Publication number
JPS58140609A
JPS58140609A JP57022680A JP2268082A JPS58140609A JP S58140609 A JPS58140609 A JP S58140609A JP 57022680 A JP57022680 A JP 57022680A JP 2268082 A JP2268082 A JP 2268082A JP S58140609 A JPS58140609 A JP S58140609A
Authority
JP
Japan
Prior art keywords
light
amount
measured
standard
received
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57022680A
Other languages
English (en)
Japanese (ja)
Other versions
JPS644141B2 (enrdf_load_stackoverflow
Inventor
Shigeru Ogawa
茂 小川
Hiroshi Yamaji
山地　廣
Katsuya Okumura
勝弥 奥村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP57022680A priority Critical patent/JPS58140609A/ja
Priority to US06/404,899 priority patent/US4583861A/en
Publication of JPS58140609A publication Critical patent/JPS58140609A/ja
Publication of JPS644141B2 publication Critical patent/JPS644141B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP57022680A 1981-08-12 1982-02-17 表面状態評価装置 Granted JPS58140609A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP57022680A JPS58140609A (ja) 1982-02-17 1982-02-17 表面状態評価装置
US06/404,899 US4583861A (en) 1981-08-12 1982-08-03 Surface condition judging apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57022680A JPS58140609A (ja) 1982-02-17 1982-02-17 表面状態評価装置

Publications (2)

Publication Number Publication Date
JPS58140609A true JPS58140609A (ja) 1983-08-20
JPS644141B2 JPS644141B2 (enrdf_load_stackoverflow) 1989-01-24

Family

ID=12089570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57022680A Granted JPS58140609A (ja) 1981-08-12 1982-02-17 表面状態評価装置

Country Status (1)

Country Link
JP (1) JPS58140609A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61270642A (ja) * 1985-05-25 1986-11-29 Japan Spectroscopic Co 拡散反射オ−トサンプラ−
JPS6316247A (ja) * 1985-07-25 1988-01-23 カ−ル・ツアイス−スチフツング 無接触反射率測定装置
JP2007528997A (ja) * 2003-07-15 2007-10-18 コンセホ・スペリオール・デ・インベスティガシオネス・シエンティフィカス 太陽電池セルのテクスチャの定量的評価のための光学的方法および装置
WO2015008016A3 (en) * 2013-07-18 2015-04-09 Perkinelmer Singapore Pte Limited Sample spinners and spectrometers including sample spinners

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61270642A (ja) * 1985-05-25 1986-11-29 Japan Spectroscopic Co 拡散反射オ−トサンプラ−
JPS6316247A (ja) * 1985-07-25 1988-01-23 カ−ル・ツアイス−スチフツング 無接触反射率測定装置
JP2007528997A (ja) * 2003-07-15 2007-10-18 コンセホ・スペリオール・デ・インベスティガシオネス・シエンティフィカス 太陽電池セルのテクスチャの定量的評価のための光学的方法および装置
WO2015008016A3 (en) * 2013-07-18 2015-04-09 Perkinelmer Singapore Pte Limited Sample spinners and spectrometers including sample spinners
US9983119B2 (en) 2013-07-18 2018-05-29 Perkinelmer Singapore Pte Limited Sample spinners and spectrometers including sample spinners

Also Published As

Publication number Publication date
JPS644141B2 (enrdf_load_stackoverflow) 1989-01-24

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